Organic-Inorganic Hybrid Synaptic Transistors: Methyl-Silsesquioxanes-Based Electric Double Layer for Enhanced Synaptic Functionality and CMOS Compatibility.

Electrical double-layer (EDL) synaptic transistors based on organic materials exhibit low thermal and chemical stability and are thus incompatible with complementary metal oxide semiconductor (CMOS) processes involving high-temperature operations. This paper proposes organic-inorganic hybrid synaptic transistors using methyl silsesquioxane (MSQ) as the electrolyte. MSQ, derived from the combination of inorganic silsesquioxanes and the organic methyl (-CH3) group, exhibits exceptional thermal and chemical stability, thus ensuring compatibility with CMOS processes. We fabricated Al/MSQ electrolyte/Pt capacitors, exhibiting a substantial capacitance of 1.89 µF/cm2 at 10 Hz. MSQ-based EDL synaptic transistors demonstrated various synaptic behaviors, such as excitatory post-synaptic current, paired-pulse facilitation, signal pass filtering, and spike-number-dependent plasticity. Additionally, we validated synaptic functions such as information storage and synapse weight adjustment, simulating brain synaptic operations through potentiation and depression. Notably, these synaptic operations demonstrated stability over five continuous operation cycles. Lastly, we trained a multi-layer artificial deep neural network (DNN) using a handwritten Modified National Institute of Standards and Technology image dataset. The DNN achieved an impressive recognition rate of 92.28%. The prepared MSQ-based EDL synaptic transistors, with excellent thermal/chemical stability, synaptic functionality, and compatibility with CMOS processes, harbor tremendous potential as materials for next-generation artificial synapse components.

Synaptic Plasticity Modulation of Neuromorphic Transistors through Phosphorus Concentration in Phosphosilicate Glass Electrolyte Gate.

This study proposes a phosphosilicate glass (PSG)-based electrolyte gate synaptic transistor with varying phosphorus (P) concentrations. A metal oxide semiconductor capacitor structure device was employed to measure the frequency-dependent (C-f) capacitance curve, demonstrating that the PSG electric double-layer capacitance increased at 103 Hz with rising P concentration. Fourier transform infrared spectroscopy spectra analysis facilitated a theoretical understanding of the C-f curve results, examining peak differences in the P-OH structure based on P concentration. Using the proposed synaptic transistors with different P concentrations, changes in the hysteresis window were investigated by measuring the double-sweep transfer curves. Subsequently, alterations in proton movement within the PSG and charge characteristics at the channel/PSG electrolyte interface were observed through excitatory post-synaptic currents, paired-pulse facilitation, signal-filtering functions, resting current levels, and potentiation and depression characteristics. Finally, we demonstrated the proposed neuromorphic system's feasibility based on P concentration using the Modified National Institute of Standards and Technology learning simulations. The study findings suggest that, by adjusting the PSG film's P concentration for the same electrical stimulus, it is possible to selectively mimic the synaptic signal strength of human synapses. Therefore, this approach can positively contribute to the implementation of various neuromorphic systems.

Nanowire-Enhanced Fully Transparent and Flexible Indium Gallium Zinc Oxide Transistors with Chitosan Hydrogel Gate Dielectric: A Pathway to Improved Synaptic Properties.

In this study, a transparent and flexible synaptic transistor was fabricated based on a random-network nanowire (NW) channel made of indium gallium zinc oxide. This device employs a biocompatible chitosan-based hydrogel as an electrolytic gate dielectric. The NW structure, with its high surface-to-volume ratio, facilitated a more effective modulation of the channel conductance induced by protonic-ion polarization. A comparative analysis of the synaptic properties of NW- and film-type devices revealed the distinctive features of the NW-type configuration. In particular, the NW-type synaptic transistors exhibited a significantly larger hysteresis window under identical gate-bias conditions. Notably, these transistors demonstrated enhanced paired-pulse facilitation properties, synaptic weight modulation, and transition from short- to long-term memory. The NW-type devices displayed gradual potentiation and depression of the channel conductance and thus achieved a broader dynamic range, improved linearity, and reduced power consumption compared with their film-type counterparts. Remarkably, the NW-type synaptic transistors exhibited impressive recognition accuracy outcomes in Modified National Institute of Standards and Technology pattern-recognition simulations. This characteristic enhances the efficiency of practical artificial intelligence (AI) processes. Consequently, the proposed NW-type synaptic transistor is expected to emerge as a superior candidate for use in high-efficiency artificial neural network systems, thus making it a promising technology for next-generation AI semiconductor applications.

