ABSTRACT
The design of a compact multiangle electron analyzer array for simultaneous detection of scattered and ejected electrons at nine different angles is described. It consists of eight slim "simulated" cylindrical mirror analyzers (CMAs) providing electron detection for scattering/ejected angles of 14 degrees apart from each other. A ninth analyzer is arranged to a scattering angle on the opposite side. A single analyzer has cylindrical symmetry equipotential lines in the region of the beam trajectories, whereas its electrodes are noncylindrical, except for the inner cylinder. The new spectrometer is easy to build because only a few electrodes of simple shape are needed for each of the analyzers. The electron optical properties of the new device are very close to those of a true CMA. Its geometric width, however, is only less than one-fifth of that of a conventional CMA, which allows one to arrange several analyzers close to each other. Example results with the new device are presented.
