ABSTRACT
Microfluidic devices are finding increasing application as analytical systems, biomedical devices, tools for chemistry and biochemistry, and systems for fundamental research. Conventional methods of fabricating microfluidic devices have centered on etching in glass and silicon. Fabrication of microfluidic devices in poly(dimethylsiloxane) (PDMS) by soft lithography provides faster, less expensive routes than these conventional methods to devices that handle aqueous solutions. These soft-lithographic methods are based on rapid prototyping and replica molding and are more accessible to chemists and biologists working under benchtop conditions than are the microelectronics-derived methods because, in soft lithography, devices do not need to be fabricated in a cleanroom. This paper describes devices fabricated in PDMS for separations, patterning of biological and nonbiological material, and components for integrated systems.
Subject(s)
Chemistry Techniques, Analytical/methods , Dimethylpolysiloxanes , Equipment and Supplies , Silicones , Animals , HumansABSTRACT
We demonstrate the formation, in a single process step, of periodic arrays of features of surface relief with submicrometer lateral dimensions in hybrid organic and inorganic solgel glasses by using elastomeric molding techniques. Lasers formed with molded photonic crystal resonators that consist of triangular, square, and honeycomb lattices of cylindrical posts and holes show emission spectra and lasing thresholds that are similar to devices formed by conventional high-resolution photolithographic patterning of thick layers of thermally grown oxide.
ABSTRACT
This paper describes a procedure that makes it possible to design and fabricate (including sealing) microfluidic systems in an elastomeric material [Formula: see text] poly(dimethylsiloxane) (PDMS) [Formula: see text] in less than 24 h. A network of microfluidic channels (with width >20 µm) is designed in a CAD program. This design is converted into a transparency by a high-resolution printer; this transparency is used as a mask in photolithography to create a master in positive relief photoresist. PDMS cast against the master yields a polymeric replica containing a network of channels. The surface of this replica, and that of a flat slab of PDMS, are oxidized in an oxygen plasma. These oxidized surfaces seal tightly and irreversibly when brought into conformal contact. Oxidized PDMS also seals irreversibly to other materials used in microfluidic systems, such as glass, silicon, silicon oxide, and oxidized polystyrene; a number of substrates for devices are, therefore, practical options. Oxidation of the PDMS has the additional advantage that it yields channels whose walls are negatively charged when in contact with neutral and basic aqueous solutions; these channels support electroosmotic pumping and can be filled easily with liquids with high surface energies (especially water). The performance of microfluidic systems prepared using this rapid prototyping technique has been evaluated by fabricating a miniaturized capillary electrophoresis system. Amino acids, charge ladders of positively and negatively charged proteins, and DNA fragments were separated in aqueous solutions with this system with resolution comparable to that obtained using fused silica capillaries.
ABSTRACT
We describe a class of devices based on elastomeric optical phase gratings. These devices operate by reversibly controlling the phase of transmitted or reflected light by mechanical compression of the transparent elastomer. An optical modulator and an element in an optical display demonstrate two possible applications.
ABSTRACT
A photothermal detector consisting of a relief grating on the surface of an elastomer was fabricated and characterized. The detector has a sensitivity of the order of microwatts per square millimeter and has rise and fall times of the order of tens of seconds. Numerical and analytical modeling account for the behavior of the detector.
