ABSTRACT
Scanning Superconducting QUantum Interference Device (SQUID) microscopy provides valuable information about magnetic properties of materials and devices. The magnetic flux response of the SQUID is often linearized with a flux-locked feedback loop, which limits the response time to microseconds or longer. In this work, we present the design, fabrication, and characterization of a novel scanning SQUID sampler with a 40-ps time resolution and linearized response to periodically triggered signals. Other design features include a micron-scale pickup loop for the detection of local magnetic flux, a field coil to apply a local magnetic field to the sample, and a modulation coil to operate the SQUID sampler in a flux-locked loop to linearize the flux response. The entire sampler device is fabricated on a 2 mm × 2 mm chip and can be scanned over macroscopic planar samples. The flux noise at 4.2 K with 100 kHz repetition rate and 1 s of averaging is of order 1 mΦ0. This SQUID sampler will be useful for imaging dynamics in magnetic and superconducting materials and devices.
ABSTRACT
Superconducting QUantum Interference Device (SQUID) microscopy has excellent magnetic field sensitivity, but suffers from modest spatial resolution when compared with other scanning probes. This spatial resolution is determined by both the size of the field sensitive area and the spacing between this area and the sample surface. In this paper we describe scanning SQUID susceptometers that achieve sub-micron spatial resolution while retaining a white noise floor flux sensitivity of ≈2µΦ0/Hz1/2. This high spatial resolution is accomplished by deep sub-micron feature sizes, well shielded pickup loops fabricated using a planarized process, and a deep etch step that minimizes the spacing between the sample surface and the SQUID pickup loop. We describe the design, modeling, fabrication, and testing of these sensors. Although sub-micron spatial resolution has been achieved previously in scanning SQUID sensors, our sensors not only achieve high spatial resolution but also have integrated modulation coils for flux feedback, integrated field coils for susceptibility measurements, and batch processing. They are therefore a generally applicable tool for imaging sample magnetization, currents, and susceptibilities with higher spatial resolution than previous susceptometers.
