Complex 10-nm resolution nanogap and nanowire geometries for plasmonic metasurface miniaturization.

Emerging electromagnetic inverse design methods have pushed nanofabrication methods to their limits to extract maximum performance from plasmonic aperture-based metasurfaces. Using plasmonic metamaterial-lined apertures as an example, we demonstrate the importance of fine nanowire and nanogap features for achieving strong miniaturization of plasmonic nanoapertures. Metamaterial-lined nanoapertures are miniaturized over bowtie nanoapertures with identical minimum feature sizes by a factor of 25% without loss of field enhancement. We show that features as small as 10 nm can be reliably patterned over the wide areas required of metasurfaces using the helium focused ion beam microscope. Under imperfect fabrication conditions, we achieve 11-nm-wide nanogaps and 12-nm-wide nanowires over an area of 13 µm2, and successfully validate our results with optical characterization and comparable full-wave simulations.

Surface-enhanced mid-infrared absorption spectroscopy using miniaturized-disc metasurface.

Surface-enhanced infrared spectroscopy is an important technique for improving the signal-to-noise ratio of spectroscopic material identification measurements in the mid-infrared fingerprinting region. However, the lower bound of the fingerprinting region receives much less attention due to a scarcity of transparent materials, more expensive sources, and weaker plasmonic effects. In this paper, we present a miniaturized metasurface unit cell for surface-enhanced infrared spectroscopy of the 15-[Formula: see text]m vibrational band of CO[Formula: see text]. The unit cell consists of a gold disc, patterned along the edge with fine gaps/wires to create a resonant metamaterial liner. In simulation, our plasmonic metamaterial-lined disc achieves greater than [Formula: see text] the average field intensity enhancement of a comparable dipole array and a miniaturized size of [Formula: see text] using complex, 100-nm features that are patterned using 100-kV electron-beam lithography. In a simple experiment, the metamaterial-lined disc metasurface shows a high tolerance to fabrication imperfections and enhances the absorption of CO[Formula: see text] at 15 [Formula: see text]m. The resonant wavelength and reflection magnitude can be tuned over a wide range by adjusting the liner feature sizes and the metasurface array pitch to target other vibrational bands. This work is a step toward low-cost, more compact on-chip integrated gas sensors.

Patterning of Complex, Nanometer-Scale Features in Wide-Area Gold Nanoplasmonic Structures Using Helium Focused Ion Beam Milling.

Meeting the evolving demands of plasmonics research requires increasingly precise control over surface plasmon properties, which necessitates extremely fine nanopatterning, complex geometries, and/or long-range order. Nanoplasmonic metasurfaces are representative of a modern research area requiring intricate, high-fidelity features reproduced over areas of several free-space wavelengths, making them one of the most challenging fabrication problems in the field today. This work presents a systematic study of the helium focused ion beam milling of gold for nanoplasmonic metasurface applications, using as its example a nanoplasmonic metasurface based on an array of nanometer-scale plasmonic-wire-loaded subwavelength apertures in a gold film. At each step, the pattern variations are compared to simulation to predict the experimental outcome. Our results show that even in a practical fabrication environment, helium ion beam milling can be used to reliably pattern 10 nm features into gold with 1:5 aspect ratio in complex geometries over a wide area.

Musical molecules: the molecular junction as an active component in audio distortion circuits.

Molecular junctions that have a non-linear current-voltage characteristic consistent with quantum mechanical tunneling are demonstrated as analog audio clipping elements in overdrive circuits widely used in electronic music, particularly with electric guitars. The performance of large-area molecular junctions fabricated at the wafer level is compared to currently standard semiconductor diode clippers, showing a difference in the sound character. The harmonic distributions resulting from the use of traditional and molecular clipping elements are reported and discussed, and differences in performance are noted that result from the underlying physics that controls the electronic properties of each clipping component. In addition, the ability to tune the sound using the molecular junction is demonstrated. Finally, the hybrid circuit is compared to an overdriven tube amplifier, which has been the standard reference electric guitar clipped tone for over 60 years. In order to investigate the feasibility of manufacturing molecular junctions for use in commercial applications, devices are fabricated using a low-density format at the wafer level, where 38 dies per wafer, each containing two molecular junctions, are made with exceptional non-shorted yield (99.4%, representing 718 out of 722 tested devices) without requiring clean room facilities.