ABSTRACT
This paper presents the design, construction, and characterization of a new optical-fiber-based, low-finesse Fabry-Perot interferometer with a simple cavity formed by two reflecting surfaces (the end of a cleaved optical fiber and a plane, reflecting counter-surface), for the continuous measurement of displacements of several nanometers to several tens of millimeters. No beam collimation or focusing optics are required, resulting in a displacement sensor that is extremely compact (optical fiber diameter 125 µm), is surprisingly tolerant of misalignment (more than 5°), and can be used over a very wide range of temperatures and environmental conditions, including ultra-high-vacuum. The displacement measurement is derived from interferometric phase measurements using an infrared laser source whose wavelength is modulated sinusoidally at a frequency f. The phase signal is in turn derived from changes in the amplitudes of demodulated signals, at both the modulation frequency, f, and its harmonic at 2f, coming from a photodetector that is monitoring light intensity reflected back from the cavity as the cavity length changes. Simple quadrature detection results in phase errors corresponding to displacement errors of up to 25 nm, but by using compensation algorithms discussed in this paper, these inherent non-linearities can be reduced to below 3 nm. In addition, wavelength sweep capability enables measurement of the absolute surface separation. This experimental design creates a unique set of displacement measuring capabilities not previously combined in a single interferometer.
ABSTRACT
The design, construction, and performance of a surface-referenced nanoindentation instrument, termed a precision nanoindentation platform (PNP), are presented. The PNP is a symmetrically designed instrument with a centrally located indenter tip attached to a force cell for measuring the forces between the tip and a specimen. Penetration of the indenter tip into the specimen surface is measured using two proximity sensors placed symmetrically about the indenter. Each proximity sensor is attached to a piezoelectric actuator that is servo controlled to maintain the sensor and the reference frame to which it is attached at a constant height relative to the specimen surface. As the indenter tip penetrates the specimen surface, the movement of the tip relative to the two surface reference frames is measured using capacitance gauges and the average of these displacements is used as a measure of penetration depth. The current indenter is capable of applying indentation forces of up to 150 mN with a noise floor below 2 µN rms for a sampling rate of 1 kHz, and measuring displacement with 0.4 nm rms noise for the same sampling rate. The proximity sensors are capable of maintaining surface height variations of less than 1.0 nm with penetration depths of up to 10 µm. Long-term stability tests indicate a total uncertainty in indentation depth less than 10 nm for periods as long as 12 h. To demonstrate instrument accuracy, repeated indention cycles were performed on a fused silica specimen using incrementally increasing indention force. From this test, an average value of 72 GPa ± 1.5 GPa for the Young's modulus was obtained from the elastic unloading curves for 10 measurements ranging in maximum force from 5 mN to 50 mN. To demonstrate longer-term instrument stability, a poly(methyl methacrylate) specimen was subjected to a fixed 5 mN indentation force for 4 h; two distinct creep-like mechanisms were observed.
ABSTRACT
In this work, tungsten wires have been etched in a KOH electrolyte solution. Based on the oxidation state of the electrolytic dissolution reaction's product and time integration of the Faradaic current produced during the reaction, this method is capable of providing a direct measurement of the change in mass of a structure from anodic dissolution. To assess the application of this process for controlled mass removal spanning sub-micrograms to milligrams, two experimental studies and accompanying uncertainty analyses have been undertaken. In the first of these, 5 tungsten wires of length 30 mm were used to remove mass values ranging from 50 to 350 µg. Uncertainty estimates indicate relative combined standard uncertainties of less than 0.3% in the mass changes determined from the measurement of Faradaic current. Comparison of the mass change determined using the electrolytic method, and using a precision ultra-microbalance agreed within this uncertainty. The charge-based method was then applied to modify the dynamic characteristics of a quartz tuning fork oscillator. In these experiments, tungsten fiber attached to one tine of the oscillator was etched in 5 µg increments up to 120 µg of total removed mass. In general, frequency shifts of 2.8 Hz · µg(-1) were observed, indicating sub-microgram resolution for the characterization of probes based on frequency shift and charge-based mass measurement. Taken together, this study provides the basis for a precision method for determining changes in mass based on electrical measurements from an electrochemical system. The utility of this technique is demonstrated through controlled modification of the dynamic properties of a mechanical oscillator.
