Deep Learning Based Multiresponse Optimization Methodology for Dual-Axis MEMS Accelerometer.

This paper presents a deep neural network (DNN) based design optimization methodology for dual-axis microelectromechanical systems (MEMS) capacitive accelerometer. The proposed methodology considers the geometric design parameters and operating conditions of the MEMS accelerometer as input parameters and allows to analyze the effect of the individual design parameters on the output responses of the sensor using a single model. Moreover, a DNN-based model allows to simultaneously optimize the multiple output responses of the MEMS accelerometers in an efficient manner. The efficiency of the proposed DNN-based optimization model is compared with the design of the computer experiments (DACE) based multiresponse optimization methodology presented in the Literature, which showed a better performance in terms of two output performance metrics, i.e., mean absolute error (MAE) and root mean squared error (RMSE).

Mixed Dimensional ZnO/WSe2 Piezo-gated Transistor with Active Millinewton Force Sensing.

This work demonstrates a mixed-dimensional piezoelectric-gated transistor in the microscale that could be used as a millinewton force sensor. The force-sensing transistor consists of 1D piezoelectric zinc oxide (ZnO) nanorods (NRs) as the gate control and multilayer tungsten diselenide (WSe2) as the transistor channel. The applied mechanical force on piezoelectric NRs can induce a drain-source current change (ΔIds) on the WSe2 channel. The different doping types of the WSe2 channel have been found to lead to different directions of ΔIds. The pressure from the calibration weight of 5 g has been observed to result in an ∼30% Ids change for ZnO NRs on the p-type doped WSe2 device and an ∼-10% Ids change for the device with an n-type doped WSe2. The outcome of this work would be useful for applications in future human-machine interfaces and smart biomedical tools.

A Soft Multi-Axis High Force Range Magnetic Tactile Sensor for Force Feedback in Robotic Surgical Systems.

This paper presents a multi-axis low-cost soft magnetic tactile sensor with a high force range for force feedback in robotic surgical systems. The proposed sensor is designed to fully decouple the output response for normal, shear and angular forces. The proposed sensor is fabricated using rapid prototyping techniques and utilizes Neodymium magnets embedded in an elastomer over Hall sensors such that their displacement produces a voltage change that can be used to calculate the applied force. The initial spacing between the magnets and the Hall sensors is optimized to achieve a large displacement range using finite element method (FEM) simulations. The experimental characterization of the proposed sensor is performed for applied force in normal, shear and 45° angular direction. The force sensitivity of the proposed sensor in normal, shear and angular directions is 16 mV/N, 30 mV/N and 81 mV/N, respectively, with minimum mechanical crosstalk. The force range for the normal, shear and angular direction is obtained as 0-20 N, 0-3.5 N and 0-1.5 N, respectively. The proposed sensor shows a perfectly linear behavior and a low hysteresis error of 8.3%, making it suitable for tactile sensing and biomedical applications. The effect of the material properties of the elastomer on force ranges and sensitivity values of the proposed sensor is also discussed.

A Systematic Design Optimization Approach for Multiphysics MEMS Devices Based on Combined Computer Experiments and Gaussian Process Modelling.

This paper presents a systematic and efficient design approach for the two degree-of-freedom (2-DoF) capacitive microelectromechanical systems (MEMS) accelerometer by using combined design and analysis of computer experiments (DACE) and Gaussian process (GP) modelling. Multiple output responses of the MEMS accelerometer including natural frequency, proof mass displacement, pull-in voltage, capacitance change, and Brownian noise equivalent acceleration (BNEA) are optimized simultaneously with respect to the geometric design parameters, environmental conditions, and microfabrication process constraints. The sampling design space is created using DACE based Latin hypercube sampling (LHS) technique and corresponding output responses are obtained using multiphysics coupled field electro-thermal-structural interaction based finite element method (FEM) simulations. The metamodels for the individual output responses are obtained using statistical GP analysis. The developed metamodels not only allowed to analyze the effect of individual design parameters on an output response, but to also study the interaction of the design parameters. An objective function, considering the performance requirements of the MEMS accelerometer, is defined and simultaneous multi-objective optimization of the output responses, with respect to the design parameters, is carried out by using a combined gradient descent algorithm and desirability function approach. The accuracy of the optimization prediction is validated using FEM simulations. The behavioral model of the final optimized MEMS accelerometer design is integrated with the readout electronics in the simulation environment and voltage sensitivity is obtained. The results show that the combined DACE and GP based design methodology can be an efficient technique for the design space exploration and optimization of multiphysics MEMS devices at the design phase of their development cycle.

Integration of ZnO nanorods with MOS capacitor for self-powered force sensors and nanogenerators.

In this work, we present a novel force-sensing device with zinc oxide nanorods (ZnO NRs) integrated with a metal-oxide-semiconductor (MOS) capacitor and encapsulated with Kapton tape. The details of the fabrication process and working principle of the integrated ZnO NRs-MOS capacitor as a force sensor and nanogenerator have been discussed. The fabricated ZnO-MOS device is tested for both the open-circuit and resistor-connected mode. For an input force in the range of 1-32 N, the open-circuit output voltage of the device is measured to be in the range of 60-100 mV for different device configurations. In the resistor-connected mode, the maximum output power of 0.6 pW is obtained with a 1 MΩ external resistor and input force of 8 N. In addition, the influence of different seed layers (Ag and ZnO) and the patterning geometry of the ZnO nanorods on the output voltage of ZnO-MOS device have been investigated by experiments. An equivalent circuit model of the device has been developed to study the influence of the geometry of ZnO NRs and Kapton tape on the ZnO-MOS device voltage output. This study could be an example of integrating piezoelectric nanomaterials on traditional electronic devices and could inspire novel designs and fabrication methods for nanoscale self-powered force sensors and nanogenerators.

