Miniature Autonomous Robot Based on Legged In-Plane Piezoelectric Resonators with Onboard Power and Control.

This work reports the design, fabrication, and characterization of a centimetre-scale autonomous robot with locomotion based on in-plane piezoelectric resonators and 3D-printed inclined legs. The robot consists of a pair of cooperative piezoelectric motors, an electronic power circuit and a battery-powered microcontroller. The piezoelectric motors feature a lead zirconate titanate (PZT) plate of dimensions 20 mm × 3 mm × 0.2 mm vibrating on its first extensional resonant mode at around 70 kHz. A particular position of 3D-printed inclined legs allowed the conversion of the in-plane movement into an effective forward thrust. To enable arbitrary trajectories of the robot on a surface, two parallel piezoelectric plate motors were arranged in a differential drive scheme. The signals to excite these plates were generated by the microcontroller and adapted by a supplementary electronic circuit to increase the effective voltage supplied by the onboard battery. The fully assembled robot had a size of 27 mm × 15 mm and a weight of 7 g and reached a linear speed of approximately 15 mm/s and a rotational speed of up to 50 deg./s. Finally, the autonomous robot demonstrated the ability to follow pre-programmed paths.

Design and Characterization of a Planar Micro-Conveyor Device Based on Cooperative Legged Piezoelectric MEMS Resonators.

This paper reports the design, fabrication, and performance of a hybrid piezoelectric planar micro-conveyor based on Micro-Electromechanical Systems (MEMS) bridge resonators and featuring 3D-printed vertical legs. The device includes two cooperating silicon plate resonators with an area of 5 × 1 mm2, actuated by an integrated aluminum-nitride (AlN) piezoelectric thin film. An optimally designed array of 3D-printed projection legs was attached to the plates, to convert the standing-wave (SW) vertical vibrations into horizontal rotations or translations of the supported slider. An open-loop control strategy based on burst-type driving signals, with different numbers of sinusoidal cycles applied on each of the resonators, allowed the cooperation of the two bridges to set up prescribed trajectories of small flat objects, up to 100 mg, with positional accuracy below 100 nm and speeds up to 20 mm/s, by differential drive actuation. The effect of the leg tip and sliders' surface finish on the conveyor performance was investigated, suggesting that further optimizations may be possible by modifying the tribological properties. Finally, the application of the micro-conveyor as a reconfigurable electronic system, driven by a preprogrammed sequence of signals, was demonstrated by delivering some surface-mount technology (SMD) parts lying on a 65 mg glass slider.

3D-Printed Liquid Cell Resonator with Piezoelectric Actuation for In-Line Density-Viscosity Measurements.

The in-line monitoring of liquid properties, such as density and viscosity, is a key process in many industrial areas such as agro-food, automotive or biotechnology, requiring real-time automation, low-cost and miniaturization, while maintaining a level of accuracy and resolution comparable to benchtop instruments. In this paper, 3D-printed cuboid-shaped liquid cells featuring a rectangular vibrating plate in one of the sides, actuated by PZT piezoelectric layers, were designed, fabricated and tested. The device was resonantly excited in the 3rd-order roof tile-shaped vibration mode of the plate and validated as a density-viscosity sensor. Furthermore, conditioning circuits were designed to adapt the impedance of the resonator and to cancel parasitic effects. This allowed us to implement a phase-locked loop-based oscillator circuit whose oscillation frequency and voltage amplitude could be calibrated against density and viscosity of the liquid flowing through the cell. To demonstrate the performance, the sensor was calibrated with a set of artificial model solutions of grape must, representing stages of a wine fermentation process. Our results demonstrate the high potential of the low-cost sensor to detect the decrease in sugar and the increase in ethanol concentrations during a grape must fermentation, with a resolution of 10 µg/mL and 3 µPa·s as upper limits for the density and viscosity, respectively.

Comparative Study of Traveling and Standing Wave-Based Locomotion of Legged Bidirectional Miniature Piezoelectric Robots.

