2D beam steerer based on metalens on silicon photonics.

Beam steering with solid-state devices represents the cutting-edge technology for next-generation LiDARs and free-space communication transceivers. Here we demonstrate a platform based on a metalens on a 2D array of switchable silicon microring emitters. This platform enables scalable, efficient, and compact devices that steer in two dimensions using a single wavelength. We show a field of view of 12.4° × 26.8° using an electrical power of less than 83 mW, offering a solution for practical miniature beam steerers.

Chip-scale blue light phased array.

Compact beam steering in the visible spectral range is required for a wide range of emerging applications, such as augmented and virtual reality displays, optical traps for quantum information processing, biological sensing, and stimulation. Optical phased arrays (OPAs) can shape and steer light to enable these applications with no moving parts on a compact chip. However, OPA demonstrations have been mainly limited to the near-infrared spectral range due to the fabrication and material challenges imposed by the shorter wavelengths. Here, we demonstrate the first chip-scale phased array operating at blue wavelengths (488 nm) using a high-confinement silicon nitride platform. We use a sparse aperiodic emitter layout to mitigate fabrication constraints at this short wavelength and achieve wide-angle beam steering over a 50° field of view with a full width at half-maximum beam size of 0.17°. Large-scale integration of this platform paves the way for fully reconfigurable chip-scale three-dimensional volumetric light projection across the entire visible range.

On-chip platform for a phased array with minimal beam divergence and wide field-of-view.

Current silicon photonics phased arrays based on waveguide gratings enable beam steering with no moving parts. However, they suffer from a trade-off between beam divergence and field of view. Here, we show a platform based on silicon-nitride/silicon that achieves simultaneously minimal beam divergence and maximum field of view while maintaining performance that is robust to fabrication variations. In addition, in order to maximize the emission from the entire length of the grating, we design the grating's strength by varying its duty cycle (apodization) to emit uniformly. We fabricate a millimeter long grating emitter with diffraction-limited beam divergence of 0.089°.

Silicon-chip mid-infrared frequency comb generation.

Optical frequency combs are a revolutionary light source for high-precision spectroscopy because of their narrow linewidths and precise frequency spacing. Generation of such combs in the mid-infrared spectral region (2-20 µm) is important for molecular gas detection owing to the presence of a large number of absorption lines in this wavelength regime. Microresonator-based frequency comb sources can provide a compact and robust platform for comb generation that can operate with relatively low optical powers. However, material and dispersion engineering limitations have prevented the realization of an on-chip integrated mid-infrared microresonator comb source. Here we demonstrate a complementary metal-oxide-semiconductor compatible platform for on-chip comb generation using silicon microresonators, and realize a broadband frequency comb spanning from 2.1 to 3.5 µm. This platform is compact and robust and offers the potential to be versatile for use outside the laboratory environment for applications such as real-time monitoring of atmospheric gas conditions.

High Q SiC microresonators.

We demonstrate photonic devices based on standard 3C SiC epitaxially grown on silicon. We achieve high optical confinement by taking advantage of the high stiffness of SiC and undercutting the underlying silicon substrate. We demonstrate a 20 µm radius suspended microring resonator with Q=14,100 fabricated on commercially available SiC-on-silicon substrates.

Photonic crystal slab sensor with enhanced surface area.

In this work, we demonstrate improved molecular detection sensitivity for silicon slab photonic crystal cavities by introducing multiple-hole defects (MHDs), which increase the surface area available for label-free detection without degrading the quality factor. Compared to photonic crystals with L3 defects, adding MHDs into photonic crystal cavities enabled a 44% increase in detection sensitivity towards small refractive index perturbations due to surface monolayer attachment of a small aminosilane molecule. Also, photonic crystals with MHDs exhibited 18% higher detection sensitivity for bulk refractive index changes.