Using electrical resistance asymmetries to infer the geometric shapes of foundry patterned nanophotonic structures.

While silicon photonics has leveraged the nanofabrication tools and techniques from the microelectronics industry, it has also inherited the metrological methods from the same. Photonics fabrication is inherently different from microelectronics in its intrinsic sensitivity to 3D shape and geometry, especially in a high-index contrast platform like silicon-on-insulator. In this work, we show that electrical resistance measurements can in principle be used to infer the geometry of such nanophotonic structures and reconstruct the micro-loading curves of foundry etch processes. We implement our ideas to infer 3D geometries from a standard silicon photonics foundry and discuss some of the potential sources of error that need to be calibrated out. By using electrical measurements, pre-designed structures can be rapidly tested at wafer-scale, without the added complexity of optical alignment and spectral measurement and analysis, providing both a route towards predictive optical device performance and a means to control the geometry variation.

Extraordinary evanescent field confinement waveguide sensor for mid-infrared trace gas spectroscopy.

Nanophotonic waveguides are at the core of a great variety of optical sensors. These structures confine light along defined paths on photonic chips and provide light-matter interaction via an evanescent field. However, waveguides still lag behind free-space optics for sensitivity-critical applications such as trace gas detection. Short optical pathlengths, low interaction strengths, and spurious etalon fringes in spectral transmission are among the main reasons why on-chip gas sensing is still in its infancy. In this work, we report on a mid-infrared integrated waveguide sensor that successfully addresses these drawbacks. This sensor operates with a 107% evanescent field confinement factor in air, which not only matches but also outperforms free-space beams in terms of the per-length optical interaction. Furthermore, negligible facet reflections result in a flat spectral background and record-low absorbance noise that can finally compete with free-space spectroscopy. The sensor performance was validated at 2.566 µm, which showed a 7 ppm detection limit for acetylene with only a 2 cm long waveguide.

Ge on Si waveguide mid-infrared absorption spectroscopy of proteins and their aggregates.

Specific proteins and their aggregates form toxic amyloid plaques and neurofibrillary tangles in the brains of people suffering from neurodegenerative diseases such as Alzheimer's and Parkinson's. It is important to study these conformational changes to identify and differentiate these diseases at an early stage so that timely medication is provided to patients. Mid-infrared spectroscopy can be used to monitor these changes by studying the line-shapes and the relative absorbances of amide bands present in proteins. This work focusses on the spectroscopy of the protein, Bovine Serum Albumin as an exemplar, and its aggregates using germanium on silicon waveguides in the 1900-1000 cm-1 (5.3-10.0 µm) spectral region.

Perspective on Thin Film Waveguides for on-Chip Mid-Infrared Spectroscopy of Liquid Biochemical Analytes.

Miniaturized spectrometers offering low cost, low reagent consumption, high throughput, sensitivity and automation are the future of sensing and have significant applications in environmental monitoring, food safety, biotechnology, pharmaceuticals, and healthcare. Midinfrared (MIR) spectroscopy employing complementary metal oxide semiconductor (CMOS) compatible thin film waveguides and microfluidics shows great promise toward highly integrated and robust detection tools and liquid handling. This perspective provides an overview of the emergence of thin film optical waveguides used for evanescent field sensing of liquid chemical and biological samples for MIR absorption spectroscopy. The state of the art of new material and waveguide systems used for spectroscopic measurements in the MIR is presented. An outlook on the advantages and future of waveguide-based MIR spectroscopy for application in clinical settings for point-of-care biochemical analysis is discussed.

Laser-Driven Phase Segregation and Tailoring of Compositionally Graded Microstructures in Si-Ge Nanoscale Thin Films.

The ability to manipulate the composition of semiconductor alloys on demand and at nanometer-scale resolutions is a powerful tool that could be exploited to tune key properties such as the electronic band gap, mobility, and refractive index. However, existing methods to modify the composition involve altering the stoichiometry by temporal or spatial modulation of the process parameters during material growth, limiting the scalability and flexibility for device fabrication. Here, we report a laser processing method for localized tailoring of the composition in amorphous silicon-germanium (a-SiGe) nanoscale thin films on silicon substrates, postdeposition, by controlling phase segregation through the scan speed of the laser-induced molten zone. Laser-driven phase segregation at speeds adjustable from 0.1 to 100 mm s-1 allows access to previously unexplored solidification dynamics. The steady-state spatial distribution of the alloy constituents can be tuned directly by setting the laser scan speed constant to achieve indefinitely long Si1-xGex microstructures, exhibiting the full range of compositions (0 < x < 1). To illustrate the potential, we demonstrate a photodetection application by exploiting the laser-written polycrystalline SiGe microstripes, showing tunability of the optical absorption edge over a wavelength range of 200 nm. Our method can be applied to pseudobinary alloys of ternary semiconductors, metals, ceramics, and organic crystals, which have phase diagrams similar to those of SiGe alloys. This study opens a route for direct laser writing of novel devices made of alloy microstructures with tunable composition profiles, including graded-index waveguides and metasurfaces, multispectral photodetectors, full-spectrum solar cells, and lateral heterostructures.

