Design and Characterization of a Planar Micro-Conveyor Device Based on Cooperative Legged Piezoelectric MEMS Resonators.

This paper reports the design, fabrication, and performance of a hybrid piezoelectric planar micro-conveyor based on Micro-Electromechanical Systems (MEMS) bridge resonators and featuring 3D-printed vertical legs. The device includes two cooperating silicon plate resonators with an area of 5 × 1 mm2, actuated by an integrated aluminum-nitride (AlN) piezoelectric thin film. An optimally designed array of 3D-printed projection legs was attached to the plates, to convert the standing-wave (SW) vertical vibrations into horizontal rotations or translations of the supported slider. An open-loop control strategy based on burst-type driving signals, with different numbers of sinusoidal cycles applied on each of the resonators, allowed the cooperation of the two bridges to set up prescribed trajectories of small flat objects, up to 100 mg, with positional accuracy below 100 nm and speeds up to 20 mm/s, by differential drive actuation. The effect of the leg tip and sliders' surface finish on the conveyor performance was investigated, suggesting that further optimizations may be possible by modifying the tribological properties. Finally, the application of the micro-conveyor as a reconfigurable electronic system, driven by a preprogrammed sequence of signals, was demonstrated by delivering some surface-mount technology (SMD) parts lying on a 65 mg glass slider.

Bidirectional Linear Motion by Travelling Waves on Legged Piezoelectric Microfabricated Plates.

This paper reports the design, fabrication and performance of MEMS-based piezoelectric bidirectional conveyors featuring 3D printed legs, driven by linear travelling waves (TW). The structures consisted of an aluminium-nitride (AlN) piezoelectric film on top of millimetre-sized rectangular thin silicon bridges and two electrode patches. The position and size of the patches were analytically optimised for TW generation in three frequency ranges: 19, 112 and 420 kHz, by the proper combination of two contiguous flexural modes. After fabrication, the generated TW were characterized by means of Laser-Doppler vibrometry to obtain the relevant tables of merit, such as the standing wave ratio and the average amplitude. The experimental results agreed with the simulation, showing the generation of a TW with an amplitude as high as 6 nm/V and a standing wave ratio as low as 1.46 for a device working at 19.3 kHz. The applicability of the fabricated linear actuator device as a conveyor was investigated. Its kinetic performance was studied with sliders of different mass, being able to carry a 35 mg silicon slider, 18 times its weight, with 6 V of continuous sinusoidal excitation and a speed of 0.65 mm/s. A lighter slider, weighting only 3 mg, reached a mean speed of 1.7 mm/s at 6 V. In addition, by applying a burst sinusoidal excitation comprising 10 cycles, the TW generated in the bridge surface was able to move a 23 mg slider in discrete steps of 70 nm, in both directions, which is a promising result for a TW piezoelectric actuator of this size.

Generation of Linear Traveling Waves in Piezoelectric Plates in Air and Liquid.

A micro- to milli-sized linear traveling wave (TW) actuator fabricated with microelectromechanical systems (MEMS) technology is demonstrated. The device is a silicon cantilever actuated by piezoelectric aluminum nitride. Specifically designed top electrodes allow the generation of TWs at different frequencies, in air and liquid, by combining two neighboring resonant modes. This approach was supported by analytical calculations, and different TWs were measured on the same plate by laser Doppler vibrometry. Numerical simulations were also carried out and compared with the measurements in air, validating the wave features. A standing wave ratio as low as 1.45 was achieved in air, with a phase velocity of 652 m/s and a peak horizontal velocity on the device surface of 124 µm/s for a driving signal of 1 V at 921.9 kHz. The results show the potential of this kind of actuator for locomotion applications in contact with surfaces or under immersion in liquid.

A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity⁻Density Sensors.

Cantilever resonators based on the roof tile-shaped modes have recently demonstrated their suitability for liquid media monitoring applications. The early studies have shown that certain combinations of dimensions and order of the mode can maximize the Q-factor, what might suggest a competition between two mechanisms of losses with different geometrical dependence. To provide more insight, a comprehensive study of the Q-factor and the resonant frequency of these modes in microcantilever resonators with lengths and widths between 250 and 3000 µm and thicknesses between 10 and 60 µm is presented. These modes can be efficiently excited by a thin piezoelectric AlN film and a properly designed top electrode layout. The electrical and optical characterization of the resonators are performed in liquid media and then their performance is evaluated in terms of quality factor and resonant frequency. A quality factor as high as 140 was measured in isopropanol for a 1000 × 900 × 10 µm³ cantilever oscillating in the 11th order roof tile-shaped mode at 4 MHz; density and viscosity resolutions of 10-6 g/mL and 10-4 mPa·s, respectively are estimated for a geometrically optimized cantilever resonating below 1 MHz.

Periodic nanostructures on Si(100) surfaces generated by high-repetition rate sub-15 fs pulsed near-infrared laser light.

Nanoscale rifts and ripples at a periodicity of 130 nm were generated on Si(100) surfaces immersed in water using tightly focused 800 nm 12 fs pulsed 85 MHz laser light at subnanojoule pulse energies. At radiant exposure close to the ablation threshold rifts were typically 20-50 nm in width and 70 nm in depth running perpendicular to the laser polarization. On increase of the irradiance, the rifts broadened and formed periodic ripples, whereas at highest exposure, a random nanoporous surface topology emerged. Rift and ripple formation is explained by laser-induced standing surface plasma waves, which result in periodic variation of dissipation and ablation.

Shear strength of the human lumbar spine.

