A combined gas-phase dissociative ionization, dissociative electron attachment and deposition study on the potential FEBID precursor [Au(CH3)2Cl]2.

Motivated by the potential of focused-electron-beam-induced deposition (FEBID) in the fabrication of functional gold nanostructures for application in plasmonic and detector technology, we conducted a comprehensive study on [Au(CH3)2Cl]2 as a potential precursor for such depositions. Fundamental electron-induced dissociation processes were studied under single collision conditions, and the composition and morphology of FEBID deposits fabricated in an ultrahigh-vacuum (UHV) chamber were explored on different surfaces and at varied beam currents. In the gas phase, dissociative ionization was found to lead to significant carbon loss from this precursor, and about 50% of the chlorine was on average removed per dissociative ionization incident. On the other hand, in dissociative electron attachment, no chlorine was removed from the parent molecule. Contrary to these observations, FEBID in the UHV setup was found to yield a quantitative loss and desorption of the chlorine from the deposits, an effect that we attribute to electron-induced secondary and tertiary reactions in the deposition process. We find this precursor to be stable at ambient conditions and to have sufficient vapor pressure to be suitable for use in HV instruments. More importantly, in the UHV setup, FEBID with [Au(CH3)2Cl]2 yielded deposits with high gold content, ranging from 45 to 61 atom % depending on the beam current and on the cleanliness of the substrates surface.

Structure and Conformation of Individual Molecules upon Adsorption of a Mixture of Benzoporphyrins on Ag(111), Cu(111), and Cu(110) Surfaces.

The front cover artwork is provided by the groups of Prof. Dr. Hans-Peter Steinrück and Prof. Dr. Norbert Jux at the Friedrich-Alexander-Universität (FAU) Erlangen-Nürnberg. The image shows a mixture of six 2H-tetrakis-(3, 5-di-tert-butyl-phenyl)(x)benzoporphyrins (2H-diTTBP(x)BPs, x = 0, 1, 2-cis, 2-trans, 3, or 4) molecules forming a porous square structure on Ag(111) as observed in scanning tunneling microscopy (STM) at room temperature. Read the full text of the Research Article at 10.1002/cphc.202300355.

Structure and Conformation of Individual Molecules upon Adsorption of a Mixture of Benzoporphyrins on Ag(111), Cu(111), and Cu(110) Surfaces.

We investigated the adsorption behavior of a mixture of six 2H-tetrakis-(3, 5-di-tert-butylphenyl)(x)benzoporphyrins (2H-diTTBP(x)BPs, x=0, 1, 2-cis, 2-trans, 3, and 4) on Ag(111), Cu(111) and Cu(110) at room temperature by scanning tunneling microscopy (STM) under ultra-high vacuum conditions. On Ag(111), we observe an ordered two-dimensional square phase, which is stable up to 400 K. On Cu(111), the same square phase coexists with a stripe phase, which disappears at 400 K. In contrast, on Cu(110), 2H-diTTBP(x)BPs adsorb as immobile isolated molecules or dispersed short chains along the [1 1 ‾ ${\bar{1}}$ 0] substrate direction, which remain intact up to 450 K. The stabilization of the 2D supramolecular structures on Ag(111) and Cu(111), and of the 1D short chains on Cu(110) is attributed to van der Waals interactions between the tert-butyl and phenyl groups of neighboring molecules. From high-resolution STM, we can assign all six 2H-diTTBP(x)BPs within the ordered structures. Moreover, we deduce a crown shape quadratic conformation on Ag(111) and Cu(111), an additional saddle-shape on Cu(111), and an inverted structure and a quadratic appearance on Cu(110). The different conformations are attributed to the different degree of interaction of the iminic nitrogen atoms of the isoindole and pyrrole groups with the substrate atoms.

On the Electron-Induced Reactions of (CH3)AuP(CH3)3: A Combined UHV Surface Science and Gas-Phase Study.

