Soft X-ray wavefront sensing at an ellipsoidal mirror shell.

A reliable `in situ' method for wavefront sensing in the soft X-ray domain is reported, developed for the characterization of rotationally symmetric optical elements, like an ellipsoidal mirror shell. In a laboratory setup, the mirror sample is irradiated by an electron-excited (4.4 keV), micrometre-sized (∼2 µm) fluorescence source (carbon Kα, 277 eV). Substantially, the three-dimensional intensity distribution I(r) is recorded by a CCD camera (2048 × 512 pixels of 13.5 µm) at two positions along the optical axis, symmetrically displaced by ±21-25% from the focus. The transport-of-intensity equation is interpreted in a geometrical sense from plane to plane and implemented as a ray tracing code, to retrieve the phase Φ(r) from the radial intensity gradient on a sub-pixel scale. For reasons of statistical reliability, five intra-/extra-focal CCD image pairs are evaluated and averaged to an annular two-dimensional map of the wavefront error {\cal W}. In units of the test wavelength (C Kα), an r.m.s. value \sigma_{\cal{W}} = ±10.9λ0 and a peak-to-valley amplitude of ±31.3λ0 are obtained. By means of the wavefront, the focus is first reconstructed with a result for its diameter of 38.4 µm, close to the direct experimental observation of 39.4 µm (FWHM). Secondly, figure and slope errors of the ellipsoid are characterized with an average of ±1.14 µm and ±8.8 arcsec (r.m.s.), respectively, the latter in reasonable agreement with the measured focal intensity distribution. The findings enable, amongst others, the precise alignment of axisymmetric X-ray mirrors or the design of a wavefront corrector for high-resolution X-ray science.

Collimation by a polycapillary half lens at 277 eV.

We report on the efficient collimation of soft X-rays with an energy of 277 eV by a halved polycapillary lens (PCL), made of borosilicate glass. Using electron-excited, micro fluorescence emission in the focus of the PCL, experiments reveal an angular divergence of (6.9 ± 0.2) mrad in the far field of the emitted beam. For a source of ≈5µm in size, that result is confirmed by simulations, obtained with a newly developed ray tracing code. An analytical fit model is proposed and applied to characterize the evolution of the measured as well as calculated, three-dimensional (3-D) intensity distribution. The photon flux density in a free-space propagation distance of (0.4 - 0.9) m from the PCL is enhanced by a factor of ≈(30 - 90) in comparison to the direct, not collimated radiation, as it is detected through a mm-sized transmission slit. Our findings could help to establish the halved PCL as a versatile tool in the table-top metrology of optical elements, such as mirrors and gratings for soft X-rays.

Highly efficient soft x-ray spectrometer for transient absorption spectroscopy with broadband table-top high harmonic sources.

We present a novel soft x-ray spectrometer for ultrafast absorption spectroscopy utilizing table-top femtosecond high-order harmonic sources. Where most commercially available spectrometers rely on spherical variable line space gratings with a typical efficiency on the order of 3% in the first diffractive order, this spectrometer, based on a Hettrick-Underwood design, includes a reflective zone plate as a dispersive element. An improved efficiency of 12% at the N K-edge is achieved, accompanied by a resolving power of 890. The high performance of the soft x-ray spectrometer is further demonstrated by comparing nitrogen K-edge absorption spectra from calcium nitrate in aqueous solution obtained with our high-order harmonic source to previous measurements performed at the electron storage ring facility BESSY II.

Grazing incidence-x-ray fluorescence for a dimensional and compositional characterization of well-ordered 2D and 3D nanostructures.

The increasing importance of well-controlled ordered nanostructures on surfaces represents a challenge for existing metrology techniques. To develop such nanostructures and monitor complex processing constraints fabrication, both a dimensional reconstruction of nanostructures and a characterization (ideally a quantitative characterization) of their composition is required. In this work, we present a soft x-ray fluorescence-based methodology that allows both of these requirements to be addressed at the same time. By applying the grazing-incidence x-ray fluorescence technique and thus utilizing the x-ray standing wave field effect, nanostructures can be investigated with a high sensitivity with respect to their dimensional and compositional characteristics. By varying the incident angles of the exciting radiation, element-sensitive fluorescence radiation is emitted from different regions inside the nanoobjects. By applying an adequate modeling scheme, these datasets can be used to determine the nanostructure characteristics. We demonstrate these capabilities by performing an element-sensitive reconstruction of a lamellar grating made of Si3N4, where GIXRF data for the O-Kα and N-Kα fluorescence emission allows a thin oxide layer to be reconstructed on the surface of the grating structure. In addition, we employ the technique also to three dimensional nanostructures and derive both dimensional and compositional parameters in a quantitative manner.

