ABSTRACT
The equilibrium profiles of the plasma parameters of large-area rf discharges in a finite-length metal-shielded dielectric cylinder are computed using a two-dimensional fluid code. The rf power is coupled to the plasma through edge-localized surface waves traveling in the azimuthal direction along the plasma edge. It is shown that self-consistent accounting for axial plasma diffusion and radial nonuniformity of the electron temperature can explain the frequently reported deviations of experimentally measured radial density profiles from that of the conventional linear diffusion models. The simulation results are in a good agreement with existing experimental data obtained from surface-wave sustained large-diameter plasmas.
ABSTRACT
The effect of an internal low-frequency rotating current on inductively coupled plasmas in cylindrical chambers is studied. The electromagnetic field structure, power density distribution, the plasma density, and the operating regimes of the discharge are investigated using electrodynamic, power, and particle balance equations. It is shown that the rotating current sheet can dramatically improve the uniformity of the electromagnetic fields and the power transferred to the plasma electrons from that of conventional low-frequency inductively coupled plasma sources with external flat spiral inductive coils.
ABSTRACT
A self-consistent theory of ion-acoustic waves in dusty gas discharge plasmas is presented. The plasma is contaminated by fine dust particles with variable charge. The stationary state of the plasma and the dispersion and damping characteristics of the waves are investigated accounting for ionization, recombination, dust charge relaxation, and dissipation due to electron and ion elastic collisions with neutrals and dusts, as well as charging collisions with the dusts.