BACKGROUND: Shear loading is recognised as a risk factor for lower back pain. Previous studies of shear loading have either not addressed the influence of age, bone mineral density, axial height loss due to creep or were performed on animal specimens. METHODS: Intact human lumbar motion segments (L2-3) were tested in shear using a modified materials testing machine, while immersed in a Ringer bath at 37°C. Vertebrae were rigidly embedded in neutral posture (0° flexion) and subjected to a constant axial compression load of 500 N. Shear was applied to three groups: 'Young-No-Creep' (20-42 years), 'Young-Creep' (22-38 years, creep 1000 N for 1h) and 'Old-No-Creep' (44-64 years). Failure was induced by up to 15 mm of anterior shear displacement at a rate of 0.5mm/s. The trabecular and apophyseal joint bone mineral densities were evaluated from computed tomography images of the intact lumbar spines. FINDINGS: Peak shear force correlated positively with trabecular bone mineral density for specimens tested without axial creep. No significant differences were observed with respect to age. During shear overload specimens increased in height in the axial direction. INTERPRETATION: Trabecular bone mineral density can be used to predict the peak force of lumbar spine in shear in neutral posture.

Sub-100 nm structuring of indium-tin-oxide thin films by sub-15 femtosecond pulsed near-infrared laser light.

In magnetron sputtered indium-tin-oxide thin films of varying oxygen content, nanostructures were formed using tightly focused high-repetition rate near-infrared sub-15 femtosecond pulsed laser light. At radiant exposure well beyond the ablation threshold, cuts of 280-350 nm in width were generated. Illumination close to the ablation threshold resulted in periodic cuts of typically 20 nm in width at periodicities between 50 nm and 180 nm, as well as single sub-20 nm cuts. Subthreshold exposure, in combination with hydrochloric acid etching, yielded nanowires of 50 nm minimum lateral dimensions.

Seat-to-head transfer function of seated men--determination with single and three axis excitations at different magnitudes.

Most research has investigated the seat-to-head transmissibility during single-axis excitations. Associations between head accelerations and discomfort or effects on vision were reported. Possible differences between the seat-to-head transmissibility determined during different vibration magnitudes with a variable number of excitation axes have not been systematically examined. An experimental study was performed with 8 male subjects sitting on a rigid seat with hands on a support. They were exposed to random whole-body vibration (E1=0.45 ms(-2), E2=0.90 ms(-2), and E3=1.80 ms(-2)) to single- and three-axis vibration. All translational and rotational seat-to-head transmissibilities were calculated. The effects of the factors vibration magnitude and number of axes on the peak modulus and frequency of the seat-to-head transmissibilities were tested. In general the head motions follow constant pattern. These pattern of head motions comprise a combination of rotational and translational shares of transmissions, i.e. the curves show a dependence on the factors 'vibration magnitude' and 'number of vibration axes'. Mechanical properties of the soft tissue, relative motions of body parts, and muscle reactions were supposed to cause the nonlinearities of the head. Future research should consider effects of multi-axis vibration, if conclusions shall be drawn for the evaluation of possible health effects and model validations.

Examination of the frequency-weighting curve for accelerations measured on the seat and at the surface supporting the feet during horizontal whole-body vibrations in x- and y-directions.

In a laboratory experiment, six male subjects were exposed to sinusoidal (0.8, 1.6, 3.15, 6.3 and 12.5 Hz) or random octave band-width white noise (mid-frequencies identical to those of the sinusoidal vibrations) whole-body vibration in x- or y-directions, at six levels of magnitude (0.4, 0.8 and 1.6 m/s(2) r.m.s. non- and frequency-weighted) with two repetitions. In order to examine time effects, additional reference stimuli were used. Each subject was exposed to these 304 exposure conditions with a duration of about one minute on four different days (76 exposures per day). The subject's sensations of vibration intensity and vibration comfort were obtained by cross modality matching (length of a line). The subjects sat with an upright posture on a hard seat without backrest, hands on the thighs. The derived equivalent sensation contours suggest an underestimation of the sensation varying in extent from 2 dB to 8 dB at 1.6, 3.15, 6.3 and 12.5 Hz in comparison with the reference frequency 0.8 Hz for both types and directions of signals by the current evaluation methods according to ISO 2631-1 with the most pronounced effects revealed at the frequencies 3.15 and 6.3 Hz and at lower intensities (overall vibration total value a(ov) around 0.48 m/s(2) to 0.8 m/s(2) at the reference frequency 0.8 Hz).

On the relationship between whole-body vibration exposure and spinal health risk.

A conceptual framework provides the possibility to identify factors determining the effects of whole-body vibration (WBV) on the spine and the internal stress-strain relationships. Epidemiological studies were critically evaluated with respect to their significance for the derivation of quantitative exposure-effect relationships. The approach of deriving such relationships from a comparison with self-generated accelerations during daily activities was considered as unsuited. Trunk muscle activity and control with apparently identical accelerations of body parts during self-generated and forced motions differ widely. Simple biodynamic models coupled with experimental in vivo and in vitro data permitted a preliminary deduction of quantitative relationships between WBV and spinal health with the consideration of individual factors and exposure conditions. Examples of anatomy-based verified finite element models and their application are provided. Such models are considered as a very promising instrument. They can be used to assess quantitatively preventive measures and design. Future research needs concern the examination of (1) the nonlinearity of biodynamics, (2) the effects of WBV in x- and y-axes, (3) the strength of the spine for shear, (4) the contact parameters between the seat and man, (5) the significance of postures and muscle activity, and (6) material properties of spinal structures.