Focused-electron-beam-induced deposition (FEBID) is a powerful nanopatterning technique where electrons trigger the local dissociation of precursor molecules, leaving a deposit of non-volatile dissociation products. The fabrication of high-purity gold deposits via FEBID has significant potential to expand the scope of this method. For this, gold precursors that are stable under ambient conditions but fragment selectively under electron exposure are essential. Here, we investigated the potential gold precursor (CH3)AuP(CH3)3 using FEBID under ultra-high vacuum (UHV) and spectroscopic characterization of the corresponding metal-containing deposits. For a detailed insight into electron-induced fragmentation, the deposit's composition was compared with the fragmentation pathways of this compound through dissociative ionization (DI) under single-collision conditions using quantum chemical calculations to aid the interpretation of these data. Further comparison was made with a previous high-vacuum (HV) FEBID study of this precursor. The average loss of about 2 carbon and 0.8 phosphor per incident was found in DI, which agreed well with the carbon content of the UHV FEBID deposits. However, the UHV deposits were found to be as good as free of phosphor, indicating that the trimethyl phosphate is a good leaving group. Differently, the HV FEBID experiments showed significant phosphor content in the deposits.

Exploring the fabrication and transfer mechanism of metallic nanostructures on carbon nanomembranes via focused electron beam induced processing.

Focused electron beam-induced processing is a versatile method for the fabrication of metallic nanostructures with arbitrary shape, in particular, on top of two-dimensional (2D) organic materials, such as self-assembled monolayers (SAMs). Two methods, namely electron beam-induced deposition (EBID) and electron beam-induced surface activation (EBISA) are studied with the precursors Fe(CO)5 and Co(CO)3NO on SAMs of 1,1',4',1''-terphenyl-4-thiol (TPT). For Co(CO)3NO only EBID leads to deposits consisting of cobalt oxide. In the case of Fe(CO)5 EBID and EBISA yield deposits consisting of iron nanocrystals with high purity. Remarkably, the EBISA process exhibits a strong time dependence, which is analyzed in detail for different electron doses. This time dependence is a new phenomenon, which, to the best of our knowledge, was not reported before. The electron-induced cross-linking of the SAM caused by the cleavage of C-H bonds and the subsequent formation of new C-C bonds between neighboring molecules also seems to play a crucial role in the EBISA process. Previous studies showed that iron nanostructures fabricated on top of a cross-linked SAM on Au/mica can be transferred to solid substrates and grids without any changes, aside from oxidation. Here we demonstrate that iron as well as cobalt oxide structures on top of a cross-linked SAM on Ag/mica do change more significantly. The Fe(NO3)3 solution used for etching of the Ag layer also dissolves the cobalt oxide structures and causes dissolution and reduction of the iron structures. These results demonstrate that the fabrication of hybrids of metallic nanostructures onto organic 2D materials is an intrinsically complex procedure. The interactions among the metallic deposits, the substrate for the growth of the SAM, and the associated etching/dissolving agent need to be considered and further studied.

Metalation of 2HTCNPP on Ag(111) with Zn: Evidence for the Sitting atop Complex at Room Temperature.

We study the interaction and metalation reaction of a free base 5,10,15,20-terakis(4-cyanophenyl)porphyrin (2HTCNPP) with post-deposited Zn atoms and the targeted reaction product Zn-5,10,15,20-terakis(4-cyanophenyl)porphyrin (ZnTCNPP) on a Ag(111) surface. The investigations are performed with scanning tunneling microscopy at room temperature after Zn deposition and subsequent heating. The goal is to obtain further insights in the metalation reaction and the influence of the cyanogroups on this reaction. The interaction of 2HTCNPP with post-deposited Zn leads to the formation of three different 2D ordered island types that coexist on the surface. All contain a new species with a bright appearance, which increases with the amount of post-deposited Zn. We attribute this to metastable SAT ("sitting atop") complexes formed by Zn and the macrocycle, that is, an intermediate in the metalation reaction to ZnTCNPP, which occurs upon heating to 500 K. Interestingly, the activation barrier for the successive reaction of the SAT complex to the metalated ZnTCNPP species can also be overcome by a voltage pulse applied to the STM tip.

Controlled Electron-Induced Fabrication of Metallic Nanostructures on 1 nm Thick Membranes.

