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1.
Appl Opt ; 28(2): 389-400, 1989 Jan 15.
Article in English | MEDLINE | ID: mdl-20548487

ABSTRACT

A compact, portable radiometric standard for the EUV wavelength region utilizing single photon counting is described. An energetic beam of electrons is passed through a thin atomic or molecular gas target inducing radiative transitions. The absolute flux of radiation per unit length of beam emitted in a spectral line can be calculated from the current of electrons and the number density of the target gas if the relevant electronimpact photoemission cross section is known at the electron-impact energy used. In typical operating conditions and for a photoemission cross section of 10(-22) m(2), the emitted flux of photons can be 10(10) photons/s/cm of beam length resulting in a count rate of 500 counts/s into an f/6 spectrometer-detector system. Assessment of previously measured electron-impact photoemission cross sections indicates that, once precision benchmark cross-sectional measurements are available, ultimate uncertainties as low as 3% could be obtained for this standard.

2.
Appl Opt ; 26(10): 2029-41, 1987 May 15.
Article in English | MEDLINE | ID: mdl-20454439

ABSTRACT

Four independent procedures were developed and tested to measure the apparatus response function of a VUV spectrometer-detector system for unpolarized 46-nm radiation dispersed in second order. These measurements were made to allow the use of continuum synchrotron radiation for the calibration of the response of the spectrometer-detector system for dispersion of 92-nm radiation in first order with full correction for the effects of synchrotron radiation dispersed in second order. In the first method, synchrotron radiation was used in combination with a thin Al foil to block out synchrotron radiation at 92 nm while allowing 46-nm radiation to enter the spectrometer. In the second as well as the third method NeII 46-nm line radiation was used to measure the response function in first and second order. The line radiation was produced by (1) an electron beam exciting a Ne gas target for which the resulting VUV light illuminated the entire grating and (2) a duoplasmatron VUV light source operating with Ne gas producing a small spot of radiation that was scanned across the surface of the spectrometer grating. In the fourth method the difference in the spectral distributions of synchrotron radiation produced by electrons with different kinetic energies was employed to deduce the second-order detection efficiency. The ratio of the second- to firstorder response function for 46-nm radiation could be determined to a precision of 6% using the bandpass filter and electron-beam methods, 10% using the duoplasmatron method, and 250% using the multiple electron energy method.

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