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Light Sci Appl
; 13(1): 45, 2024 Feb 05.
Article
in English
| MEDLINE
| ID: mdl-38316775
ABSTRACT
An additional deposition step was added to a multi-step electron beam lithographic fabrication process to unlock the height dimension as an accessible parameter for resonators comprising unit cells of quasi-bound states in the continuum metasurfaces, which is essential for the geometric design of intrinsically chiral structures.