ABSTRACT
A microfluidic pump is presented that generates its pumping action via the EWOD (electrowetting-on-dielectric) effect. The flow is generated by the periodic movement of liquid-vapor interfaces in a large number (≈106) of microcavities resulting in a volume change of approx. 0.5 pl per cavity per pump stroke. The total flow resulting from all microcavities adds up to a few hundred nanolitres per cycle. Passive, topologically optimized, non-mechanical Tesla valves are used to rectify the flow. As a result, the micropump operates without any moving components. The dimensioning, fabrication, and characterization process of the micropump are described. Device fabrication is done using conventional manufacturing processes from microsystems technology, enabling cost-effective mass production on wafer-level without additional assembly steps like piezo chip-level bonding, etc. This allows for direct integration into wafer-based microfluidic or lab-on-a-chip applications. Furthermore, first measurement results obtained with prototypes of the micropump are presented. The voltage- and frequency-dependent pump performance is determined. The measurements show that a continuous flow rate larger than 0.2 ml min-1 can be achieved at a maximum pump pressure larger than 12 mbar.
ABSTRACT
A multistage optimization method is developed yielding Tesla valves that are efficient even at low flow rates, characteristic, e.g., for almost all microfluidic systems, where passive valves have intrinsic advantages over active ones. We report on optimized structures that show a diodicity of up to 1.8 already at flow rates of 20 µl s- 1 corresponding to a Reynolds number of 36. Centerpiece of the design is a topological optimization based on the finite element method. It is set-up to yield easy-to-fabricate valve structures with a small footprint that can be directly used in microfluidic systems. Our numerical two-dimensional optimization takes into account the finite height of the channel approximately by means of a so-called shallow-channel approximation. Based on the three-dimensionally extruded optimized designs, various test structures were fabricated using standard, widely available microsystem manufacturing techniques. The manufacturing process is described in detail since it can be used for the production of similar cost-effective microfluidic systems. For the experimentally fabricated chips, the efficiency of the different valve designs, i.e., the diodicity defined as the ratio of the measured pressure drops in backward and forward flow directions, respectively, is measured and compared to theoretical predictions obtained from full 3D calculations of the Tesla valves. Good agreement is found. In addition to the direct measurement of the diodicities, the flow profiles in the fabricated test structures are determined using a two-dimensional microscopic particle image velocimetry (µPIV) method. Again, a reasonable good agreement of the measured flow profiles with simulated predictions is observed.