Light-Stimulated IGZO Transistors with Tunable Synaptic Plasticity Based on Casein Electrolyte Electric Double Layer for Neuromorphic Systems.

In this study, optoelectronic synaptic transistors based on indium-gallium-zinc oxide (IGZO) with a casein electrolyte-based electric double layer (EDL) were examined. The casein electrolyte played a crucial role in modulating synaptic plasticity through an internal proton-induced EDL effect. Thus, important synaptic behaviors, such as excitatory post-synaptic current, paired-pulse facilitation, and spike rate-dependent and spike number-dependent plasticity, were successfully implemented by utilizing the persistent photoconductivity effect of the IGZO channel stimulated by light. The synergy between the light stimulation and the EDL effect allowed the effective modulation of synaptic plasticity, enabling the control of memory levels, including the conversion of short-term memory to long-term memory. Furthermore, a Modified National Institute of Standards and Technology digit recognition simulation was performed using a three-layer artificial neural network model, achieving a high recognition rate of 90.5%. These results demonstrated a high application potential of the proposed optoelectronic synaptic transistors in neuromorphic visual systems.

Advancements in Complementary Metal-Oxide Semiconductor-Compatible Tunnel Barrier Engineered Charge-Trapping Synaptic Transistors for Bio-Inspired Neural Networks in Harsh Environments.

This study aimed to propose a silicon-on-insulator (SOI)-based charge-trapping synaptic transistor with engineered tunnel barriers using high-k dielectrics for artificial synapse electronics capable of operating at high temperatures. The transistor employed sequential electron trapping and de-trapping in the charge storage medium, facilitating gradual modulation of the silicon channel conductance. The engineered tunnel barrier structure (SiO2/Si3N4/SiO2), coupled with the high-k charge-trapping layer of HfO2 and high-k blocking layer of Al2O3, enabled reliable long-term potentiation/depression behaviors within a short gate stimulus time (100 µs), even under elevated temperatures (75 and 125 °C). Conductance variability was determined by the number of gate stimuli reflected in the maximum excitatory postsynaptic current (EPSC) and the residual EPSC ratio. Moreover, we analyzed the Arrhenius relationship between the EPSC as a function of the gate pulse number (N = 1-100) and the measured temperatures (25, 75, and 125 °C), allowing us to deduce the charge trap activation energy. A learning simulation was performed to assess the pattern recognition capabilities of the neuromorphic computing system using the modified National Institute of Standards and Technology datasheets. This study demonstrates high-reliability silicon channel conductance modulation and proposes in-memory computing capabilities for artificial neural networks using SOI-based charge-trapping synaptic transistors.

Enhanced Synaptic Behaviors in Chitosan Electrolyte-Based Electric-Double-Layer Transistors with Poly-Si Nanowire Channel Structures.

In this study, we enhance the synaptic behavior of artificial synaptic transistors by utilizing nanowire (NW)-type polysilicon channel structures. The high surface-to-volume ratio of the NW channels enables efficient modulation of the channel conductance, which is interpreted as the synaptic weight. As a result, NW-type synaptic transistors exhibit a larger hysteresis window compared to film-type synaptic transistors, even within the same gate voltage sweeping range. Moreover, NW-type synaptic transistors demonstrate superior short-term facilitation and long-term memory transition compared with film-type ones, as evidenced by the measured paired-pulse facilitation and excitatory post-synaptic current characteristics at varying frequencies and pulse numbers. Additionally, we observed gradual potentiation/depression characteristics, making these artificial synapses applicable to artificial neural networks. Furthermore, the NW-type synaptic transistors exhibit improved Modified National Institute of Standards and Technology pattern recognition rate of 91.2%. In conclusion, NW structure channels are expected to be a promising technology for next-generation artificial intelligence (AI) semiconductors, and the integration of NW structure channels has significant potential to advance AI semiconductor technology.

Implementation of Highly Stable Memristive Characteristics in an Organic-Inorganic Hybrid Resistive Switching Layer of Chitosan-Titanium Oxide with Microwave-Assisted Oxidation.

