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1.
Materials (Basel) ; 16(24)2023 Dec 13.
Article in English | MEDLINE | ID: mdl-38138768

ABSTRACT

To make the sound absorber easy to fabricate and convenient for practical application, a modular composable acoustic metamaterial with multiple nonunique chambers (MCAM-MNCs) was proposed and investigated, which was divided into a front panel with the same perforated apertures and a rear chamber with a nonunique grouped cavity. Through the acoustic finite element simulation, the parametric studies of the diameter of aperture d, depth of chamber T0, and thickness of panel t0 were conducted, which could tune the sound absorption performances of MCAM-MNCs-1 and MCAM-MNCs-2 for the expected noise reduction effect. The effective sound absorption band of MCAM-MNCs-1 was 556 Hz (773-1329 Hz), 456 Hz (646-1102 Hz), and 387 Hz (564-951 Hz) for T = 30 mm, T = 40 mm, and T = 50 mm, respectively, and the corresponding average sound absorption coefficient was 0.8696, 0.8854, and 0.8916, accordingly, which exhibited excellent noise attenuation performance. The sound absorption mechanism of MCAM-MNCs was investigated by the distributions of the total sound energy density (TSED). The components used to assemble the MCAM-MNCs sample were fabricated by additive manufacturing, and its actual sound absorption coefficients were tested according to the transfer matrix method, which demonstrated its feasibility and promoted its actual application.

2.
Materials (Basel) ; 16(20)2023 Oct 11.
Article in English | MEDLINE | ID: mdl-37895624

ABSTRACT

To reduce the noise generated by large mechanical equipment, a stackable and expandable acoustic metamaterial with multiple tortuous channels (SEAM-MTCs) was developed in this study. The proposed SEAM-MTCs consisted of odd panels, even panels, chambers, and a final closing plate, and these component parts could be fabricated separately and then assembled. The influencing factors, including the number of layers N, the thickness of panel t0, the size of square aperture a, and the depth of chamber T0 were investigated using acoustic finite element simulation. The sound absorption mechanism was exhibited by the distributions of the total acoustic energy density at the resonance frequencies. The number of resonance frequencies increased from 13 to 31 with the number of layers N increasing from 2 to 6, and the average sound absorption coefficients in [200 Hz, 6000 Hz] was improved from 0.5169 to 0.6160. The experimental validation of actual sound absorption coefficients in [200 Hz, 1600 Hz] showed excellent consistency with simulation data, which proved the accuracy of the finite element simulation model and the reliability of the analysis of influencing factors. The proposed SEAM-MTCs has great potential in the field of equipment noise reduction.

3.
Materials (Basel) ; 16(15)2023 Jul 31.
Article in English | MEDLINE | ID: mdl-37570082

ABSTRACT

The limited occupied space and various noise spectrum requires an adjustable sound absorber with a smart structure and tunable sound absorption performance. The hexagonal acoustic metamaterial cell of the multiple parallel-connection resonators with tunable perforating rate was proposed in this research, which consisted of six triangular cavities and six trapezium cavities, and the perforation rate of each cavity was adjustable by moving the sliding block along the slideway. The optimal geometric parameters were obtained by the joint optimization of the acoustic finite element simulation and cuckoo search algorithm, and the average sound absorption coefficients in the target frequency ranges of 650-1150 Hz, 700-1200 Hz and 700-1000 Hz were up to 0.8565, 0.8615 and 0.8807, respectively. The experimental sample was fabricated by the fused filament fabrication method, and its sound absorption coefficients were further detected by impedance tube detector. The consistency between simulation data and experimental data proved the accuracy of the acoustic finite element simulation model and the effectiveness of the joint optimization method. The tunable sound absorption performance, outstanding low-frequency noise reduction property, extensible outline structure and efficient space utilization were favorable to promote its practical applications in noise reduction.