Conception of diffractive wavefront correction for XUV and soft x-ray spectroscopy.

We present a simple and precise method to minimize aberrations of mirror-based, wavelength-dispersive spectrometers for the extreme ultraviolet (XUV) and soft x-ray domain. The concept enables an enhanced resolving power $ E/\Delta E $E/ΔE, in particular, close to the diffraction limit over a spectral band of a few percent around the design energy of the instrument. Our optical element, the "diffractive wavefront corrector" (DWC), is individually shaped to the form and figure error of the mirror profile and might be written directly with a laser on a plane and even strongly curved substrates. Theory and simulations of various configurations, like Hettrick-Underwood or compact, highly efficient all-in-one setups for $ {{\rm TiO}_2} $TiO2 spectroscopy with $ E/\Delta E \mathbin{\lower.3ex\hbox{$\buildrel{\displaystyle{\lt}}\over{\smash{\displaystyle\sim}\vphantom{_x}}$}} 4.5 \times {10^4} $E/ΔE∼x<4.5×104, are addressed, as well as aspects of their experimental realization.

Applicability of the Debye-Waller damping factor for the determination of the line-edge roughness of lamellar gratings.

Periodic nanostructures are fundamental elements in optical instrumentation as well as basis structures in integrated electronic circuits. Decreasing sizes and increasing complexity of nanostructures have made roughness a limiting parameter to the performance. Grazing-incidence small-angle X-ray scattering is a characterization method that is sensitive to three-dimensional structures and their imperfections. To quantify line-edge roughness, a Debye-Waller factor (DWF), which is derived for binary gratings, is usually used. In this work, we systematically analyze the effect of roughness on the diffracted intensities. Two different limits to the application of the DWF are found depending on whether the roughness is normally distributed or not.

Erratum: Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams. Erratum.

[This corrects the article DOI: 10.1107/S2052252517006297.].

Element sensitive reconstruction of nanostructured surfaces with finite elements and grazing incidence soft X-ray fluorescence.

The geometry of a Si3N4 lamellar grating was investigated experimentally with reference-free grazing-incidence X-ray fluorescence analysis. While simple layered systems are usually treated with the matrix formalism to determine the X-ray standing-wave field, this approach fails for laterally structured surfaces. Maxwell solvers based on finite elements are often used to model electrical field strengths for any 2D or 3D structures in the optical spectral range. We show that this approach can also be applied in the field of X-rays. The electrical field distribution obtained with the Maxwell solver can subsequently be used to calculate the fluorescence intensities in full analogy to the X-ray standing-wave field obtained by the matrix formalism. Only the effective 1D integration for the layer system has to be replaced by a 2D integration of the finite elements, taking into account the local excitation conditions. We will show that this approach is capable of reconstructing the geometric line shape of a structured surface with high elemental sensitivity. This combination of GIXRF and finite-element simulations paves the way for a versatile characterization of nanoscale-structured surfaces.

Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams.

Grazing-incidence small-angle X-ray scattering (GISAXS) is often used as a versatile tool for the contactless and destruction-free investigation of nano-structured surfaces. However, due to the shallow incidence angles, the footprint of the X-ray beam is significantly elongated, limiting GISAXS to samples with typical target lengths of several millimetres. For many potential applications, the production of large target areas is impractical, and the targets are surrounded by structured areas. Because the beam footprint is larger than the targets, the surrounding structures contribute parasitic scattering, burying the target signal. In this paper, GISAXS measurements of isolated as well as surrounded grating targets in Si substrates with line lengths from 50 µm down to 4 µm are presented. For the isolated grating targets, the changes in the scattering patterns due to the reduced target length are explained. For the surrounded grating targets, the scattering signal of a 15 µm × 15 µm target grating structure is separated from the scattering signal of 100 µm × 100 µm nanostructured surroundings by producing the target with a different orientation with respect to the predominant direction of the surrounding structures. As virtually all litho-graphically produced nanostructures have a predominant direction, the described technique allows GISAXS to be applied in a range of applications, e.g. for characterization of metrology fields in the semiconductor industry, where up to now it has been considered impossible to use this method due to the large beam footprint.

Metrology of nanoscale grating structures by UV scatterometry.

In this contribution we demonstrate goniometric scatterometry measurements of gratings with linewidths down to 25 nm on silicon wafers with an inspection wavelength of 266 nm. For each sample, measurements have been performed in four different configurations and the obtained data have been evaluated in parallel. As results we present the reconstruction of the complete cross-section profile. We introduce a novel geometry parameterization which overcomes some limitations of the default parameterization. A co-variance analysis of the parameters is offered to indicate the soundness of the results. A qualitative comparison with cross-section scanning electron microscope (SEM) images shows excellent agreement.