Functional hybrids comprising metallic nanostructures connected and protected by nonmetallic 2D materials are envisioned as miniaturized components for applications in optics, electronics, and magnetics. A promising strategy to build such elements is the direct writing of metallic nanostructures by focused electron beam induced processing (FEBIP) onto insulating 2D materials. Carbon nanomembranes (CNMs), produced via electron-induced crosslinking of self-assembled monolayers (SAMs), are ultrathin and flexible films; their thickness as well as their mechanical and electrical properties are determined by the specific choice of self-assembling molecules. In this work, functionalized CNMs are produced via electron beam induced deposition of Fe(CO)5 onto terphenylthiol SAMs. Clean iron nanostructures of arbitrary size and shape are deposited on the SAMs, and the SAMs are then crosslinked into CNMs. The functionalized CNMs are then transferred onto either solid substrates or onto grids to obtain freestanding metal/CNM hybrid structures. Iron nanostructures with predefined shapes on top of 1 nm thin freestanding CNMs are realized; they stay intact during the fabrication procedures and remain mechanically stable. Combining the ease and versatility of SAMs with the flexibility of FEBIP thus leads to a route for the fabrication of functional hybrid nanostructures.

Formation of Highly Ordered Molecular Porous 2D Networks from Cyano-Functionalized Porphyrins on Cu(111).

We investigated the adsorption of three related cyano-functionalized tetraphenyl porphyrin derivatives on Cu(111) by scanning tunneling microscopy (STM) in ultra-high vacuum (UHV) with the goal to identify the role of the cyano group and the central Cu atom for the intermolecular and supramolecular arrangement. The porphyrin derivatives studied were Cu-TCNPP, Cu-cisDCNPP, and 2H-cisDCNPP, that is, Cu-5,10,15,20-tetrakis-(p-cyano)-phenylporphyrin, Cu-meso-cis-di(p-cyano)-phenylporphyrin and 2H-meso-cis-di(p-cyano)-phenylporphyrin, respectively. Starting from different structures obtained after deposition at room temperature, all three molecules form the same long-range ordered hexagonal honeycomb-type structure with triangular pores and three molecules per unit cell. For the metal-free 2H-cisDCNPP, this occurs only after self-metalation upon heating. The structure-forming elements are pores with a distance of 3.1 nm, formed by triangles of porphyrins fused together by cyano-Cu-cyano interactions with Cu adatoms. This finding leads us to suggest that two cyano-phenyl groups in the "cis" position is the minimum prerequisite to form a highly ordered 2D porous molecular pattern. The experimental findings are supported by detailed density functional theory calculations to analyze the driving forces that lead to the formation of the porous hexagonal honeycomb-type structure.

Conformation Controls Mobility: 2H-Tetranaphthylporphyrins on Cu(111).

The adsorption behavior and the mobility of 2H-Tetranaphthylporphyrin (2HTNP) on Cu(111) was investigated by scanning tunneling microscopy (STM) at room temperature (RT). The molecules adsorb, like the structurally related 2HTPP, in the "inverted" structure with the naphthyl plane restricted to an orientation parallel to the Cu surface. The orientation of the four naphthyl groups yields altogether 16 possible conformations. Due to the existence of rotamer pairs, 10 different appearances are expected on the surface, and all of them are identified by STM at RT. Most interestingly, the orientation of the naphthyl groups significantly influences the diffusion behavior of the molecules on Cu(111). We identify three different groups of conformers, which are either immobile, medium or fast diffusing at RT. The mobility seems to decrease with increasing size of the footprint of the conformers on the surface.

Metalation and coordination reactions of 2H-meso-trans-di(p-cyanophenyl)porphyrin on Ag(111) with coadsorbed cobalt atoms.

We investigated the metalation and coordination reactions of Co with 2H-5,15-bis(para-cyanophenyl)-10,20-bisphenylporphyrin (2HtransDCNPP) on a Ag(111) surface by scanning tunneling microscopy. At room temperature (RT), 2HtransDCNPPs self-assemble into a supramolecular structure stabilized by intermolecular hydrogen bonding. The metalation of 2HtransDCNPP is achieved either by depositing Co atoms onto the supramolecular structure at RT, or, alternatively, by depositing the molecules onto a submonolayer Co-precovered Ag(111) surface with a subsequent heating to 500 K. In addition, the molecules coordinate to Co atoms through the N atoms in the peripheral cyano groups with a preference of isolated 4-fold coordination motifs at RT.