This study proposes a high-performance organic-inorganic hybrid memristor for the development of neuromorphic devices in the memristor-based artificial synapse. The memristor consists of a solid polymer electrolyte (SPE) chitosan layer and a titanium oxide (TiOx) layer grown with a low-thermal-budget, microwave-assisted oxidation. The fabricated Ti/SPE-chitosan/TiOx/Pt-structured memristor exhibited steady bipolar resistive switching (BRS) characteristics and demonstrated excellent endurance in 100-cycle repetition tests. Compared to SPE-chitosan memristors without a TiOx layer, the proposed organic-inorganic hybrid memristor demonstrated a higher dynamic range and a higher response to pre-synaptic stimuli such as short-term plasticity via paired-pulse facilitation. The effect of adding the TiOx layer on the BRS properties was examined, and the results showed that the TiOx layer improved the chemical and electrical superiority of the proposed memristor synaptic device. The proposed SPE-chitosan organic-inorganic hybrid memristor also exhibited a stable spike-timing-dependent plasticity, which closely mimics long-term plasticity. The potentiation and depression behaviors that modulate synaptic weights operated stably via repeated spike cycle tests. Therefore, the proposed SPE-chitosan organic-inorganic hybrid memristor is a promising candidate for the development of neuromorphic devices in memristor-based artificial synapses owing to its excellent stability, high dynamic range, and superior response to pre-synaptic stimuli.

Synaptic Transistors Based on PVA: Chitosan Biopolymer Blended Electric-Double-Layer with High Ionic Conductivity.

This study proposed a biocompatible polymeric organic material-based synaptic transistor gated with a biopolymer electrolyte. A polyvinyl alcohol (PVA):chitosan (CS) biopolymer blended electrolyte with high ionic conductivity was used as an electrical double layer (EDL). It served as a gate insulator with a key function as an artificial synaptic transistor. The frequency-dependent capacitance characteristics of PVA:CS-based biopolymer EDL were evaluated using an EDL capacitor (Al/PVA: CS blended electrolyte-based EDL/Pt configuration). Consequently, the PVA:CS blended electrolyte behaved as an EDL owing to high capacitance (1.53 µF/cm2) at 100 Hz and internal mobile protonic ions. Electronic synaptic transistors fabricated using the PVA:CS blended electrolyte-based EDL membrane demonstrated basic artificial synaptic behaviors such as excitatory post-synaptic current modulation, paired-pulse facilitation, and dynamic signal-filtering functions by pre-synaptic spikes. In addition, the spike-timing-dependent plasticity was evaluated using synaptic spikes. The synaptic weight modulation was stable during repetitive spike cycles for potentiation and depression. Pattern recognition was conducted through a learning simulation for artificial neural networks (ANNs) using Modified National Institute of Standards and Technology datasheets to examine the neuromorphic computing system capability (high recognition rate of 92%). Therefore, the proposed synaptic transistor is suitable for ANNs and shows potential for biological and eco-friendly neuromorphic systems.

Enhanced Synaptic Properties in Biocompatible Casein Electrolyte via Microwave-Assisted Efficient Solution Synthesis.

In this study, we fabricated an electric double-layer transistor (EDLT), a synaptic device, by preparing a casein biopolymer electrolyte solution using an efficient microwave-assisted synthesis to replace the conventional heating (heat stirrer) synthesis. Microwave irradiation (MWI) is more efficient in transferring energy to materials than heat stirrer, which significantly reduces the preparation time for casein electrolytes. The capacitance-frequency characteristics of metal-insulator-metal configurations applying the casein electrolyte prepared through MWI or a heat stirrer were measured. The capacitance of the MWI synthetic casein was 3.58 µF/cm2 at 1 Hz, which was higher than that of the heat stirrer (1.78 µF/cm2), confirming a stronger EDL gating effect. Electrolyte-gated EDLTs using two different casein electrolytes as gate-insulating films were fabricated. The MWI synthetic casein exhibited superior EDLT electrical characteristics compared to the heat stirrer. Meanwhile, essential synaptic functions, including excitatory post-synaptic current, paired-pulse facilitation, signal filtering, and potentiation/depression, were successfully demonstrated in both EDLTs. However, MWI synthetic casein electrolyte-gated EDLT showed higher synaptic facilitation than the heat stirrer. Furthermore, we performed an MNIST handwritten-digit-recognition task using a multilayer artificial neural network and MWI synthetic casein EDLT achieved a higher recognition rate of 91.24%. The results suggest that microwave-assisted casein solution synthesis is an effective method for realizing biocompatible neuromorphic systems.

Structural and Material-Based Approaches for the Fabrication of Stretchable Light-Emitting Diodes.

