Some aspects on the uncertainty calculation in Mueller ellipsometry.

In this paper, we focus on the metrological aspects of spectroscopic Mueller ellipsometry-i.e. on the uncertainty estimation of the measurement results. With the help of simulated Mueller matrices, we demonstrate that the commonly used merit functions do not return the correct uncertainty for the measurand under consideration (here shown for the relatively simple case of the geometrical parameter layer thickness for the example system of a SiO2 layer on a Si substrate). We identify the non-optimal treatment of measured and sample- induced depolarization as a reason of this discrepancy. Since depolarization results from sample properties in combination with experimental parameters, it must not be minimized during the parameter fit. Therefore, we propose a new merit function treating this issue differently: It implicitly uses the measured depolarization as a weighting parameter. It is very simple and computationally cheap. It compares for each wavelength the measured Jones matrix elements to Cloude's covariance matrix: ∼∑λ jsim,λ†Hmeas,λ + j sim,λ . Moreover, an extension will be presented which allows us to include the measurement noise into this merit function. With this, reliable statistical uncertainties can be calculated. Except for some pre-processing of the raw data, there is no additional computational cost.