1.
Rev Sci Instrum
; 81(2): 02B305, 2010 Feb.
Article
in English
| MEDLINE
| ID: mdl-20192428
ABSTRACT
This paper presents the results of experimental studies of a new design of discharge system using a self-heated hollow cathode. The discharge system offers certain advantages that are attractive for use in high-dose ion implantation, plasma generators, and plasma electron sources.