Gradient-based impedance synthesis for breast and lung cancer cell screening deploying planar and nano-structured electrodes.

World Health Organization articulated 9.8 million casualties globally in 2018 due to cancer. Cancer, as the world's second most fatal disease, can be recuperated well if diagnosed at an early stage. In this work, a gradient-based impedance synthesis of normal and cancerous cells of breast and lungs, is demonstrated numerically for early-stage cancer detection. Low-voltage single-cell level examination is employed for indomitable diagnosis. MCF-7 and MCF-10A are utilized as breast cancer and breast normal cells, respectively; likewise, SK-MES and NL-20 are utilized as lung cancer and lung normal cell. Pre-examination numerical setup validity ensured with multiple test regimes. Micro-scaled planar and nano-structured electrodes are employed individually to witness the effect of the electrode's structure during electrical impedance examination of cancer and non-cancer cell. Frequency range, at which differential impedance effect is found detectable, for breast and lung cancer cell pairs is determined to be 107 Hz and 108 Hz, respectively. By surpassing the conventional impedance spectroscopy with tedious data fitting formalities, the gradient synthesis technique for cancer detection is introduced. The gradient synthesis for cancer detection is found independent of electrode shape effect. Gradient for breast cancer cell is found to be 2 times greater than the normal breast cell while for lung cancer cell it is found to be 1.5 times greater than the normal lung cell. Our results suggest that as the frequency of applied electrical stimulus increases, impedance of cancerous cell falls at the rate almost double than its counterpart normal cell. This work provides a theoretical basis for further experimental exploration of gradient-based impedance synthesis in cancer therapy and serves as a design tool for performance optimization. Figure 1 (a) Represents electrical Impedance analysis of breast normal cell MCF-10A and breast cancer cell MCF-7 using micro-scaled planar and nano-structured electrodes. (b) Gradient impedance synthesis performed, for breast normal cell (MCF-10A) and breast cancer cell (MCF-7) likewise for lungs normal cell (NL-20) and lungs cancer cell (SK-MES), which assures clear differential effect for cancer screening. Surpassing the conventional and tedious data fitting impedance spectroscopies, a novel gradient-based impedance spectroscopy for early cancer detection is introduced. It clearly detects cancer without any data fitting formalities to find parameter of identification. Planar and nano structure electrodes are used to witness the impact of electrode shape on cell impedance. Breast normal MCF-10A and cancer cell MCF-7 as well as lungs normal NL-20 and cancer cell SK-MES are examined to reflect the efficacy of our work. Single cell level examination is performed for authenticated results.

A Low-g MEMS Accelerometer with High Sensitivity, Low Nonlinearity and Large Dynamic Range Based on Mode-Localization of 3-DoF Weakly Coupled Resonators.

This paper presents a new design of microelectromechanical systems (MEMS) based low-g accelerometer utilizing mode-localization effect in the three degree-of-freedom (3-DoF) weakly coupled MEMS resonators. Two sets of the 3-DoF mechanically coupled resonators are used on either side of the single proof mass and difference in the amplitude ratio of two resonator sets is considered as an output metric for the input acceleration measurement. The proof mass is electrostatically coupled to the perturbation resonators and for the sensitivity and input dynamic range tuning of MEMS accelerometer, electrostatic electrodes are used with each resonator in two sets of 3-DoF coupled resonators. The MEMS accelerometer is designed considering the foundry process constraints of silicon-on-insulator multi-user MEMS processes (SOIMUMPs). The performance of the MEMS accelerometer is analyzed through finite-element-method (FEM) based simulations. The sensitivity of the MEMS accelerometer in terms of amplitude ratio difference is obtained as 10.61/g for an input acceleration range of ±2 g with thermomechanical noise based resolution of 0.22 µµg/Hz and nonlinearity less than 0.5%.

Microfabrication Process-Driven Design, FEM Analysis and System Modeling of 3-DoF Drive Mode and 2-DoF Sense Mode Thermally Stable Non-Resonant MEMS Gyroscope.

This paper presents microfabrication process-driven design of a multi-degree of freedom (multi-DoF) non-resonant electrostatic microelectromechanical systems (MEMS) gyroscope by considering the design constraints of commercially available low-cost and widely-used silicon-on-insulator multi-user MEMS processes (SOIMUMPs), with silicon as a structural material. The proposed design consists of a 3-DoF drive mode oscillator with the concept of addition of a collider mass which transmits energy from the drive mass to the passive sense mass. In the sense direction, 2-DoF sense mode oscillator is used to achieve dynamically-amplified displacement in the sense mass. A detailed analytical model for the dynamic response of MEMS gyroscope is presented and performance characteristics are validated through finite element method (FEM)-based simulations. The effect of operating air pressure and temperature variations on the air damping and resulting dynamic response is analyzed. The thermal stability of the design and corresponding effect on the mechanical and capacitive sensitivity, for an operating temperature range of -40 °C to 100 °C, is presented. The results showed that the proposed design is thermally stable, robust to environmental variations, and process tolerances with a wide operational bandwidth and high sensitivity. Moreover, a system-level model of the proposed gyroscope and its integration with the sensor electronics is presented to estimate the voltage sensitivity under the constraints of the readout electronic circuit.