Evidencing the nonlinearity independence of resolution in femtosecond laser ablation.

To overcome the resolution limits in laser processing technologies, it is highly attractive to translate concepts used in advanced optical microscopy. In this prospect, the nonlinear nature of absorption in dielectrics with femtosecond lasers is recurrently taken as a direct advantage in an analogous way to excitation in multiphoton microscopy. However, we establish that no direct benefit in resolution can be expected when laser ablation is observed. We explore widely different nonlinear regimes using ultrashort pulses at different wavelengths (1550 and 515 nm) and target materials of various bandgaps (3.8-8.8 eV). We find in the experiments that the shapes of all ablation features correspond to a one-to-one mapping of the beam contours at a strict threshold intensity. The nonlinearity-independent response shows that the incorporation of extreme UV should provide a direct route to the nanoscale resolutions routinely achieved in lithography.

Truncated Gaussian-Bessel beams for short-pulse processing of small-aspect-ratio micro-channels in dielectrics.

In order to control the length of micro-channels ablated at the surface of dielectrics, we use annular filtering apertures for tailoring the depth of focus of micrometric Gaussian-Bessel beams. We identify experimentally and numerically the appropriate beam truncation that promotes a smooth axial distribution of intensity with a small elongation, suitable for processing micro-channels of small aspect ratio. Single-shot channel fabrication is demonstrated on the front surface of a fused silica sample, with sub-micron diameter, high-quality opening, and depth of few micrometers, using 1 ps low-energy (< 0.45 µJ) pulse. Finally, we realize 10 × 10 matrices of densely packed channels with aspect ratio ~5 and a spatial period down to 1.5 µm, as a prospective demonstration of direct laser fabrication of 2D photonic-crystal structures.

Writing waveguides inside monolithic crystalline silicon with nanosecond laser pulses.

Direct three-dimensional (3D) laser writing of waveguides is highly advanced in a wide range of bandgap materials, but has no equivalent in silicon so far. We show that nanosecond laser single-pass irradiation is capable of producing channel micro-modifications deep into crystalline silicon. With an appropriate shot overlap, a relative change of the refractive index exceeding 10-3 is obtained without apparent nonuniformity at the micrometer scale. Despite the remaining challenge of propagation losses, we show that the created structures form, to the best of our knowledge, the first laser-written waveguides in the bulk of monolithic silicon samples. This paves the way toward the capability of producing 3D architectures for the rapidly growing field of silicon photonics.

Bulk laser-induced damage threshold of titanium-doped sapphire crystals.

The bulk laser-induced damage threshold (LIDT) fluence of Ti:sapphire is determined under single-pulse irradiation from the femtosecond to nanosecond temporal regimes in the visible and near-infrared spectral domains. In the range of explored laser conditions, the LIDT fluence increases with both pulse duration and wavelength. The results are also compared to laser interaction with sapphire samples and show an increased resistance to laser damage when the material is doped with Ti(3+) ions. These conclusions are of interest for robust operation of high-peak-power femtosecond Ti:sapphire laser chains.

Surface ablation of corneal stroma with few-cycle laser pulses at 800 nm.

We report measurements of crater diameter and surface ablation threshold as a function of laser fluence in porcine corneal stroma and fused silica with pulse durations of 7 fs (2.7 optical cycles), 30 fs and 100 fs at 800 nm. For laser pulses with Gaussian radial intensity profile, we show experimentally that the square of the crater diameter is a linear function of the logarithm of the fluence in fused silica, while it is closer to a linear function of the fluence in corneal stroma. Extrapolating these relations to zero diameter indicates that for both media the minimum fluence required for surface ablation is reduced with shorter pulse duration. A simple theoretical model suggests that this effect is due to a more significant contribution of photoionization as the laser pulse duration shortens.

[New approach for determining the damage level of biological tissues using femtosecond laser: advantages and application to corneal surgery]. / Nouvelle approche de détermination du seuil d'endommagement de tissus biologiques par laser femtoseconde: intérêt et application à la chirurgie de la cornée.

INTRODUCTION: Optimization of femtosecond laser characteristics in corneal surgery is still needed to improve clinical results. In this study, we describe an original characterization technique able to measure laser damage of corneal tissues precisely and to provide complementary physical results on the laser-matter interaction. METHOD: A femtosecond laser was used to damage corneas not suitable for graft. The epithelium and the Bowman layer are exposed to a set of different single-shot fixed laser fluences. Optical microscopy can determine the probability of laser damage on the corneal surface. The high damage threshold (minimum fluence systematically damaging the cornea) roughly fixes the operating laser fluence conditions, while the low damage threshold sets the maximum laser fluence level preserving tissue integrity (safety level). RESULTS: We precisely evaluate the damage fluence threshold of a tissue, using a statistical approach coupled with optical microscopy analysis. This technique gives essential information on laser-tissue interaction with a high rate of confidence. For corneal epithelium and the Bowman layer, we determine the maximum laser fluence level preserving tissue integrity (safety level) and the minimum fluence level systematically damaging the tissue. High and low threshold fluences of epithelium and the Bowman layers are (5.6 ± 0.4 J/cm(2); 2.7 ± 0.1 J/cm(2)), and (7.1 ± 1.1 J/cm(2); 3.4 ± 0.1 J/cm(2)), respectively. CONCLUSION: These data constitute determinant parameters for clinical applications, since they determine a working window providing the minimal effective irradiation dose that is mandatory for the development of high-quality laser-cutting surgery processes with minimized side effects.