ABSTRACT
Stability of an anode spot plasma, which is an additional high density plasma generated in front of a positively biased electrode immersed in ambient plasma, is a critical issue for its utilization to various types of ion sources. In this study, operating conditions for the generation of stable anode spot plasmas are experimentally investigated. Diagnostics of the bias current flowing into the positively biased electrode and the properties of ambient plasma reveal that unstable nature of the anode spot is deeply associated with the reduction of double layer potential between the anode spot plasma and the ambient plasma. It is found that stability of the anode spot plasma can be improved with increasing the ionization rate in ambient plasma so as to compensate the loss of electrons across the double layer or with enlarging the area of the biased electrode to prevent electron accumulation inside the anode spot. The results obtained from the present study give the guideline for operating conditions of anode spot plasmas as an ion source with high brightness.
ABSTRACT
Generation of helium ions is experimentally investigated with a constricted direct current (DC) plasma ion source operated at layered-glow mode, in which electrons could be accelerated through multiple potential structures so as to generate helium ions including He(2+) by successive ionization collisions in front of an extraction aperture. The helium discharge is sustained with the formation of a couple of stable layers and the plasma ball with high density is created near the extraction aperture at the operational pressure down to 0.6 Torr with concave cathodes. The ion beam current extracted with an extraction voltage of 5 kV is observed to be proportional to the discharge current and inversely proportional to the operating pressure, showing high current density of 130 mA/cm(2) and power density of 0.52 mA/cm(2)/W. He(2+) ions, which were predicted to be able to exist due to multiple-layer potential structure, are not observed. Simple calculation on production of He(2+) ions inside the plasma ball reveals that reduced operating pressure and increased cathode area will help to generate He(2+) ions with the layered-glow DC discharge.
ABSTRACT
Anode spots are known as additional discharges on positively biased electrode immersed in plasmas. The anode spot plasma ion source (ASPIS) has been investigated as a high brightness ion source for nano applications such as focused ion beam (FIB) and nano medium energy ion scattering (nano-MEIS). The generation of anode spot is found to enhance brightness of ion beam since the anode spot increases plasma density near the extraction aperture. Brightness of the ASPIS has been estimated from measurement of emittance for total ion beam extracted through sub-mm aperture. The ASPIS is installed to the FIB system. Currents and diameters of the focused beams with∕without anode spot are measured and compared. As the anode spot is turned on, the enhancement of beam current is observed at fixed diameter of the focused ion beam. Consequently, the brightness of the focused ion beam is enhanced as well. For argon ion beam, the maximum normalized brightness of 12,300 A∕m(2) SrV is acquired. The ASPIS is applied to nano-MEIS as well. The ASPIS is found to increase the beam current density and the power efficiency of the ion source for nano-MEIS. From the present study, it is shown that the ASPIS can enhance the performance of devices for nano applications.
ABSTRACT
Microwave plasma ion source with rectangular cavity resonator has been examined to improve ion beam current by changing wave launcher type from single-port to double-port. The cavity resonators with double-port and single-port wave launchers are designed to get resonance effect at TE-103 mode and TE-102 mode, respectively. In order to confirm that the cavities are acting as resonator, the microwave power for breakdown is measured and compared with the E-field strength estimated from the HFSS (High Frequency Structure Simulator) simulation. Langmuir probe measurements show that double-port cavity enhances central density of plasma ion source by modifying non-uniform plasma density profile of the single-port cavity. Correspondingly, beam current from the plasma ion source utilizing the double-port resonator is measured to be higher than that utilizing single-port resonator. Moreover, the enhancement in plasma density and ion beam current utilizing the double-port resonator is more pronounced as higher microwave power applied to the plasma ion source. Therefore, the rectangular cavity resonator utilizing the double-port is expected to enhance the performance of plasma ion source in terms of ion beam extraction.
ABSTRACT
The operating conditions of a rf plasma ion source utilizing a positively biased electrode have been investigated to develop a stably operating, high-current ion source. Ion beam characteristics such as currents and energies are measured and compared with bias currents by varying the bias voltages on the electrode immersed in the ambient rf plasma. Current-voltage curves of the bias electrode and photographs confirm that a small and dense plasma, so-called anode spot, is formed near an extraction aperture and plays a key role to enhance the performance of the plasma ion source. The ion beam currents from the anode spot are observed to be maximized at the optimum bias voltage near the knee of the characteristic current-voltage curve of the anode spot. Increased potential barrier to obstruct beam extraction is the reason for the reduction of the ion beam current in spite of the increased bias current indicating the density of the anode spot. The optimum bias voltage is measured to be lower at higher operating pressure, which is favorable for stable operation without severe sputtering damage on the electrode. The ion beam current can be further enhanced by increasing the power for the ambient plasma without increasing the bias voltage. In the same manner, noble gases with higher atomic number as a feedstock gas are preferable for extracting higher beam current more stably. Therefore, performance of the plasma ion source with a positively biased electrode can be enhanced by controlling the operating conditions of the anode spot in various manners.
ABSTRACT
High current mode has been discovered and investigated in a constricted dc plasma ion source. As discharge currents exceed a certain threshold, voltage to sustain the constricted dc plasma suddenly falls down to almost half of the value. In this sense, constricted dc plasmas can be sustained at much higher current than in conventional mode operation at a fixed discharge voltage. Phenomenally, several discrete layered-glows are created between an anode glow and a cathode glow. The layers are thin and divided by dark spaces where charged particles can be accelerated. In this high current mode, ion beam current density is about 100 times higher than in conventional mode at the same voltage. It is noteworthy that lower gas pressure is desirable to sustain the layered-glow mode, which is also profitable for ion source in terms of differential pumping. Ion current density exceeds 300 mA/cm(2) at low discharge power of 175 W where ion density of plasma ball is estimated to be over 3.7x10(12) cm(-3).
