ABSTRACT
The influence of the geometry on quantitative energy dispersive X-ray spectrometry (EDXS) analysis is determined for a ChemiSTEM system (Super-X) in combination with a low-background double-tilt specimen holder. For the first time a combination of experimental measurements with simulations is used to determine the positions of the individual detectors of a Super-X system. These positions allow us to calculate the detector's solid angles and estimate the amount of detector shadowing and its influence on quantitative EDXS analysis, including absorption correction using the ζ-factor method. Both shadowing by the brass portions and the beryllium specimen carrier of the holder severely affect the quantification of low to medium atomic number elements. A multi-detector system is discussed in terms of practical consequences of the described effects, and a quantitative evaluation of a Fayalit sample is demonstrated. Corrections and suggestions for minimizing systematic errors are discussed to improve quantitative methods for a multi-detector system.
