ABSTRACT
This study introduces a novel image capture and lighting techniques using a cutting-edge hybrid MEMS scanner system designed for compact microscopic imaging. The scanner comprises a tapered optical fiber waveguide and innovative aerosol-jet printed PZT (lead zirconate titanate) bimorph push-pull actuators on a stainless-steel substrate, effectively addressing issues that are commonly associated with PZT on silicon substrates such as fracture and layer separation. By leveraging nonlinear vibration, the scanner achieves a spiral scan pattern from a single signal input, in addition to the expected two-dimensional scanning and target illumination from two phase-shifted inputs. This capability is further enhanced by a novel process to taper the optical fiber, which reduces illumination scattering and tunes the fiber to the resonant frequencies of the scanner. The precisely tapered tip enables large fields of view while maintaining independent 2-axis scanning through one-degree-of-freedom actuation. Experimental validation showcases the successful generation of a spiral scan pattern with a 60 µm diameter scan area and a 10 Hz frame rate, effectively reconstructing scanned images of 5 µm lines, cross patterns (15 µm in length with a 5 µm gap), and structures of a Psychodidae wing.
ABSTRACT
The function of electrowetting liquid lenses is expanding beyond tunable focal length lensing. Recently, single and multi-mode oscillations on the meniscus profile of two non-miscible liquids have been used for optical phase modulation and fast focal length sweeping. To achieve a user-defined phase modulation, a prediction model of oscillation patterns and amplitudes is needed. We present digital holographic interferometry (DHI) measurements of oscillation patterns and amplitudes on a 5.8mm aperture lens up to 160 Hz, including frequency responses from 26-100 Hz. We discuss using Bessel function and Legendre polynomial models for oscillations on a conical frustum shaped electrowetting lens.