4.
Materials (Basel) ; 16(12)2023 Jun 09.
Article in English | MEDLINE | ID: mdl-37374482

ABSTRACT

In order to achieve a balance between sound insulation and ventilation, a novel acoustic metamaterial of air-permeable multiple-parallel-connection folding chambers was proposed in this study that was based on Fano-like interference, and its sound-insulation performance was investigated through acoustic finite element simulation. Each layer of the multiple-parallel-connection folding chambers consisted of a square front panel with many apertures and a corresponding chamber with many cavities, which were able to extend both in the thickness direction and in the plane direction. Parametric analysis was conducted for the number of layers nl and turns nt, the thickness of each layer L2, the inner side lengths of the helical chamber a1, and the interval s among the various cavities. With the parameters of nl = 10, nt = 1, L2 = 10 mm, a1 = 28 mm, and s = 1 mm, there were 21 sound-transmission-loss peaks in the frequency range 200-1600 Hz, and the sound-transmission loss reached 26.05 dB, 26.85 dB, 27.03 dB, and 33.6 dB at the low frequencies 468 Hz, 525 Hz, 560 Hz, and 580 Hz, respectively. Meanwhile, the corresponding open area for air passage reached 55.18%, which yielded a capacity for both efficient ventilation and high selective-sound-insulation performance.

5.
Polymers (Basel) ; 15(7)2023 Mar 25.
Article in English | MEDLINE | ID: mdl-37050258

ABSTRACT

Due to the viscoelasticity of rubber materials, hysteresis loss due to deformation is the main reason for the rolling resistance of high-speed rubber tracks. Since the structure and material of high-speed rubber track assemblies are different from traditional tires and metal tracks, the rolling resistance theory of traditional wheeled and tracked vehicles is not applicable. Therefore, in order to determine the rolling resistance scientifically and accurately, the mechanism research of the rolling resistance of high-speed rubber track assembly is the key to the design of high-speed rubber crawler vehicles. In this paper, the stress-strain characteristics of rubber track under the action of compression, tension, bending, and driving were studied. The strain load spectrum of rubber tracks was established, and the strain cyclic load was extracted by the rainflow method. The temperature model of the rubber track was developed based on its dynamic characteristics. On the basis of energy conservation, the hysteresis loss of rubber is equivalent to the energy consumption of rolling resistance, and the theoretical model of rolling resistance of high-speed rubber track assembly is established. In accordance with the model above, the key influencing factors and changing trends of rolling resistance are analyzed, which provides a theoretical basis for the performance optimization of high-speed rubber track assembly.

6.
Materials (Basel) ; 16(4)2023 Feb 14.
Article in English | MEDLINE | ID: mdl-36837229

ABSTRACT

A Helmholtz resonator (HR) with an embedded aperture is an effective acoustic metamaterial for noise reduction in the low-frequency range. Its sound absorption property is significantly affected by the aperture shape. Sound absorption properties of HRs with the embedded aperture for various tangent sectional shapes were studied by a two-dimensional acoustic finite element simulation. The sequence of resonance frequency from low to high was olive, common trapeziform, reverse trapeziform, dumbbell and rectangle. Meanwhile, those HRs for various cross-sectional shapes were investigated by a three-dimensional acoustic finite element simulation. The sequence of resonance frequency from low to high were round, regular hexagon, square, regular triangle and regular pentagon. Moreover, the reason for these phenomena was analyzed by the distributions of sound pressure, acoustic velocity and temperature. Furthermore, on the basement of the optimum tangent and cross-sectional shape, the sound absorption property of parallel-connection Helmholtz resonators was optimized. The experimental sample with optimal parameters was fabricated, and its average sound absorption coefficient reached 0.7821 in 500-820 Hz with a limited thickness of 30 mm. The research achievements proved the significance of aperture shape, which provided guidance for the development of sound absorbers in the low-frequency range.