Stretchable displays, capable of freely transforming their shapes, have received significant attention as alternatives to conventional rigid displays, and they are anticipated to provide new opportunities in various human-friendly electronics applications. As a core component of stretchable displays, high-performance stretchable light-emitting diodes (LEDs) have recently emerged. The approaches to fabricate stretchable LEDs are broadly categorized into two groups, namely "structural" and "material-based" approaches, based on the mechanisms to tolerate strain. While structural approaches rely on specially designed geometries to dissipate applied strain, material-based approaches mainly focus on replacing conventional rigid components of LEDs to soft and stretchable materials. Here, we review the latest studies on the fabrication of stretchable LEDs, which is accomplished through these distinctive strategies. First, we introduce representative device designs for efficient strain distribution, encompassing island-bridge structures, wavy buckling, and kirigami-/origami-based structures. For the material-based approaches, we discuss the latest studies for intrinsically stretchable (is-) electronic/optoelectronic materials, including the formation of conductive nanocomposite and polymeric blending with various additives. The review also provides examples of is-LEDs, focusing on their luminous performance and stretchability. We conclude this review with a brief outlook on future technologies.

Biocompatible Potato-Starch Electrolyte-Based Coplanar Gate-Type Artificial Synaptic Transistors on Paper Substrates.

In this study, we propose the use of artificial synaptic transistors with coplanar-gate structures fabricated on paper substrates comprising biocompatible and low-cost potato-starch electrolyte and indium-gallium-zinc oxide (IGZO) channels. The electrical double layer (EDL) gating effect of potato-starch electrolytes enabled the emulation of biological synaptic plasticity. Frequency dependence measurements of capacitance using a metal-insulator-metal capacitor configuration showed a 1.27 µF/cm2 at a frequency of 10 Hz. Therefore, strong capacitive coupling was confirmed within the potato-starch electrolyte/IGZO channel interface owing to EDL formation because of internal proton migration. An electrical characteristics evaluation of the potato-starch EDL transistors through transfer and output curve resulted in counterclockwise hysteresis caused by proton migration in the electrolyte; the hysteresis window linearly increased with maximum gate voltage. A synaptic functionality evaluation with single-spike excitatory post-synaptic current (EPSC), paired-pulse facilitation (PPF), and multi-spike EPSC resulted in mimicking short-term synaptic plasticity and signal transmission in the biological neural network. Further, channel conductance modulation by repetitive presynaptic stimuli, comprising potentiation and depression pulses, enabled stable modulation of synaptic weights, thereby validating the long-term plasticity. Finally, recognition simulations on the Modified National Institute of Standards and Technology (MNIST) handwritten digit database yielded a 92% recognition rate, thereby demonstrating the applicability of the proposed synaptic device to the neuromorphic system.

Milk-Ta2O5 Hybrid Memristors with Crossbar Array Structure for Bio-Organic Neuromorphic Chip Applications.

In this study, a high-performance bio-organic memristor with a crossbar array structure using milk as a resistive switching layer (RSL) is proposed. To ensure compatibility with the complementary metal oxide semiconductor process of milk RSL, a high-k Ta2O5 layer was deposited as a capping layer; this layer enables high-density, integration-capable, photolithography processes. The fabricated crossbar array memristors contain milk-Ta2O5 hybrid membranes, and they exhibit bipolar resistance switching behavior and uniform resistance distribution across hundreds of repeated test cycles. In terms of the artificial synaptic behavior and synaptic weight changes, milk-Ta2O5 hybrid crossbar array memristors have a stable analog RESET process, and the memristors are highly responsive to presynaptic stimulation via paired-pulse facilitation excitatory post-synaptic current. Moreover, spike-timing-dependent plasticity and potentiation and depression behaviors, which closely emulate long-term plasticity and modulate synaptic weights, were evaluated. Finally, an artificial neural network was designed and trained to recognize the pattern of the Modified National Institute of Standards and Technology (MNIST) digits to evaluate the capability of the neuromorphic computing system. Consequently, a high recognition rate of over 88% was achieved. Thus, the milk-Ta2O5 hybrid crossbar array memristor is a promising electronic platform for in-memory computing systems.

Biocompatible Casein Electrolyte-Based Electric-Double-Layer for Artificial Synaptic Transistors.

