1.
Opt Lett
; 45(22): 6230-6233, 2020 Nov 15.
Article
in English
| MEDLINE
| ID: mdl-33186957
ABSTRACT
A beam shaping approach has been implemented to realize high-performance waveguide crossings based on cosine tapers. Devices with a compact footprint of 4.7µm×4.7µm were fabricated on the GLOBALFOUNDRIES 45 nm monolithic silicon photonics platform (45 CLO technology). Fabricated devices are found to be nearly wavelength independent (±0.035dB for 1260nm≤λ≤1360nm) with low insertion loss (â¼0.2dB) and crosstalk (-35dB). The measured response of the devices is consistent with the three-dimensional finite-difference time-domain simulation results. The design stability is validated by measuring the device insertion loss on eight chips, which is found to be 0.197±0.017dB at the designed center wavelength of 1310 nm.