Quantitative analysis of thin films of RBa(2)Cu(3)O(7-x) (R-rare earth elements) and ZrO(2) (Y(2)O(3)) buffer layers by SNMS.

It is shown that RBa(2)Cu(3)O(7-X) single crystals may be used as reference samples for the quantitative analysis of RBa(2)Cu(3)O(7-X) thin films by SNMS. RSF-values for Y and Cu (relative to Ba) determined for ceramic RBa(2)Cu(3)O(7-X) samples are higher than those for single crystals. This difference may be caused by Ba segregation on grain boundaries. The depth profile analysis of YSZ/Al(2)O(3) samples was performed by DBM using a Ni grid to prevent sample charging. The reproducibility of analysis was better than 10%.