In this study, we proposed a synaptic transistor using an emerging biocompatible organic material, namely, the casein electrolyte as an electric-double-layer (EDL) in the transistor. The frequency-dependent capacitance of the indium-tin-oxide (ITO)/casein electrolyte-based EDL/ITO capacitor was assessed. As a result, the casein electrolyte was identified to exhibit a large capacitance of ~1.74 µF/cm2 at 10 Hz and operate as an EDL owing to the internal proton charge. Subsequently, the implementation of synaptic functions was verified by fabricating the synaptic transistors using biocompatible casein electrolyte-based EDL. The excitatory post-synaptic current, paired-pulse facilitation, and signal-filtering functions of the transistors demonstrated significant synaptic behavior. Additionally, the spike-timing-dependent plasticity was emulated by applying the pre- and post-synaptic spikes to the gate and drain, respectively. Furthermore, the potentiation and depression characteristics modulating the synaptic weight operated stably in repeated cycle tests. Finally, the learning simulation was conducted using the Modified National Institute of Standards and Technology datasets to verify the neuromorphic computing capability; the results indicate a high recognition rate of 90%. Therefore, our results indicate that the casein electrolyte is a promising new EDL material that implements artificial synapses for building environmental and biologically friendly neuromorphic systems.

Photoconductivity Switching in MoTe2/Graphene Heterostructure by Trap-Assisted Photogating.

Negative photoconductivity (NPC), a reduction in photoconductivity under light illumination, could provide low power consumption and high-speed frequency response. The NPC has been generally observed in low-dimensional materials, which can be easily affected by the trapping of photocarriers. However, a gradual transition between NPC and positive photoconductivity (PPC) by controlling the light intensity has not been reported. In this study, a gradual and reversible switching between NPC and PPC is achieved in a van der Waals heterostructure of graphene and MoTe2. The initially observed NPC state becomes a PPC state with the increase in light intensity. The switching between NPC and PPC is considered to originate from the hole trapping in MoTe2. The hole trapping can induce a shift in the Fermi level of MoTe2 and thus change the junction characteristics between the graphene and MoTe2, which determine the photoresponse type (NPC or PPC). Notably, the switching from one state to the other can also be reversed, depending on the gate bias. The stable and reversible effect upon light illumination and application of a gate voltage could be used in optoelectronic devices and optical communications.

Flexible and Transparent Thin-Film Transistors Based on Two-Dimensional Materials for Active-Matrix Display.

Two-dimensional (2D) materials have attracted significant attention because of their outstanding electrical, mechanical, and optical characteristics. Because all of the conducting (graphene), semiconducting (molybdenum disulfide, MoS2), and insulating (hexagonal boron nitride, h-BN) components can be constructed from 2D materials, thin-film transistors based on 2D materials (2D TFTs) have been developed. However, scaling-up is necessary for these technologies to go beyond their initial implementation using the mechanical exfoliation method. Furthermore, it would be beneficial to find a method to realize high flexibility and/or transparency to their full potential. In this study, large-scale, flexible, and transparent 2D TFTs are developed and demonstrated as a backplane in active-matrix organic light-emitting diodes (AMOLEDs). With the optical chemical vapor deposition of the 2D materials, flexible (bending radius < 1 mm) and transparent (transmittance > 70%) TFTs with high electrical performances (mobility ≈ 10 cm2 V-1 s-1, on/off current ratio > 106) can be achieved. Furthermore, 2D TFTs are integrated into OLEDs by connecting the source electrode of the TFT to the anode of the OLED via a single graphene film, thus demonstrating pixel-by-pixel driving through a 2D TFT array in an active-matrix configuration.

Observation of Wavelength-Dependent Quantum Plasmon Tunneling with Varying the Thickness of Graphene Spacer.

Plasmonic coupling provides a highly localized electromagnetic field in the gap of noble metals when illuminated by a light. The plasmonic field enhancement is generally known to be inversely proportional to the gap distance. Given such a relation, reducing the gap distance appears to be necessary to achieve the highest possible field enhancement. At the sub-nanometer scale, however, quantum mechanical effects have to be considered in relation to plasmonic coupling. Here, we use graphene as a spacer to observe plasmonic field enhancement in sub-nanometer gap. The gap distance is precisely controlled by the number of stacked graphene layers. We propose that the sudden drop of field enhancement for the single layer spacer is originated from the plasmon tunneling through the thin spacer. Numerical simulation which incorporates quantum tunneling is also performed to support the experimental results. From the fact that field enhancement with respect to the number of graphene layers exhibits different behavior in two wavelengths corresponding to on- and off-resonance conditions, tunneling phenomenon is thought to destroy the resonance conditions of plasmonic coupling.