Controlling the Self-Metalation Rate of Tetraphenylporphyrins on Cu(111) via Cyano Functionalization.

The reaction rate of the self-metalation of free-base tetraphenylporphyrins (TPPs) on Cu(111) increases with the number of cyano groups (n=0, 1, 2, 4) attached at the para positions of the phenyl rings. The findings are based on isothermal scanning tunneling microscopy (STM) measurements. At room temperature, all investigated free-base TPP derivatives adsorb as individual molecules and are aligned with respect to densely packed Cu substrate rows. Annealing at 400 K leads to the formation of linear dimers and/or multimers via CN-Cu-CN bonds, accompanied by self-metalation of the free-base porphyrins following a first-order rate equation. When comparing the non-cyano-functionalized and the tetracyano-functionalized molecules, we find a decrease of the reaction rate by a factor of more than 20, corresponding to an increase of the activation energy from 1.48 to 1.59 eV. Density functional theory (DFT) calculations give insights into the influence of the peripheral electron-withdrawing cyano groups and explain the experimentally observed effects.

Surface-Anchored Metal-Organic Frameworks as Versatile Resists for Gas-Assisted E-Beam Lithography: Fabrication of Sub-10 Nanometer Structures.

We demonstrate that surface-anchored metal-organic frameworks (SURMOFs) are extraordinary well-suited as resists for high-resolution focused electron beam induced processing (FEBIP) techniques. The combination of such powerful lithographic protocols with the huge versatility of MOF materials are investigated in respect to their potential in nanostructures fabrication. The applied FEBIP methods rely on the local decomposition of Fe(CO)5 and Co(CO)3NO as precursors, either by the direct impact of the focused electron beam (electron beam induced deposition, EBID) or through the interaction of the precursor molecules with preirradiated/activated SURMOF areas (electron beam induced surface activation, EBISA). We demonstrate the huge potential of the approach for two different types of MOFs (HKUST-1 and Zn-DPDCPP). Our "surface science" approach to FEBIP, yields well-defined deposits with each investigated precursor/SURMOF combination. Local Auger electron spectroscopy reveals clean iron deposits from Fe(CO)5; deposits from Co(CO)3NO contain cobalt, nitrogen, and oxygen. EBISA experiments were successful with Fe(CO)5. Remarkably EBISA with Co(CO)3NO does not result in deposit formation on both resists, making the process chemically selective. Most importantly we demonstrate the fabrication of "nested-L" test structures with Fe(CO)5 on HKUST-1 with extremely narrow line widths of partially less than 8 nm, due to reduced electron proximity effects within the MOF-based resists. Considering that the actual diameter of the electron beam was larger than 6 nm, we see a huge potential for significant reduction of the structure sizes. In addition, the role and high potential of loading and transport of the precursor molecules within the porous SURMOF materials is discussed.

Localized growth of carbon nanotubes via lithographic fabrication of metallic deposits.

We report on the fabrication of carbon nanotubes (CNTs) at predefined positions and controlled morphology, for example, as individual nanotubes or as CNT forests. Electron beam induced deposition (EBID) with subsequent autocatalytic growth (AG) was applied to lithographically produce catalytically active seeds for the localized growth of CNTs via chemical vapor deposition (CVD). With the precursor Fe(CO)5 we were able to fabricate clean iron deposits via EBID and AG. After the proof-of-principle that these Fe deposits indeed act as seeds for the growth of CNTs, the influence of significant EBID/AG parameters on the deposit shape and finally the yield and morphology of the grown CNTs was investigated in detail. Based on these results, the parameters could be optimized such that EBID point matrixes (6 × 6) were fabricated on a silica surface whereby at each predefined site only one CNT was produced. Furthermore, the localized fabrication of CNT forests was targeted and successfully achieved on an Al2O3 layer on a silicon sample. A peculiar lift-up of the Fe seed structures as "flakes" was observed and the mechanism was discussed. Finally, a proof-of-principle was presented showing that EBID deposits from the precursor Co(CO)3NO are also very effective catalysts for the CNT growth. Even though the metal content (Co) of the latter is reduced in comparison to the Fe deposits, effective CNT growth was observed for the Co-containing deposits at lower CVD temperatures than for the corresponding Fe deposits.

