Improved SHSAW transduction efficiency using grating and uniform electrode guiding.

Pure shear-horizontal surface acoustic wave (SHSAW) devices have been increasingly considered for liquidphase and biosensing applications because of their ability to operate under liquid-loaded conditions and intrinsic sensitivity to mass, stiffness, viscosity, and electrical perturbations occurring at the device/fluid interface. Typically, the SHSAW is weakly guided by a free surface boundary condition (BC) or may not even exist for some materials and orientations, such as the quartz ST-90° orientation considered in this work. For a surrounding free surface BC, the interdigital transducer (IDT) typically generates strong shear-horizontal bulk acoustic waves (SHBAWs) relative to SHSAW. For that reason, guiding structures, e.g., dense and/or thick electrodes in periodic or uniform configurations, are incorporated into the design and placed between IDTs in delay-line devices to increase the ratio of transduced SHSAW power to IDT input power, ηSHSAW. The degree of ηSHSAW improvement depends on the thickness, composition, and geometry of the guiding structure. In previous work, the authors evaluated ηSHSAW using hybrid finite and boundary element method (FEM/BEM) models, but were limited to cases of stress-free or finite-thickness-grating surrounding surfaces. This work extends the analysis to the important boundary condition case of uniform finite-thickness electrode guiding, which is typically employed in liquid-phase and biosensor applications. To integrate the uniform electrode guiding structure with the SHSAW device analysis, a combined finite-length uniform electrode structure followed by an additional quarter-wavelength electrode was considered. In this work, it is shown that adjusting the quarter-wavelength electrode's film thickness and length allows cancellation of the SHSAW reflection from the edge discontinuity. As a result, the finite-length uniform guiding electrode can be treated as if it extends to infinity, and ηSHSAW can be easily obtained. In addition, the finite thickness of all electrodes is considered in the calculations. To verify the model, an IDT with uniform guiding electrodes was simulated and compared with the experimental results of a fabricated and tested device. The simulations predict SHSAW excitation directivity of 9 dB by the IDT, which is experimentally confirmed to within 0.8 dB.

FEM/BEM impedance and power analysis for measured LGS SH-SAW devices.

Pure shear horizontal piezoelectrically active surface and bulk acoustic waves (SH-SAW and SH-BAW) exist along rotated Y-cuts, Euler angles (0 degrees, theta, 90 degrees), of trigonal class 32 group crystals, which include the LGX family of crystals (langasite, langatate, and langanite). In this paper both SH-SAW and SH-BAW generated by finite-length, interdigital transducers (IDTs) on langasite, Euler angles (0 degrees, 22 degrees, 90 degrees), are simulated using combined finite- and boundary-element methods (FEM/BEM). Aluminum and gold IDT electrodes ranging in thickness from 600 A to 2000 A have been simulated, fabricated, and tested, with both free and metalized surfaces outside the IDT regions considered. Around the device's operating frequency, the percent difference between the calculated IDT impedance magnitude using the FEM/BEM model and the measurements is better than 5% for the different metal layers and thicknesses considered. The proportioning of SH-SAW and SH-BAW power is analyzed as a function of the number of IDT electrodes; type of electrode metal; and relative thickness of the electrode film, h/wavelength, where wavelength is the SH-SAW wavelength. Simulation results show that moderate mechanical loading by gold electrodes increases the proportion of input power converted to SH-SAW. For example, with a split-electrode IDT, comprising 238 electrodes with a relative thickness h/wavelength = 0.63% and surrounded by an infinitesimally thin conducting film, nearly 9% more input power is radiated as SH-SAW when gold instead of aluminum electrodes are used.

Pure SH-SAW propagation, transduction and measurements on KNbO3.

Potassium niobate (KNbO3) supports the electromechanically active pure shear horizontal surface acoustic wave (SH-SAW) mode along Z-axis cylinder orientations, Euler angles (phi, 90 degrees, 0 degrees), in which two uncoupled wave solutions exist: a purely mechanical sagittal Rayleigh SAW and a piezoelectrically stiffened pure SH-SAW. Within this family of cuts, a maximum electromechanical coupling coefficient for the pure SH-SAW, K2 = 53%, is observed along (0 degrees, 90 degrees, 0 degrees). This pure SH-SAW orientation also has the maximum value of electromechanical coupling observed along rotated Y-cut X propagation directions, Euler angles (0 degrees, theta, 0 degrees). The use of the pure SH-SAW mode is attractive for liquid-sensing applications because the SH-SAW is modestly attenuated by the adjacent liquid, unlike the generalized SAW (GSAW), which has particle displacement normal to the surface. This work investigates propagation and excitation properties of the SH-SAW and the shear horizontal bulk acoustic wave (SH-BAW) on single crystal KNbO3, Euler angles (0 degrees, 90 degrees, 0 degrees). Interdigital transducer (IDT) arrays are analyzed using boundary element method (BEM) techniques, addressing IDT properties such as: power partitioning between the SH-SAW and SH-BAW, SH-BAW radiation as a function of wave vector direction and radiation angle, and overall IDT impedance. The percentage of SH-SAW power to total input power is above 98% for IDTs containing 1.5 to 5.5 wavelengths of active electrodes with surrounding metalized regions. For nonmetalized regions outside the IDT, the ratio drops to between 1 and 2%, showing the importance of an energy trapping structure for efficient SH-SAW excitation and propagation along this orientation. Simulated and experimental IDT admittance results are compared, verifying the validity of the analysis performed. The reported measurements on the frequency variation with temperature indicate that the orientation considered is temperature compensated at about 8 degrees C. The surface of the SH-SAW devices fabricated have been loaded with deionized water and showed additional 1.6 dB transmission loss with respect to the unloaded surface, verifying the suitability of the pure SH-SAW mode on KNbO3 for liquid sensor applications.