The use of wave-based locomotion mechanisms is already well established in the field of robotics, using either standing waves (SW) or traveling waves (TW). The motivation of this work was to compare both the SW- and the TW-based motion of a 20-mm long sub-gram glass plate, with attached 3D printed legs, and piezoelectric patches for the actuation. The fabrication of the robot did not require sophisticated techniques and the speed of motion was measured under different loading conditions. In the case of the TW mechanism, the influence of using different pairs of modes to generate the TW on the locomotion speed has been studied, as well as the effect of the coupling of the TW motion and the first flexural vibration mode of the legs. This analysis resulted in a maximum unloaded speed of 6 bodylengths/s (BL/s) at 65 V peak-to-peak (Vpp). The SW approach also examined different modes of vibration and a speed of locomotion as high as 14 BL/s was achieved, requiring, unlike the TW case, a highly precise location of the legs on the glass supporting platform and a precise tuning of the excitation frequency.

Bidirectional Linear Motion by Travelling Waves on Legged Piezoelectric Microfabricated Plates.

This paper reports the design, fabrication and performance of MEMS-based piezoelectric bidirectional conveyors featuring 3D printed legs, driven by linear travelling waves (TW). The structures consisted of an aluminium-nitride (AlN) piezoelectric film on top of millimetre-sized rectangular thin silicon bridges and two electrode patches. The position and size of the patches were analytically optimised for TW generation in three frequency ranges: 19, 112 and 420 kHz, by the proper combination of two contiguous flexural modes. After fabrication, the generated TW were characterized by means of Laser-Doppler vibrometry to obtain the relevant tables of merit, such as the standing wave ratio and the average amplitude. The experimental results agreed with the simulation, showing the generation of a TW with an amplitude as high as 6 nm/V and a standing wave ratio as low as 1.46 for a device working at 19.3 kHz. The applicability of the fabricated linear actuator device as a conveyor was investigated. Its kinetic performance was studied with sliders of different mass, being able to carry a 35 mg silicon slider, 18 times its weight, with 6 V of continuous sinusoidal excitation and a speed of 0.65 mm/s. A lighter slider, weighting only 3 mg, reached a mean speed of 1.7 mm/s at 6 V. In addition, by applying a burst sinusoidal excitation comprising 10 cycles, the TW generated in the bridge surface was able to move a 23 mg slider in discrete steps of 70 nm, in both directions, which is a promising result for a TW piezoelectric actuator of this size.

Motion of a Legged Bidirectional Miniature Piezoelectric Robot Based on Traveling Wave Generation.

This article reports on the locomotion performance of a miniature robot that features 3D-printed rigid legs driven by linear traveling waves (TWs). The robot structure was a millimeter-sized rectangular glass plate with two piezoelectric patches attached, which allowed for traveling wave generation at a frequency between the resonant frequencies of two contiguous flexural modes. As a first goal, the location and size of the piezoelectric patches were calculated to maximize the structural displacement while preserving a standing wave ratio close to 1 (cancellation of wave reflections from the boundaries). The design guidelines were supported by an analytical 1D model of the structure and could be related to the second derivative of the modal shapes without the need to rely on more complex numerical simulations. Additionally, legs were bonded to the glass plate to facilitate the locomotion of the structure; these were fabricated using 3D stereolithography printing, with a range of lengths from 0.5 mm to 1.5 mm. The optimal location of the legs was deduced from the profile of the traveling wave envelope. As a result of integrating both the optimal patch length and the legs, the speed of the robot reached as high as 100 mm/s, equivalent to 5 body lengths per second (BL/s), at a voltage of 65 Vpp and a frequency of 168 kHz. The blocking force was also measured and results showed the expected increase with the mass loading. Furthermore, the robot could carry a load that was 40 times its weight, opening the potential for an autonomous version with power and circuits on board for communication, control, sensing, or other applications.

Generation of Linear Traveling Waves in Piezoelectric Plates in Air and Liquid.

