The effects of radio frequency plasma power on Ai2O3 films deposited at room-temperature by remote plasma atomic layer deposition.

Al2O3 films were deposited by a remote plasma atomic layer deposition (RPALD) method at room temperature (25 degrees C) in a reactor using alternating exposures of Al(CH3)3 and O2 plasma. Oxygen plasma was used as a reactant gas to decompose the trimethylaluminum [TMA, Al(CH3)3] precursor at room temperature. The RF plasma power was increased to produce enough radicals for the deposition of the Al2O3 films at room temperature. Then, changes in the interfacial and bulk properties of the deposited Al2O3 films were investigated according to increasing RF power. Al2O3 films deposited by RPALD with RF powers over 100 W showed similar bulk properties, indicating that radicals over a certain threshold did not have a decisive effect on the additional decomposition of precursors for a low impurity content in the films. An increase in RF plasma power could improve the interfacial stability due to an increase in radicals and ions in the plasma and the minimization of plasma-induced substrate damage by adopting remote plasma.

Continuous bioelectricity production and sustainable wastewater treatment in a microbial fuel cell constructed with non-catalyzed granular graphite electrodes and permeable membrane.

Oxygen has been so far addressed as the most preferable terminal electron acceptor in the cathodes of microbial fuel cells (MFCs). However, to reduce the oxygen reduction overpotential at the cathode surface, eco-unfriendly and costly catalysts have been commonly employed. Here, we pursued the possibility of using a high surface area electrode to reduce the cathodic reaction overpotential rather than the utilization of catalyzed materials. A dual chambered MFC reactor was designed with the use of graphite-granule electrodes and a permeable membrane. The performance of the reactor in terms of electricity generation and organic removal rate was examined under a continuous-feed manner. Results showed that the maximum volumetric power of 4.4+/-0.2 W/m(3) net anodic compartment (NAC) was obtained at a current density of 11+/-0.5 A/m(3) NAC. The power output was improved by increasing the electrolyte ionic strength. An acceptable effluent quality was attained when the organic loading rate (OLR) of 2 kgCOD/m(3) NAC d was applied. The organic removal rate seemed to be less affected by shock loading. Our system can be suggested as a promising approach to make MFC-based technology economically viable for wastewater treatment applications. This study shows that current generation can be remarkably improved in comparison with several other studies using a low-surface-area plain graphite electrode.