Vertical-Tunnel Field-Effect Transistor Based on a Silicon-MoS2 Three-Dimensional-Two-Dimensional Heterostructure.

We present a tunneling field-effect transistor based on a vertical heterostructure of highly p-doped silicon and n-type MoS2. The resulting p-n heterojunction shows a staggered band alignment in which the quantum mechanical band-to-band tunneling probability is enhanced. The device functions in both tunneling transistor and conventional transistor modes, depending on whether the p-n junction is forward or reverse biased, and exhibits a minimum subthreshold swing of 15 mV/dec, an average of 77 mV/dec for four decades of the drain current, a high on/off current ratio of approximately 107 at a drain voltage of 1 V, and fully suppressed ambipolar behavior. Furthermore, low-temperature electrical measurements demonstrated that both trap-assisted and band-to-band tunneling contribute to the drain current. The presence of traps was attributed to defects within the interfacial oxide between silicon and MoS2.

Atomic-scale etching of hexagonal boron nitride for device integration based on two-dimensional materials.

Hexagonal boron nitride (h-BN) is considered an ideal template for electronics based on two-dimensional (2D) materials, owing to its unique properties as a dielectric film. Most studies involving h-BN and its application to electronics have focused on its synthesis using techniques such as chemical vapor deposition, the electrical analysis of its surface state, and the evaluation of its performance. Meanwhile, processing techniques including etching methods have not been widely studied despite their necessity for device fabrication processes. In this study, we propose the atomic-scale etching of h-BN for integration into devices based on 2D materials, using Ar plasma at room temperature. A controllable etching rate, less than 1 nm min-1, was achieved and the low reactivity of the Ar plasma enabled the atomic-scale etching of h-BN down to a monolayer in this top-down approach. Based on the h-BN etching technique for achieving electrical contact with the underlying molybdenum disulfide (MoS2) layer of an h-BN/MoS2 heterostructure, a top-gate MoS2 field-effect transistor (FET) with h-BN gate dielectric was fabricated and characterized by high electrical performance based on the on/off current ratio and carrier mobility.

Pyridinic-N-Doped Graphene Paper from Perforated Graphene Oxide for Efficient Oxygen Reduction.

We report a simple approach to fabricate a pyridinic-N-doped graphene film (N-pGF) without high-temperature heat treatment from perforated graphene oxide (pGO). pGO is produced by a short etching treatment with hydrogen peroxide. GO perforation predominated in a short etching time (∼1 h), inducing larger holes and defects compared to pristine GO. The pGO is advantageous to the formation of a pyridinic N-doped graphene because of strong NH3 adsorption on vacancies with oxygen functional groups during the nitrogen-doping process, and the pyridinic-N-doped graphene exhibits good electrocatalytic activity for oxygen reduction reaction (ORR). Using rotating-disk electrode measurements, we confirm that N-pGF undergoes a four-electron-transfer process during the ORR in alkaline and acidic media by possessing sufficient diffusion pathways and readily available ORR active sites for efficient mass transport. A comparison between Pt/N-pGF and commercial Pt/C shows that Pt/N-pGF has superior performance, based on its more positive onset potential and higher limiting diffusion current at -0.5 V.

Large-scale synthesis of uniform hexagonal boron nitride films by plasma-enhanced atomic layer deposition.

Hexagonal boron nitride (h-BN) has been previously manufactured using mechanical exfoliation and chemical vapor deposition methods, which make the large-scale synthesis of uniform h-BN very challenging. In this study, we produced highly uniform and scalable h-BN films by plasma-enhanced atomic layer deposition, which were characterized by various techniques including atomic force microscopy, transmission electron microscopy, Raman spectroscopy, and X-ray diffraction. The film composition studied by X-ray photoelectron spectroscopy and Auger electron spectroscopy corresponded to a B:N stoichiometric ratio close to 1:1, and the band-gap value (5.65 eV) obtained by electron energy loss spectroscopy was consistent with the dielectric properties. The h-BN-containing capacitors were characterized by highly uniform properties, a reasonable dielectric constant (3), and low leakage current density, while graphene on h-BN substrates exhibited enhanced electrical performance such as the high carrier mobility and neutral Dirac voltage, which resulted from the low density of charged impurities on the h-BN surface.