Deterministic composite nanophotonic lattices in large area for broadband applications.

Exotic manipulation of the flow of photons in nanoengineered materials with an aperiodic distribution of nanostructures plays a key role in efficiency-enhanced broadband photonic and plasmonic technologies for spectrally tailorable integrated biosensing, nanostructured thin film solarcells, white light emitting diodes, novel plasmonic ensembles etc. Through a generic deterministic nanotechnological route here we show subwavelength-scale silicon (Si) nanostructures on nanoimprinted glass substrate in large area (4 cm2) with advanced functional features of aperiodic composite nanophotonic lattices. These nanophotonic aperiodic lattices have easily tailorable supercell tiles with well-defined and discrete lattice basis elements and they show rich Fourier spectra. The presented nanophotonic lattices are designed functionally akin to two-dimensional aperiodic composite lattices with unconventional flexibility- comprising periodic photonic crystals and/or in-plane photonic quasicrystals as pattern design subsystems. The fabricated composite lattice-structured Si nanostructures are comparatively analyzed with a range of nanophotonic structures with conventional lattice geometries of periodic, disordered random as well as in-plane quasicrystalline photonic lattices with comparable lattice parameters. As a proof of concept of compatibility with advanced bottom-up liquid phase crystallized (LPC) Si thin film fabrication, the experimental structural analysis is further extended to double-side-textured deterministic aperiodic lattice-structured 10 µm thick large area LPC Si film on nanoimprinted substrates.

A realistic fabrication and design concept for quantum gates based on single emitters integrated in plasmonic-dielectric waveguide structures.

Tremendous enhancement of light-matter interaction in plasmonic-dielectric hybrid devices allows for non-linearities at the level of single emitters and few photons, such as single photon transistors. However, constructing integrated components for such devices is technologically extremely challenging. We tackle this task by lithographically fabricating an on-chip plasmonic waveguide-structure connected to far-field in- and out-coupling ports via low-loss dielectric waveguides. We precisely describe our lithographic approach and characterize the fabricated integrated chip. We find excellent agreement with rigorous numerical simulations. Based on these findings we perform a numerical optimization and calculate concrete numbers for a plasmonic single-photon transistor.

Miniaturized Bragg-grating couplers for SiN-photonic crystal slabs.

We report on an experimental and theoretical investigation of an integrated Bragg-like grating coupler for near-vertical scattering of light from photonic crystal waveguides with an ultra-small footprint of a few lattice constants only. Using frequency-resolved measurements, we find the directional properties of the scattered radiation and prove that the coupler shows a good performance over the complete photonic bandgap. The results compare well to analytical considerations regarding 1d-scattering phenomena as well as to FDTD simulations.

Thermo-optical response of photonic crystal cavities operating in the visible spectral range.

In this paper we study thermo-optical effects in gallium phosphite photonic crystal cavities in the visible range. By measuring the shift of narrow resonances, we derive the temperature dependency of the local refractive index of gallium phosphide in an attoliter volume over a temperature range between 5 and 300 K at a wavelength of about 605 nm. Additionally, the potential of photonic crystal cavities for thermo-optical switching of visible light is investigated. As an example we demonstrate thermo-optical switching with 13 dB contrast.

[From casualty medicine to casualty surgery]. / Von der Unfallheilkunde zur Unfallchirurgie.

For many centuries the treatment of accident casualties -- as proven by evidence from prehistoric times -- has been an essential part of an empirically determined and crafts-oriented surgery. But though the phenomenon of accident and the pathophysiological complex of trauma were faced with the surgical inaccessibility of the human body until in the late 19th century, a kind of casualty medicine supported by multifaceted, scientifically founded observations was trying to repair or alleviate the sequelae of accidents. But only the development of imaging diagnostic procedures made it possible to apply pre-planned target-oriented -- what is modernly called "outcome-oriented" -- surgical procedures. The change in the nature of accidents and their associated health and social consequences demands that the surgeons' attention be specially drawn to this challenge as it presents itself e.g. in the huge field of fracture management, the management of the general sequelae of trauma, emergency rescue and the prevention and control of the secondary effects of trauma (rehabilitation). There has never been any doubt that all this could only be achieved within the discipline of surgery in its entirety, though with the scientifically and practically acquired competence of one its specialties, i.e. casualty surgery, as both a prerequisite and necessary condition.