Three-dimensional integration of two-dimensional field-effect transistors.

In the field of semiconductors, three-dimensional (3D) integration not only enables packaging of more devices per unit area, referred to as 'More Moore'1 but also introduces multifunctionalities for 'More than Moore'2 technologies. Although silicon-based 3D integrated circuits are commercially available3-5, there is limited effort on 3D integration of emerging nanomaterials6,7 such as two-dimensional (2D) materials despite their unique functionalities7-10. Here we demonstrate (1) wafer-scale and monolithic two-tier 3D integration based on MoS2 with more than 10,000 field-effect transistors (FETs) in each tier; (2) three-tier 3D integration based on both MoS2 and WSe2 with about 500 FETs in each tier; and (3) two-tier 3D integration based on 200 scaled MoS2 FETs (channel length, LCH = 45 nm) in each tier. We also realize a 3D circuit and demonstrate multifunctional capabilities, including sensing and storage. We believe that our demonstrations will serve as the foundation for more sophisticated, highly dense and functionally divergent integrated circuits with a larger number of tiers integrated monolithically in the third dimension.

A bio-inspired visuotactile neuron for multisensory integration.

Multisensory integration is a salient feature of the brain which enables better and faster responses in comparison to unisensory integration, especially when the unisensory cues are weak. Specialized neurons that receive convergent input from two or more sensory modalities are responsible for such multisensory integration. Solid-state devices that can emulate the response of these multisensory neurons can advance neuromorphic computing and bridge the gap between artificial and natural intelligence. Here, we introduce an artificial visuotactile neuron based on the integration of a photosensitive monolayer MoS2 memtransistor and a triboelectric tactile sensor which minutely captures the three essential features of multisensory integration, namely, super-additive response, inverse effectiveness effect, and temporal congruency. We have also realized a circuit which can encode visuotactile information into digital spiking events, with probability of spiking determined by the strength of the visual and tactile cues. We believe that our comprehensive demonstration of bio-inspired and multisensory visuotactile neuron and spike encoding circuitry will advance the field of neuromorphic computing, which has thus far primarily focused on unisensory intelligence and information processing.

Ultrascaled Contacts to Monolayer MoS2 Field Effect Transistors.

Two-dimensional (2D) semiconductors possess promise for the development of field-effect transistors (FETs) at the ultimate scaling limit due to their strong gate electrostatics. However, proper FET scaling requires reduction of both channel length (LCH) and contact length (LC), the latter of which has remained a challenge due to increased current crowding at the nanoscale. Here, we investigate Au contacts to monolayer MoS2 FETs with LCH down to 100 nm and LC down to 20 nm to evaluate the impact of contact scaling on FET performance. Au contacts are found to display a ∼2.5× reduction in the ON-current, from 519 to 206 µA/µm, when LC is scaled from 300 to 20 nm. It is our belief that this study is warranted to ensure an accurate representation of contact effects at and beyond the technology nodes currently occupied by silicon.

Nanofiber-Based Substrate for a Triboelectric Nanogenerator: High-Performance Flexible Energy Fiber Mats.

Flexible and stretchable triboelectric nanogenerators (TENGs) are the next-generation systems for wearable and portable electronics. In this study, we have demonstrated an all nanofiber-based TENG for energy harvesting and biomechanical sensing applications. The TENG was prepared using the Forcespinning (FS) method to produce poly(vinylidene fluoride) (PVDF) and thermoplastic polyurethane (TPU) nanofiber (NF) membranes. The TPU nanofiber membranes were interfaced with a homogeneously sputtered gold nanofilm. The experimental characterization of the PVDF-TPU/Au NF-TENG revealed that surface interfaced with dispersed gold in a TPU fiber membrane produced a maximum open-circuit voltage of 254 V and a short-circuit current of 86 µA output at a 240 bpm load frequency, which was, respectively, 112 and 87% greater than bare PVDF-TPU NF-based TENG. All systems were composed of an active contact surface area of 3.2 × 2.5 cm2. Furthermore, the TENG was able to light up 75 LEDs (1.5 V of each) by the hand-tapping motion. The resistive load and capacitor test results exemplified a TENG offering a simple and high-performance self-chargeable device. Furthermore, we have tested the TENG's response for biomechanical movements at different frequencies, suggesting the TENG's potential to be also used as a cost-effective self-powered flexible body motion sensor.