ABSTRACT
We propose an all-dielectric single-layer guided-mode resonance filter (GMRF) operating in the high-frequency terahertz (THz) region. For the fabrication of thin gratings to achieve strong resonance in the high-frequency region, the refractive index and absorption must be small, while the tensile strength must be high. Cyclic olefin copolymer (COC) films have a lower refractive index and absorption than polyethylene terephthalate (PET) films and a higher tensile yield strength than polytetrafluoroethylene (PTFE) films. Therefore, the COC film was found suitable to fabricate a GMRF operating in the high-frequency THz region. We fabricated COC-based single-layer GMRFs with a thickness of 50â µm and grating periods of 500, 400, 300, 200, and 100â µm; the resonance frequencies of the TE0,1 mode were 0.576, 0.712, 0.939, 1.329, and 2.759 THz, respectively. A shorter grating period caused a greater shift of the resonance to a higher frequency. In particular, the COC film enabled the fabrication of a 100-µm grating period with a ridge width of 32â µm and length of 2â mm, enabling the GMRF to operate up to 2.759 THz, which is very high frequency compared to the previous highest frequency of 0.7 THz. These results were in good agreement with a simulation using rigorous coupled-wave analysis.