7.
Polymers (Basel) ; 15(3)2023 Jan 25.
Article in English | MEDLINE | ID: mdl-36771912

ABSTRACT

The composite rubber reinforced with hollow glass microsphere (HGM) was a promising composite material for noise reduction, and its sound insulation mechanism was studied based on an acoustic finite element simulation to gain the appropriate parameter with certain constraint conditions. The built simulation model included the air domain, polymer domain and inorganic particles domain. The sound insulation mechanism of the composite material was investigated through distributions of the sound pressure and sound pressure level. The influences of the parameters on the sound transmission loss (STL) were researched one by one, such as the densities of the composite rubber and HGM, the acoustic velocities in the polymer and inorganic particle, the frequency of the incident wave, the thickness of the sound insulator, and the diameter, volume ratio and hollow ratio of the HGM. The weighted STL with the 1/3 octave band was treated as the evaluation criterion to compare the sound insulation property with the various parameters. For the limited thicknesses of 1 mm, 2 mm, 3 mm and 4 mm, the corresponding optimal weighted STL of the composite material reached 14.02 dB, 19.88 dB, 22.838 dB and 25.27 dB with the selected parameters, which exhibited an excellent sound insulation performance and could promote the practical applications of the proposed composite rubber reinforced with HGM.

8.
Polymers (Basel) ; 14(24)2022 Dec 12.
Article in English | MEDLINE | ID: mdl-36559802

ABSTRACT

The variable noise spectrum for many actual application scenarios requires a sound absorber to adapt to this variation. An adjustable sound absorber of multiple parallel-connection Helmholtz resonators with tunable apertures (TA-MPCHRs) is prepared by the low-force stereolithography of photopolymer resin, which aims to improve the applicability of the proposed sound absorber for noise with various frequency ranges. The proposed TA-MPCHR metamaterial contains five metamaterial cells. Each metamaterial cell contains nine single Helmholtz resonators. It is treated as a basic structural unit for an array arrangement. The tunable aperture is realized by utilizing four segments of extendable cylindrical chambers with length l0, which indicates that the length of the aperture l is in the range of [l0, 4l0], and that it is tunable. With a certain group of specific parameters for the proposed TA-MPCHR, the influence of the tunable aperture with a variable length is investigated by acoustic finite element simulation with a two-dimensional rotational symmetric model. For the given noise spectrum of certain actual equipment with four operating modes, the TA-MPCHR sample with a limited total thickness of 40 mm is optimized, which is made of photopolymer resin by the low-force stereolithography, and its actual average sound absorption coefficients for the frequency ranges of 500-800 Hz, 550-900 Hz, 600-1000 Hz and 700-1150 Hz reach 0.9203, 0.9202, 0.9436 and 0.9561, respectively. Relative to common non-adjustable metamaterials, the TA-MPCHR made of photopolymer resin can reduce occupied space and improve absorption efficiency, which is favorable in promoting its practical applications in the noise pollution prevention.

9.
Polymers (Basel) ; 14(22)2022 Nov 16.
Article in English | MEDLINE | ID: mdl-36433077

ABSTRACT

Polyisoprene, with a high degree of polymerization, is the main component of natural rubber. In the industrial production process, it is necessary to adjust the length of the macromolecule of polyisoprene to improve its plasticity. It is thus of vital importance to explore the effect of the degree of polymerization of polyisoprene on its properties, e.g., mechanical property and thermal property. Molecular dynamics simulations link microstructure to macroscopic properties. In this paper, Moltemplate was used to establish polyisoprene models with different degrees of polymerization, and the mechanical properties of polyisoprene under uniaxial tension were analyzed under an OPLS all-atom force field. The results showed that the strength and elastic modulus of the material increased with the increase in the degree of polymerization of the molecular chain. In the process of tensile loading, the non-bonded potential energy played a dominant role in the change of the total system potential energy. Then, the thermal conductivity of polyisoprene with different degrees of polymerization was calculated by the non-equilibrium molecular dynamics method (NEMD). The thermal conductivity of PI was predicted to converge to 0.179 W/(m·K). The mechanism of thermal conductivity of the polymer containing branched chains was also discussed and analyzed. The research content of this paper aims to provide theoretical support for improving the mechanical and thermal properties of natural rubber base materials.

