ABSTRACT
A hybrid antireflective coating combining homogeneous layers and linear gradient refractive index layers has been deposited using different techniques. The samples were analyzed optically based on spectrophotometric and spectroscopic ellipsometry measurements under different angles of incidence in order to precisely characterize the coatings. The Lorentz-Lorenz model has been used to calculate the refractive index of material mixtures in gradient and constant index layers of the coating. The obtained refractive index profiles have been compared with the targeted ones to detect errors in processes of deposition.
ABSTRACT
To provide screens for laser projection that improve contrast, a spectrally selective reflecting filter was designed by using genetic algorithms to overcome the problem of unknown starting values. Colormetrics rather than fixed targets were used for evaluation. Various selective filters were deposited upon glass as well as upon solid and flexible plastic substrates by reactive mid-frequency magnetron sputtering. For process control, in situ spectroscopic ellipsometry was applied.
