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Phys Rev D Part Fields
; 53(3): R1013-R1017, 1996 Feb 01.
Article
in English
| MEDLINE
| ID: mdl-10020167
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Phys Rev D Part Fields
; 52(5): 2661-2672, 1995 Sep 01.
Article
in English
| MEDLINE
| ID: mdl-10019483
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Phys Rev D Part Fields
; 51(5): 2053-2060, 1995 Mar 01.
Article
in English
| MEDLINE
| ID: mdl-10018676
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Phys Rev D Part Fields
; 47(9): R3671-R3675, 1993 May 01.
Article
in English
| MEDLINE
| ID: mdl-10016050
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Phys Rev D Part Fields
; 45(11): 3965-3975, 1992 Jun 01.
Article
in English
| MEDLINE
| ID: mdl-10014304
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Phys Rev B Condens Matter
; 43(6): 4565-4572, 1991 Feb 15.
Article
in English
| MEDLINE
| ID: mdl-9997823
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Phys Rev B Condens Matter
; 40(8): 5417-5427, 1989 Sep 15.
Article
in English
| MEDLINE
| ID: mdl-9992572
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Appl Opt
; 26(9): 1647-53, 1987 May 01.
Article
in English
| MEDLINE
| ID: mdl-20454383
ABSTRACT
An ultrahigh accuracy 3-D profilometer using a laser heterodyne interferometer has been developed. The profiles of aspheric lenses and their molds have been measured. It can measure not only the rectangular coordinates but also the polar coordinates of the surface profile. The measuring accuracy of each of the three axes is 0.01-0.05 microm if the inclination of the investigated surface is less than +/-25 degrees . The accuracy of the polar coordinate measurement is also better than 0.05 microm when the inclination of the aspheric surface is less than +/-55 degrees . The dynamic range of the X-Y-Z measurement is 40 x 40 x 20 (mm).