10.
Polymers (Basel) ; 14(19)2022 Sep 23.
Article in English | MEDLINE | ID: mdl-36235933

ABSTRACT

In order to solve the problem of poor interfacial adhesion between aramid fibers and a rubber matrix, an efficient and mild modification method was proposed via polydopamine and mercapto functionalized graphene oxide (GO) and carbon nanotube (CNTs) hybrids synergistically modifying aramid fibers. GO and CNTs were firstly stacked and assembled into unique 3D GO-CNTs hybrids through π-π conjugation. Then, the mercapto functionalization of the assembled 3D GO-CNTs hybrids was realized via the dehydration condensation reaction between the hydroxyls of GO and the silanol groups of coupling agent. Finally, the mercapto functionalized 3D GO-CNTs hybrids were grafted onto the aramid fibers, which were pre-modified by polydopamine through the Michael addition reaction mechanism. The surface morphology and chemical structures of GO-CNTs hybrids and fibers and the interfacial adhesion strength between fibers and rubber matrix were investigated. The results showed that the modification method had brought about great changes in the surface structure of fibers but not generated any damage traces. More importantly, this modification method could improve the interfacial strength by 110.95%, and the reason was not only the reactivity of functional groups but also that the 3D GO-CNTs hybrids with excellent mechanical properties could effectively share interfacial stress. The method proposed in this paper was universal and had the potential to be applied to other high-performance fiber-reinforced composites.

11.
Materials (Basel) ; 15(19)2022 Sep 28.
Article in English | MEDLINE | ID: mdl-36234084

ABSTRACT

The mechanical properties of resin samples in low-force stereolithography additive manufacturing were affected by the printing orientation, and were investigated and optimized to achieve excellent single or comprehensive tensile strength, compressive strength, and flexural modulus. The resin samples were fabricated using a Form3 3D printer based on light curing technology according to the corresponding national standards, and they were detected using a universal testing machine to test their mechanical properties. The influence of the printing orientation was represented by the rotation angle of the resin samples relative to the x-axis, y-axis and z-axis, and the parameters was selected in the range 0°-90° with an interval of 30°. The multiple regression models for the mechanical properties of the prepared resin samples were obtained based on least square estimation, which offered a foundation from which to optimize the parameters of the printing orientation by cuckoo search algorithm. The optimal parameters for the tensile strength, compressive strength and flexural modulus were 'α = 45°, ß = 25°, γ = 90°', 'ß = 0°, ß = 51°, γ = 85°' and 'α = 26°, ß = 0°, γ = 90°', respectively, which obtained the improvements of 80.52%, 15.94%, and 48.85%, respectively, relative to the worst conditions. The mechanism was qualitatively discussed based on the force analysis. The achievements obtained in this study proved that optimization of the printing orientation could improve the mechanical properties of the fabricated sample, which provided a reference for all additive manufacturing methods.

12.
Materials (Basel) ; 15(18)2022 Sep 16.
Article in English | MEDLINE | ID: mdl-36143762

ABSTRACT

To achieve the broadband sound absorption at low frequencies within a limited space, an optimal design of joint simulation method incorporating the finite element simulation and cuckoo search algorithm was proposed. An acoustic metamaterial of multiple parallel hexagonal Helmholtz resonators with sub-wavelength dimensions was designed and optimized in this research. First, the initial geometric parameters of the investigated acoustic metamaterials were confirmed according to the actual noise reduction requirements to reduce the optimization burden and improve the optimization efficiency. Then, the acoustic metamaterial with the various depths of the necks was optimized by the joint simulation method, which combined the finite element simulation and the cuckoo search algorithm. The experimental sample was prepared using the 3D printer according to the obtained optimal parameters. The simulation results and experimental results exhibited excellent consistency. Compared with the derived sound absorption coefficients by theoretical modeling, those achieved in the finite element simulation were closer to the experimental results, which also verified the accuracy of this optimal design method. The results proved that the optimal design method was applicable to the achievement of broadband sound absorption with different low frequency ranges, which provided a novel method for the development and application of acoustic metamaterials.

