ABSTRACT
We demonstrate a six-axis scanning imaging apparatus using piezo bending actuators with a large scan range. The six axes of motion of the bending actuators together with the coupling mechanism to the translation stage allow complete control of the sensor position and orientation over the scanning surface, which is ideal for the use of planar sensors such as Hall devices. In particular, the design allows for in situ correction of the probe tilt angle so that the sensor distance to sample surface can be minimized. We investigate the impact of this alignment on the quality of the measured data using an InSb Hall sensor and a magnetic sample. We also demonstrate a synchronous commutation setup that can greatly enhance the magnetic image by reducing the Hall signal offset.
