Outperforming piezoelectric ultrasonics with high-reliability single-membrane CMUT array elements.

It has long been hypothesized that capacitive micromachined ultrasound transducers (CMUTs) could potentially outperform piezoelectric technologies. However, challenges with dielectric charging, operational hysteresis, and transmit sensitivity have stood as obstacles to these performance outcomes. In this paper, we introduce key architectural features to enable high-reliability CMUTs with enhanced performance. Typically, a CMUT element in an array is designed with an ensemble of smaller membranes oscillating together to transmit or detect ultrasound waves. However, this approach can lead to unreliable behavior and suboptimal transmit performance if these smaller membranes oscillate out of phase or collapse at different voltages. In this work, we designed CMUT array elements composed of a single long rectangular membrane, with the aim of improving the output pressure and electromechanical efficiency. We compare the performance of three different modifications of this architecture: traditional contiguous dielectric, isolated isolation post (IIP), and insulated electrode-post (EP) CMUTs. EPs were designed to improve performance while also imparting robustness to charging and minimization of hysteresis. To fabricate these devices, a wafer-bonding process was developed with near-100% bonding yield. EP CMUT elements achieved electromechanical efficiency values as high as 0.95, higher than values reported with either piezoelectric transducers or previous CMUT architectures. Moreover, all investigated CMUT architectures exhibited transmit efficiency 2-3 times greater than published CMUT or piezoelectric transducer elements in the 1.5-2.0 MHz range. The EP and IIP CMUTs demonstrated considerable charging robustness, demonstrating minimal charging over 500,000 collapse-snap-back actuation cycles while also mitigating hysteresis. Our proposed approach offers significant promise for future ultrasonic applications.

Apoptotic balance during testicular detorsion after one hour induced torsion in rats.

Testicular torsion (TT) is an emergency complication that leads to oxidative stress and adversely affects spermatogenesis. Although immediate treatment consists of testicular detorsion (TD) to reverse TT-induced ischemia, mechanisms underlying recovery have yet to be fully understood. The current study aimed to investigate TD effects after a one-hour experimental TT by evaluating testicular antioxidant status and apoptosis-related proteins. Forty male Wistar rats were submitted to TT by testicular rotation, for one hour. Following TT, 32 rats were submitted to TD for 1, 2, 4, and 8 h (N = 8/group), the other 8 rats euthanized as TT-only. For controls, 8 rats were sham-operated. Testicular tissues were aseptically dissected for biochemical, histopathological, and immunohistochemistry analyses. The TD groups, especially after 4 h of TD, exhibited diminished MDA and increased TAC and GPX levels in testicular tissue. Levels of p53 and Caspase-3 were down-regulated in T1D4 and T1D8 groups versus torsion group. Bcl-2 was increased in T1D4 and T1D8 groups compared to the TT group. Moreover, spermatogenesis was recovered in T1D4 and T1D8 groups compared to the TT group. It can be concluded that after 1 h TT in rats, at least 4 h post-TD is needed for testicular tissue to initiate recovery.

Dual-Frequency CMUT Arrays for Multiband Ultrasound Imaging Applications.

Dual-frequency capacitive micromachined ultrasonic transducers (CMUTs) are introduced for multiscale imaging applications, where a single array transducer can be used for both deep low-resolution imaging and shallow high-resolution imaging. These transducers consist of low- and high-frequency membranes interlaced within each subarray element. They are fabricated using a modified sacrificial release process. Successful performance is demonstrated using wafer-level vibrometer testing, as well as acoustic testing on wirebonded dies consisting of arrays of 2- and 9-MHz elements of up to 64 elements for each subarray. The arrays are demonstrated to provide multiscale, multiresolution imaging using wire phantoms and can span frequencies from 2 MHz up to as high as 17 MHz. Peak transmit sensitivities of 27 and 7.5 kPa/V are achieved with the low- and high-frequency subarrays, respectively. At 16-mm imaging depth, lateral spatial resolution achieved is 0.84 and 0.33 mm for low- and high-frequency subarrays, respectively. The signal-to-noise ratio of the low-frequency subarray is significantly higher for deep targets compared to the high-frequency subarray. The array achieves multiband imaging capabilities difficult to achieve with current transducer technologies and may have applications to multipurpose probes and novel contrast agent imaging schemes.