13.
Materials (Basel) ; 15(17)2022 Aug 27.
Article in English | MEDLINE | ID: mdl-36079319

ABSTRACT

For the common difficulties of noise control in a low frequency region, an adjustable parallel Helmholtz acoustic metamaterial (APH-AM) was developed to gain broad sound absorption band by introducing multiple resonant chambers to enlarge the absorption bandwidth and tuning length of rear cavity for each chamber. Based on the coupling analysis of double resonators, the generation mechanism of broad sound absorption by adjusting the structural parameters was analyzed, which provided a foundation for the development of APH-AM with tunable chambers. Different from other optimization designs by theoretical modeling or finite element simulation, the adjustment of sound absorption performance for the proposed APH-AM could be directly conducted in transfer function tube measurement by changing the length of rear cavity for each chamber. According to optimization process of APH-AM, The target for all sound absorption coefficients above 0.9 was achieved in 602-1287 Hz with normal incidence and that for all sound absorption coefficients above 0.85 was obtained in 618-1482 Hz. The distributions of sound pressure for peak absorption frequency points were obtained in the finite element simulation, which could exhibit its sound absorption mechanism. Meanwhile, the sound absorption performance of the APH-AM with larger length of the aperture and that with smaller diameter of the aperture were discussed by finite element simulation, which could further show the potential of APH-AM in the low-frequency sound absorption. The proposed APH-AM could improve efficiency and accuracy in adjusting sound absorption performance purposefully, which would promote its practical application in low-frequency noise control.

14.
Polymers (Basel) ; 14(13)2022 Jul 05.
Article in English | MEDLINE | ID: mdl-35808790

ABSTRACT

The binding amount of rubber and reinforcing filler directly affects the quality of rubber products. The effect of aromatic solvent oil (S-150) on the binding amount of rubber and reinforcing filler was studied. In order to determine the suitability of rubber after adding S-150, the curing characteristics, physical performance and tensile properties of rubber samples were tested and analyzed. Meanwhile, the microstructure of the composite was analyzed by scanning electron microscopy (SEM). The test results showed that the binding amount of rubber and reinforcing filler was increased after adding S-150. The density and Shore A hardness were decreased. When carbon black was 80 phr, after adding 40 phr of S-150, the rebound resilience of rubber increased by 13% on average, and the elongation at break increased by 88% on average. When white carbon black was between 10-70 phr, after adding 65 phr of S-150, the rebound resilience of rubber increased by 9% on average, and the elongation at break increased by 51% on average. Modulus at 100% and tensile strength were decreased. Meanwhile, it could be judged from the microstructure results that the reticulation space inside the rubber was increased, the agglomerate particles were relatively uniform, and no bubbles or holes were observed. The mechanism that S-150 could increase the binding amount of rubber was analyzed according to the like-dissolves-like principle. This research achievement could lead to improvements in the quality of rubber products and promote their practical application.

15.
Materials (Basel) ; 15(11)2022 May 29.
Article in English | MEDLINE | ID: mdl-35683180

ABSTRACT

Acoustic metamaterials based on Helmholtz resonance have perfect sound absorption characteristics with the subwavelength size, but the absorption bandwidth is narrow, which limits the practical applications for noise control with broadband. On the basis of the Fabry-Perot resonance principle, a novel sound absorber of the acoustic metamaterial by parallel connection of the multiple spiral chambers (abbreviated as MSC-AM) is proposed and investigated in this research. Through the theoretical modeling, finite element simulation, sample preparation and experimental validation, the effectiveness and practicability of the MSC-AM are verified. Actual sound absorption coefficients of the MSC-AM in the frequency range of 360-680 Hz (with the bandwidth Δf1 = 320 Hz) are larger than 0.8, which exhibit the extraordinarily low-frequency sound absorption performance. Moreover, actual sound absorption coefficients are above 0.5 in the 350-1600 Hz range (with a bandwidth Δf2 = 1250 Hz), which achieve broadband sound absorption in the low-middle frequency range. According to various actual demands, the structural parameters can be adjusted flexibly to realize the customization of sound absorption bandwidth, which provides a novel way to design and improve acoustic metamaterials to reduce the noise with various frequency bands and has promising prospects of application in low-frequency sound absorption.