Waveguide Absorption Spectroscopy of Bovine Serum Albumin in the Mid-Infrared Fingerprint Region.

Protein sensing in biological fluids provides important information to diagnose many clinically relevant diseases. Mid-infrared (MIR) absorption spectroscopy of bovine serum albumin (BSA) is experimentally demonstrated on a germanium on silicon (GOS) waveguide in the 1900-1000 cm-1 (5.3-10.0 µm) region of the MIR. GOS waveguides were shown to guide light up to a wavelength of 12.9 µm. The waveguide absorption spectrum of water, showing molecular bending vibrations, was obtained experimentally and compared with a theoretical model showing good agreement. Measurement of a concentration series of BSA protein in phosphate buffered saline (PBS) from 0.1 mg/mL to 100 mg/mL was performed on the waveguide using filter paper as a flow strip, and the amide I, II, and III peaks were observed and quantified.

HWCVD a-Si:H interlayer slope waveguide coupler for multilayer silicon photonics platform.

We present interlayer slope waveguides, designed to guide light from one level to another in a multi-layer silicon photonics platform. The waveguide is fabricated from hydrogenated amorphous silicon (a-Si:H) film, deposited using hot-wire chemical vapor deposition (HWCVD) at a temperature of 230°C. The interlayer slope waveguide is comprises of a lower level input waveguide and an upper level output waveguide, connected by a waveguide on a slope, with vertical separation to isolate other crossing waveguides. Measured loss of 0.17 dB/slope was obtained for waveguide dimensions of 600 nm waveguide width (w) and 400 nm core thickness (h) at a wavelength of 1550 nm and for transverse electric (TE) mode polarization.

Chalcogenide glass waveguides with paper-based fluidics for mid-infrared absorption spectroscopy.

We demonstrate the integration of paper fluidics with mid-infrared (MIR) chalcogenide waveguides to introduce liquid samples to the waveguide evanescent field for analysis. Spectroscopy of model analytes (water and isopropyl alcohol) having well-defined mid-IR absorptions, on a ZnSe rib waveguide fabricated on silicon, is demonstrated in the wavelength range of 2.6-3.7 µm, showing their O-H and C-H stretching absorptions. The results are compared with a theoretical waveguide model, achieving good agreement. It is concluded that the presence of paper in the evanescent field does not interfere with the waveguide measurements, opening up opportunities to combine low-cost paper-based fluidics and integrated photonic technologies.

Germanium-on-silicon waveguides operating at mid-infrared wavelengths up to 8.5 µm.

We report transmission measurements of germanium on silicon waveguides in the 7.5-8.5 µm wavelength range, with a minimum propagation loss of 2.5 dB/cm at 7.575 µm. However, we find an unexpected strongly increasing loss at higher wavelengths, potential causes of which we discuss in detail. We also demonstrate the first germanium on silicon multimode interferometers operating in this range, as well as grating couplers optimized for measurement using a long wavelength infrared camera. Finally, we use an implementation of the "cut-back" method for loss measurements that allows simultaneous transmission measurement through multiple waveguides of different lengths, and we use dicing in the ductile regime for fast and reproducible high quality optical waveguide end-facet preparation.

Fabrication and characterization of high-contrast mid-infrared GeTe4 channel waveguides.

We report the fabrication and characterization of high index contrast (Δn≈0.9) GeTe4 channel waveguides on ZnSe substrate for evanescent-field-based biosensing applications in the mid-IR spectral region. GeTe4 films were deposited by RF sputtering and characterized for their structure, composition, transparency, and dispersion. The lift-off technique was used to pattern the waveguide channels. Waveguiding from 2.5-3.7 and 6.4-7.5 µm was demonstrated, and mode intensity profile and estimated propagation losses are given for the 3.5 µm wavelength.