ABSTRACT
In this study, a blue photoresist with the hybrid dye-pigment system was developed by mixing xanthene-based dye (XPDIA) and blue pigment 15:6 (1:1, 5 wt% of total mixture amount) in order to develop high-performance image sensors with high thermal and chemical stability. The colorant used in this study has the nano-sized particle of around 100 nm and the physical property is related with the photonic property in image sensor application such as the cameras of mobile phone, car black box, security, etc. The hybrid dye-pigment system showed a high transmittance of more than 90% at 450 nm, and Δab showed very low color difference of 0.52. In solvent resistance, high transmittance of 90% was perfectly maintained, and Δab showed low color difference of 1.08. Migration test result exhibited no change at all after dipping in PGMEA transmittance spectrum. These results are due to the high absorption optical properties of XPDIA dye in the HDPS and the high thermal and chemical stability properties of the PB15:6 pigment. As a result, it was confirmed that the mixed blue hybrid spin coating film exhibited excellent thermal and chemical stability as well as good optical property.