"Inverted" porphyrins: a distorted adsorption geometry of free-base porphyrins on Cu(111).

Based on density functional theory calculations combined with experimental results, we report and discuss an extremely distorted, "inverted" adsorption geometry of free-base tetraphenylporphyrin on Cu(111). The current findings yield new insights into a well-studied system, shedding light on the peculiar molecule-substrate interaction and the resulting intramolecular conformation.

On the critical role of the substrate: the adsorption behaviour of tetrabenzoporphyrins on different metal surfaces.

The adsorption behaviour of 2H-5,10,15,20-tetraphenyltetrabenzoporphyrin (2HTPTBP) on different metal surfaces, i.e., Ag(111), Cu(111), Cu(110), and Cu(110)-(2 × 1)O was investigated by scanning tunnelling microscopy at room temperature. The adsorption of 2HTPTBP on Ag(111) leads to the formation of a well-ordered two-dimensional (2D) island structure due to the mutual stabilization through the intermolecular π-π stacking and T-type-like interactions of phenyl and benzene substituents of neighboring molecules. For 2HTPTBP on Cu(111), the formed 2D supramolecular structures exhibit a coverage-dependent behaviour, which can be understood from the interplay of molecule-substrate and molecule-molecule interactions. In contrast, on Cu(110) the 2HTPTBP molecules form dispersed one-dimensional (1D) molecular chains along the [11[combining macron]0] direction of the substrate due to relatively strong attractive molecule-substrate interactions. Furthermore, we demonstrate that the reconstruction of the Cu(110) surface by oxygen atoms yields a change in dimensionality of the resulting nanostructures from 1D on Cu(110) to 2D on (2 × 1) oxygen-reconstructed Cu(110), induced by a decreased molecule-substrate interaction combined with attractive molecule-molecule interactions. This comprehensive study on these prototypical systems enables us to deepen the understanding of the particular role of the substrate concerning the adsorption behavior of organic molecules on metal surfaces and thus to tweak the ordering in functional molecular architectures.

Focused electron beam based direct-write fabrication of graphene and amorphous carbon from oxo-functionalized graphene on silicon dioxide.

Controlled patterning of graphene is an important task towards device fabrication and thus is the focus of current research activities. Graphene oxide (GO) is a solution-processible precursor of graphene. It can be patterned by thermal processing. However, thermal processing of GO leads to decomposition and CO2 formation. Alternatively, focused electron beam induced processing (FEBIP) techniques can be used to pattern graphene with high spatial resolution. Based on this approach, we explore FEBIP of GO deposited on SiO2. Using oxo-functionalized graphene (oxo-G) with an in-plane lattice defect density of 1% we are able to image the electron beam-induced effects by scanning Raman microscopy for the first time. Depending on electron energy (2-30 keV) and doses (50-800 mC m-2) either reduction of GO or formation of permanent lattice defects occurs. This result reflects a step towards controlled FEBIP processing of oxo-G.

2H-Tetrakis(3,5-di-tert-butyl)phenylporphyrin on a Cu(110) Surface: Room-Temperature Self-Metalation and Surface-Reconstruction-Facilitated Self-Assembly.

The adsorption behavior of 2H-tetrakis(3,5-di-tert-butyl)phenylporphyrin (2HTTBPP) on Cu(110) and Cu(110)-(2×1)O surfaces have been investigated by using variable-temperature scanning tunneling microscopy (STM) under ultrahigh vacuum conditions. On the bare Cu(110) surface, individual 2HTTBPP molecules are observed. These molecules are immobilized on the surface with a particular orientation with respect to the crystallographic directions of the Cu(110) surface and do not form supramolecular aggregates up to full monolayer coverage. In contrast, a chiral supramolecular structure is formed on the Cu(110)-(2×1)O surface, which is stabilized by van der Waals interactions between the tert-butyl groups of neighboring molecules. These findings are explained by weakened molecule-substrate interactions on the Cu(110)-(2×1)O surface relative to the bare Cu(110) surface. By comparison with the corresponding results of Cu-tetrakis(3,5-di-tert-butyl)phenylporphyrin (CuTTBPP) on Cu(110) and Cu(110)-(2×1)O surfaces, we find that the 2HTTBPP molecules can self-metalate on both surfaces with copper atoms from the substrate at room temperature (RT). The possible origins of the self-metalation reaction at RT are discussed. Finally, peculiar irreversible temperature-dependent switching of the intramolecular conformations of the investigated molecules on the Cu(110) surface was observed and interpreted.

