ABSTRACT
This paper introduces a new planar flexible hinge of fractal configuration to be incorporated in out-of-plane-motion compliant stages that cover a wide stiffness range. The large-displacement fractal hinge consists of a series of scaled-down, concentric, circular-axis flexible segments that are connected in a folded manner by radial rigid links. In-plane and out-of-plane compliance matrices are derived for fractal hinges with variable planar geometry features. The flexible hinges are assembled in a radial architecture to form compliant stages that can be utilized for piston-type, out-of-plane sensing or actuation. The analytical model calculates the stage active, out-of-plane stiffness, as well as its parasitic, in-plane stiffness. The stage analytical stiffness is confirmed by the experimental testing of a prototype and by finite element simulation. Furthermore, analytical-model simulation is performed to evaluate the variations in the active and parasitic stiffnesses with key geometric parameters, which also enables optimization.
ABSTRACT
This article introduces in archival form the Nanolithography Toolbox, a platform-independent software package for scripted lithography pattern layout generation. The Center for Nanoscale Science and Technology (CNST) at the National Institute of Standards and Technology (NIST) developed the Nanolithography Toolbox to help users of the CNST NanoFab design devices with complex curves and aggressive critical dimensions. Using parameterized shapes as building blocks, the Nanolithography Toolbox allows users to rapidly design and layout nanoscale devices of arbitrary complexity through scripting and programming. The Toolbox offers many parameterized shapes, including structure libraries for micro- and nanoelectromechanical systems (MEMS and NEMS) and nanophotonic devices. Furthermore, the Toolbox allows users to precisely define the number of vertices for each shape or create vectorized shapes using Bezier curves. Parameterized control allows users to design smooth curves with complex shapes. The Toolbox is applicable to a broad range of design tasks in the fabrication of microscale and nanoscale devices.
ABSTRACT
The bending compliances of generalized notch flexure hinges with transverse or transverse-and-axial symmetry are studied in two particular reference frames. For an end-point reference frame, the cross compliance and the rotary compliance are proportional. When the reference frame is placed at the flexure's midpoint, the cross compliance is zero. The translatory and rotary compliances of only half the flexure hinge are sufficient to calculate the overall compliances of a transverse-symmetry flexure configuration. Similarly, the overall bending compliances of a flexure hinge with transverse-and-axial symmetry require prior calculation of the translatory and rotary compliances of a quarter flexure solely.
ABSTRACT
This paper presents a generalized compliance model for a three-segment notch flexure hinge with transverse symmetry. This flexure hinge configuration is most frequently employed in planar-motion, small-displacement compliant mechanisms. The axial and bending compliances are derived for this flexure hinge based on the compliances of two flexure components. The derivation is generalized such that it can be applied to various segment geometries. Using this open-ended model, a three-segment right elliptical corner-filleted flexure hinge design was analyzed. This geometric configuration introduces additional geometric parameters, which can be used to optimize the compliance of the flexure hinge without modifying its gross dimensions. The results of the analysis were validated in part by modifying the geometric parameters of the center segment and elliptical corner fillets to form limiting cases corresponding to several previously investigated configurations, namely right elliptical, three-segment right circular corner-filleted, and right circular geometries. Finite element analysis simulation and experimental testing were used to further validate the three-segment right elliptical corner-filleted analytical model. Additional simulations based on the analytical model were performed to highlight the influence of geometric parameters on compliances and to investigate shear effects for short flexure hinges.
