ABSTRACT
We investigated X-ray energy distribution in an X-ray microbeam produced by a polycapillary X-ray lens in combination with a sealed-type X-ray tube. This polycapillary X-ray lens has an output focal distance (OFD) of approximately 15 mm. The size of the X-ray microbeam and its OFD were estimated by using a wire scanning method. In our case, the sizes of the X-ray microbeams at the output focal distance were 49 microm for Mo L(alpha), 36 microm for W L(alpha), and 28 microm for Mo K(alpha). The spot sizes depend on the energy of the X-ray fluorescence. The reason for the energy dependence is that X-ray capillary optics is based on the principle of propagation through glass capillaries by means of X-ray total external reflection. The evaluated OFD values of Mo L(alpha) and Mo K(alpha) were slightly changed in 17 microm. However, a deviation of 100 microm from the OFD caused only a 3% increase of the focal spot size. Therefore, we concluded that the OFD showed no significant dependence on X-ray energy.