Surface-Mediated in Situ Metalation of Porphyrins at the Solid-Vacuum Interface.

The investigation of porphyrin derivatives at the solid-vacuum interface has become a vivid research field with the prospect to tailor functional molecular architectures and as prototype examples to study the fundamental properties of porphyrin derivatives in regard to their vital role in many natural processes. The functional properties of the porphyrin derivatives are mainly determined by the central metal atom. Thus, the recent exploration of the surface-confined in situ metalation of porphyrins is an important step toward the realization of molecule-based functional devices. The corresponding metalation reaction of free base porphyrin derivatives can be conveniently realized in situ in ultrahigh vacuum by post- or predeposition of metal atoms or directly with substrate atoms in the so-called self-metalation. Moderate heating above room temperature (RT) might be necessary either to realize the transport of the metal to the porphyrin via diffusion or to overcome an activation barrier determined by the redox reaction itself. Surface science techniques like scanning tunneling microscopy (STM), X-ray photoelectron spectroscopy (XPS), and temperature-programmed desorption (TPD) are powerful tools to scrutinize the reaction and give valuable insights into the metalation process. For example, the completed metalation can be reflected in an enhanced apparent height of the corresponding porphyrin in STM or can be evidenced by characteristic changes in the N 1s region in XPS. These signatures allow monitoring of the progress of the metalation, and it was found that the reaction generally proceeds with very high yield. Surface diffusion of the coadsorbed metal atoms mediates the reaction and is crucial for the high yields of the corresponding reactions with pre- and postadsorbed metals. It was also demonstrated that the completed metalation can indeed significantly alter the adsorption behavior and the electronic properties and thus the functionality of the porphyrin molecules. These alterations can be used to monitor the kinetics of a particular porphyrin self-metalation reaction by STM and to estimate the activation barrier for that reaction based on isothermal measurements at different temperatures. Also TPD measurements of the H2 and D2 signals allow for the determination of corresponding activation energies for the metalation of free base porphyrins and their deuterized analogues. Gas phase DFT calculations of the metalation of the "bare" free base porphyrin macrocycle identify intermediate reaction steps with the transfer of the first hydrogen atom to the metal center being the main barrier to overcome. The values from these calculations are in fair agreement with experimentally determined ones. However, TPD based results indicate that exchanges of deuterium and hydrogen between the central nitrogen and the surface occur, which indicate an active role of the surface and challenge the findings from gas phase DFT. The in situ metalation of porphyrins at the solid-vacuum interface is established as a novel and convenient route to tailor functional molecular architectures. With different surface science techniques detailed insights into the surface-mediated metalation reaction were achieved for this class of prototype functional molecules.

Region-Selective Deposition of Core-Shell Nanoparticles for 3D Hierarchical Assemblies by the Huisgen 1,3-Dipolar Cycloaddition.

A method for the region-selective deposition of nanoparticles (NPs) by the Huisgen 1,3-dipolar cycloaddition is presented. The approach enables defined stacking of various oxide NPs in any order with control over layer thickness. Thereby the reaction is performed between a substrate, functionalized with a self-assembled monolayer of an azide-bearing phosphonic acid (PA) and aluminum oxide (AlO(x)) NPs functionalized with an alkyne bearing PA. The layer of alkyne functionalized AlO(x) NPs is then used as substrate for the deposition of azide-functionalized indium tin oxide (ITO) NPs to provide a binary stack. This progression is then conducted with alkyne-functionalized CeO2 NPs, yielding a ternary stack of NPs with three different NP cores. The stacks are characterized by AFM and SEM, defining the region-selectivity of the deposition technique. Finally, these assemblies have been tested in devices as a dielectric to form a capacitor resulting in a dramatic increase in the measured capacitance.