ABSTRACT
We used a supercontinuum-based scanning white-light interferometer to characterize the oscillation of a MEMS device. The output of a commercially available supercontinuum light source (FiberWare Ilum II USB) was modulated to achieve stroboscopic operation. By synchronizing the modulation frequency of the source to the sample oscillation, dynamic 3-D profile measurements were recorded. These results were validated against those obtained with a white light LED setup. The measured maximum deflection of a 400×25×4 µm(3) microbridge driven with 0-6.8 V sinusoidal voltage at 10 Hz was 1.42±0.03 µm (supercontinuum), which agreed with the LED measurement. The method shows promise for characterization of high-frequency MEMS devices.
ABSTRACT
We demonstrate rapid and maskless wafer-scale fabrication of inorganic-organic hybrid nanopillars for microfluidic and mass spectrometric applications. The nanopillar features are transferred from a black silicon master to the hybrid material by UV-embossing with a composite stamp made of polydimethylsiloxane (PDMS)/hard-PDMS (h-PDMS), which allows accurate transfer of structures in the 100 nm size range. The nanopillar embossing process is extremely simple and well suited for cheap wafer-scale prototyping, as the process does not require expensive masks or stamps and even works with a standard office lamp as the exposure source. The pillars can also be fabricated on a wide variety of substrates because the hybrid material is solvent-free. The use of the hybrid nanopillars as a hydrophobic/philic platforms and as sample plates in surface assisted laser desorption ionization mass spectrometry is demonstrated.
