Highly Stable Low-Strain Flexible Sensors Based on Gold Nanoparticles/Silica Nanohelices.

Flexible strain sensors based on nanoparticle (NP) arrays show great potential for future applications such as electronic skin, flexible touchscreens, healthcare sensors, and robotics. However, even though these sensors can exhibit high sensitivity, they are usually not very stable under mechanical cycling and often exhibit large hysteresis, making them unsuitable for practical applications. In this work, strain sensors based on silica nanohelix (NH) arrays grafted with gold nanoparticles (AuNPs) can overcome these critical aspects. These 10 nm AuNPs are functionalized with mercaptopropionic acid (MPA) and different ratios of thiol-polyethylene glycol-carboxylic acid (HS-PEG7-COOH) to optimize the colloidal stability of the resulting NH@AuNPs nanocomposite suspensions, control their aggregation state, and tune the thickness of the insulating layer. They are then grafted covalently onto the surface of the NHs by chemical coupling. These nanomaterials exhibit a well-defined arrangement of AuNPs, which follows the helicity of the silica template. The modified NHs are then aligned by dielectrophoresis (DEP) between interdigitated electrodes on a flexible substrate. The flexibility, stability, and especially sensitivity of these sensors are then characterized by electromechanical measurements and scanning electron microscopy observations. These strain sensors based on NH@AuNPs nanocomposites are much more stable than those containing only nanoparticles and exhibit significantly reduced hysteresis and high sensitivity at very slight strains. They can retain their sensitivity even after 2 million consecutive cycles with virtually unchanged responsiveness. These improved performances come from their mechanical stability and the use of nanohelices as stable mechanical templates.

Magnetophoresis-Assisted Capillary Assembly: A Versatile Approach for Fabricating Tailored 3D Magnetic Supercrystals.

The fabrication and integration of sub-millimeter magnetic materials into predefined circuits is of major importance for the realization of portable devices designed for telecommunications, automotive, biomedical, and space applications but remains highly challenging. We report here a versatile approach for the fabrication and direct integration of nanostructured magnetic materials of controlled shaped at specific locations onto silicon substrates. The magnetophoresis-assisted capillary assembly of magnetic nanoparticles, either spherical or anisotropic, leads to the fabrication of high-performance Co-based permanent magnets and Fe-based supercrystals. Integrated sub-millimeter magnets as well as millimeter self-standing magnets exhibiting magnetic properties competing with NdFeB-based composites were obtained through this cost- and time-efficient process. The proof-of-concept of electromagnetic actuation of a micro-electromechanical system cantilever by means of these supercrystals highlights their potentiality as efficient integrated magnetic materials within nomadic devices.

Lead zirconate titanate nanoscale patterning by ultraviolet-based lithography lift-off technique for nano-electromechanical system applications.

The advantage of using lead zirconate titanate (PbZr(0.54)Ti(0.46)O(3)) ceramics as an active material in nanoelectromechanical systems (NEMS) comes from its relatively high piezoelectric coefficients. However, its integration within a technological process is limited by the difficulty of structuring this material with submicrometer resolution at the wafer scale. In this work, we develop a specific patterning method based on optical lithography coupled with a dual-layer resist process. The main objective is to obtain sub-micrometer features by lifting off a 100-nm-thick PZT layer while preserving the material's piezoelectric properties. A subsequent result of the developed method is the ability to stack several layers with a lateral resolution of few tens of nanometers, which is mandatory for the fabrication of NEMS with integrated actuation and read-out capabilities.

Integrative technology-based approach of microelectromechanical systems (MEMS) for biosensing applications.

In this work we simultaneously aim at addressing the design and fabrication of microelectromechanical systems (MEMS) for biological applications bearing actuation and readout capabilities together with adapted tools dedicated to surface functionalization at the microscale. The biosensing platform is based on arrays of silicon micromembranes with piezoelectric actuation and piezoresistive read-out capabilities. The detection of the cytochrome C protein using molecularly imprinted polymers (MIPs) as functional layer is demonstrated. The adapted functionalization tool specifically developed to match the micromembranes' platform is an array of silicon cantilevers incorporating precise force sensors for the trim and force measurements during deposition of biological materials onto the sensors' active area. In either case, associated analog electronics is specifically realized to deal with specific signals treatment fed through the MEMS-based devices.

Effect of non-ideal clamping shape on the resonance frequencies of silicon nanocantilevers.

In this paper, we investigate the effects of non-ideal clamping shapes on the dynamic behavior of silicon nanocantilevers. We fabricated silicon nanocantilevers using silicon on insulator (SOI) wafers by employing stepper ultraviolet (UV) lithography, which permits a resolution of under 100 nm. The nanocantilevers were driven by electrostatic force inside a scanning electron microscope (SEM). Both lateral and out-of-plane resonance frequencies were visually detected with the SEM. Next, we discuss overhanging of the cantilever support and curvature at the clamping point in the silicon nanocantilevers, which generally arises in the fabrication process. We found that the fundamental out-of-plane frequency of a realistically clamped cantilever is always lower than that for a perfectly clamped cantilever, and depends on the cantilever width and the geometry of the clamping point structure. Using simulation with the finite-elements method, we demonstrate that this discrepancy is attributed to the particular geometry of the clamping point (non-zero joining curvatures and a flexible overhanging) that is obtained in the fabrication process. The influence of the material orthotropy is also investigated and is shown to be negligible.