ABSTRACT
Ultrasonic motors (USMs) are expected to be used in special environments: high magnetic field environments and space environments, which require lightweight and multiple degrees of freedom. However, when used as linear ultrasonic motors (LUSMs), a linear guide and a preload mechanism are required, complicating the structure. In the present paper, a hollow cylindrical linear stator without an extra linear guide has been considered. The stator consists of a metal pipe and two piezoelectric (PZT) tubes installed at both ends of the metal pipe. Their connected parts are tapered for the first longitudinal axisymmetric vibration mode of the cylinder, namely L(0,1) mode excitation, and the metal pipe is subjected to radial strain. The vibration of the stator is assumed to be one-dimensional and is modeled by an electromechanical equivalent circuit. The principle that the traveling wave is formed on the metal pipe by dual-PZT-tube phase difference excitation was clarified. Finite element analysis and some measurements were conducted to confirm that the theory was consistent. The analyses and measurements were in good agreement. Therefore, the operating principle was confirmed. The results of the transport experiment showed that the average speed of the 8.5-g slider was 7.9 mm/s.