A micro- to milli-sized linear traveling wave (TW) actuator fabricated with microelectromechanical systems (MEMS) technology is demonstrated. The device is a silicon cantilever actuated by piezoelectric aluminum nitride. Specifically designed top electrodes allow the generation of TWs at different frequencies, in air and liquid, by combining two neighboring resonant modes. This approach was supported by analytical calculations, and different TWs were measured on the same plate by laser Doppler vibrometry. Numerical simulations were also carried out and compared with the measurements in air, validating the wave features. A standing wave ratio as low as 1.45 was achieved in air, with a phase velocity of 652 m/s and a peak horizontal velocity on the device surface of 124 µm/s for a driving signal of 1 V at 921.9 kHz. The results show the potential of this kind of actuator for locomotion applications in contact with surfaces or under immersion in liquid.

Piezoelectric MEMS Resonators for Cigarette Particle Detection.

In this work, we demonstrate the potential of a piezoelectric resonator for developing a low-cost sensor system to detect microscopic particles in real-time, which can be present in a wide variety of environments and workplaces. The sensor working principle is based on the resonance frequency shift caused by particles collected on the resonator surface. To test the sensor sensitivity obtained from mass-loading effects, an Aluminum Nitride-based piezoelectric resonator was exposed to cigarette particles in a sealed chamber. In order to determine the resonance parameters of interest, an interface circuit was implemented and included within both open-loop and closed-loop schemes for comparison. The system was capable of tracking the resonance frequency with a mass sensitivity of 8.8 Hz/ng. Although the tests shown here were proven by collecting particles from a cigarette, the results obtained in this application may have interest and can be extended towards other applications, such as monitoring of nanoparticles in a workplace environment.

A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity⁻Density Sensors.

Cantilever resonators based on the roof tile-shaped modes have recently demonstrated their suitability for liquid media monitoring applications. The early studies have shown that certain combinations of dimensions and order of the mode can maximize the Q-factor, what might suggest a competition between two mechanisms of losses with different geometrical dependence. To provide more insight, a comprehensive study of the Q-factor and the resonant frequency of these modes in microcantilever resonators with lengths and widths between 250 and 3000 µm and thicknesses between 10 and 60 µm is presented. These modes can be efficiently excited by a thin piezoelectric AlN film and a properly designed top electrode layout. The electrical and optical characterization of the resonators are performed in liquid media and then their performance is evaluated in terms of quality factor and resonant frequency. A quality factor as high as 140 was measured in isopropanol for a 1000 × 900 × 10 µm³ cantilever oscillating in the 11th order roof tile-shaped mode at 4 MHz; density and viscosity resolutions of 10-6 g/mL and 10-4 mPa·s, respectively are estimated for a geometrically optimized cantilever resonating below 1 MHz.

Potential of Piezoelectric MEMS Resonators for Grape Must Fermentation Monitoring.

In this study grape must fermentation is monitored using a self-actuating/self-sensing piezoelectric micro-electromechanical system (MEMS) resonator. The sensor element is excited in an advanced roof tile-shaped vibration mode, which ensures high Q-factors in liquids (i.e., Q ~100 in isopropanol), precise resonance frequency analysis, and a fast measurement procedure. Two sets of artificial model solutions are prepared, representing an ordinary and a stuck/sluggish wine fermentation process. The precision and reusability of the sensor are shown using repetitive measurements (10 times), resulting in standard deviations of the measured resonance frequencies of ~0.1%, Q-factor of ~11%, and an electrical conductance peak height of ~12%, respectively. With the applied evaluation procedure, moderate standard deviations of ~1.1% with respect to density values are achieved. Based on these results, the presented sensor concept is capable to distinguish between ordinary and stuck wine fermentation, where the evolution of the wine density associated with the decrease in sugar and the increase in ethanol concentrations during fermentation processes causes a steady increase in the resonance frequency for an ordinary fermentation. Finally, the first test measurements in real grape must are presented, showing a similar trend in the resonance frequency compared to the results of an artificial solutions, thus proving that the presented sensor concept is a reliable and reusable platform for grape must fermentation monitoring.