A Nonlinear Lumped Equivalent Circuit Model for a Single Uncollapsed Square CMUT Cell.

An accurate nonlinear lumped equivalent circuit model is used for modeling of capacitive micromachined ultrasonic transducers (CMUTs). Finite-element analysis (FEA) is a powerful tool for the analysis of CMUT arrays with a small number of cells while with the harmonic balance (HB) analysis of the lumped equivalent circuit model, the entire behavior of a large-scale arbitrary CMUT array can be modeled in a very short time. Recently, an accurate nonlinear equivalent circuit model for uncollapsed single circular CMUT cells has been developed. However, the need for an accurate large-signal circuit model for CMUT cells with square membranes motivated us to produce a new nonlinear large-signal equivalent circuit model for uncollapsed CMUT cells. In this paper, using analytical calculations and FEA as the tuning tool, a precise large signal equivalent circuit model of square CMUT dynamics was developed and showed excellent agreement with finite-element modeling (FEM) results. Then, different CMUT single cells with square and circular membranes were fabricated using a standard sacrificial release process. Model predictions of resonance frequencies and displacements closely matched experimental vibrometer measurements. The framework presented here may prove valuable for future design and modeling of CMUT arrays with square membranes for ultrasound imaging and therapy applications.

Multifrequency Interlaced CMUTs for Photoacoustic Imaging.

Multifrequency capacitive micromachined ultrasound transducers (CMUTs) are introduced consisting of interlaced 82- [Formula: see text] (low frequency) and 36- [Formula: see text] (high frequency) membranes. The membranes have been interlaced on a scale smaller than the shortest wavelength of operation allowing several advantages over other multifrequency transducer designs including aligned beam profiles, optimal imaging resolution, and minimal grating lobes. The low- and high-frequency CMUTs operate at 1.74 and 5.04 MHz in immersion, respectively. Multifrequency transducers have applications in wideband photoacoustic (PA) imaging where multifrequency transducers are better able to detect both high- and low-frequency PA frequency content. The PA frequency content is target size dependent, which means traditional high-frequency transducers have less sensitivity to larger objects such as diffuse contrast agents. We demonstrate that the low-frequency subarrays are able to better visualize diffuse agent distributions, while the high-frequency subarrays offer fine-resolution imaging important for microvascular imaging and structural navigation. Spectroscopically unmixed images superimpose high sensitivity images of agent concentrations (acquired using low-frequency subarrays) onto high-resolution images of microvessel-mimicking phantoms (acquired using high-frequency subarrays).

Self and Mutual Radiation Impedances for Modeling of Multi-Frequency CMUT Arrays.

Multi-frequency capacitive micromachined ultrasonic transducers (CMUTs) consist of interlaced large and small membranes for multiband operation. In modeling these devices, accurate and computationally efficient methods are required for computing self- and mutual-acoustic-radiation impedances. However, most previous works considered mutual-acoustic impedance between radiators of identical size. A need was thus found to revisit the fundamental framework for mutual-acoustic impedance for its applicability to radiators, especially flexural disks, of differing size. The Bouwkamp integral method is used to achieve infinite series expressions for self- and mutual-acoustic radiation impedances. Polynomial-fitting-based approximate relations of the mutual-acoustic impedance are developed for arbitrary array geometries and are in good agreement with exact expressions. The derived mutual-acoustic impedance is incorporated into equivalent circuit models of multi-frequency CMUTs showing excellent agreement with finite element modeling. The results demonstrate that mutual-acoustic interactions significantly impact device performance. The framework presented here may prove valuable for future design of multi-frequency arrays for novel multiscale imaging, superharmonic contrast imaging, and image therapy applications.