16.
Materials (Basel) ; 15(10)2022 May 10.
Article in English | MEDLINE | ID: mdl-35629445

ABSTRACT

An acoustic metamaterial absorber of parallel-connection square Helmholtz resonators is proposed in this study, and its sound absorption coefficients are optimized to reduce the noise for the given conditions in the factory. A two-dimensional equivalent simulation model is built to obtain the initial value of parameters and a three-dimensional finite element model is constructed to simulate the sound absorption performance of the metamaterial cell, which aims to improve the research efficiency. The optimal parameters of metamaterial cells are obtained through the particle swarm optimization algorithm, and its effectiveness and accuracy are validated through preparing the experimental sample using 3D printing and measuring the sound absorption coefficient by the standing wave tube detection. The consistency between the experimental data and simulation data verifies feasibility of the proposed optimization method and usefulness of the developed acoustic metamaterial absorber, and the desired sound absorption performances for given conditions are achieved. The experimental results prove that parallel-connection square Helmholtz resonators can achieve an adjustable frequency spectrum for the low frequency noise control by parameter optimization, which is propitious to promote its application in reducing the noise in the factory.

17.
Polymers (Basel) ; 11(8)2019 Jul 24.
Article in English | MEDLINE | ID: mdl-31344873

ABSTRACT

To enhance the interfacial adhesion between poly(p-phenylene terephthalamide) (PPTA) fibers and a rubber matrix without damaging the fiber structures, aminated carbon nanotubes (NH2-CNTs) were mildly deposited onto the fiber surface by combining the biomimetic modification of dopamine via the Michael addition reaction. Furthermore, differences between the "one-step" method and the "two-step" method were researched through adjusting the addition sequence of NH2-CNTs. The surface morphologies and chemical structures of PPTA fibers before and after modification were characterized by scanning electron microscopy (SEM), Fourier transform infrared spectroscopy (FTIR) and X-ray photoelectron spectroscopy (XPS). The mechanical properties of fibers and the adhesive properties with rubber were tested using an electronic tensile tester of single-filament and universal testing machine, respectively. After modification by the "one-step" method for 24 h, the single-filament tensile strength of the modified fibers increased by 16.5%, meanwhile, the pull-out force of the modified fibers to rubber increased by approximately 59.7%. Compared with the "two-step" method, the "one-step" method had superiority due to the short reaction time and the large deposition rate of CNTs.

18.
Materials (Basel) ; 12(9)2019 Apr 30.
Article in English | MEDLINE | ID: mdl-31052278

ABSTRACT

Increasing absorption efficiency and decreasing total thickness of the acoustic absorber is favorable to promote its practical application. Four compressed porous metals with compression ratios of 0%, 30%, 60%, and 90% were prepared to assemble the four-layer gradient compressed porous metals, which aimed to develop the acoustic absorber with high-efficiency and thin thickness. Through deriving structural parameters of thickness, porosity, and static flow resistivity for the compressed porous metals, theoretical models of sound absorption coefficients of the gradient compressed porous metals were constructed through transfer matrix method according to the Johnson-Champoux-Allard model. Sound absorption coefficients of four-layer gradient compressed porous metals with the different permutations were theoretically analyzed and experimentally measured, and the optimal average sound absorption coefficient of 60.33% in 100-6000 Hz was obtained with the total thickness of 11 mm. Sound absorption coefficients of the optimal gradient compressed porous metal were further compared with those of the simple superposed compressed porous metal, which proved that the former could obtain higher absorption efficiency with thinner thickness and fewer materials. These phenomena were explored by morphology characterizations. The developed high-efficiency and thin-thickness acoustic absorber of gradient compressed porous metal can be applied in acoustic environmental detection and industrial noise reduction.

19.
Polymers (Basel) ; 11(2)2019 Feb 20.
Article in English | MEDLINE | ID: mdl-30960358

ABSTRACT

In order to enhance the interfacial adhesion of poly(p-phenylene terephthalamide) (PPTA) fibers to the rubber composites, a novel method to deposit multi-walled carbon nanotubes (MWCNTs) onto the surface of PPTA fibers has been proposed in this study. This chemical modification was performed through the introduction of epoxy groups by Friedel⁻Crafts alkylation on the PPTA fibers, the carboxylation of MWCNTs, and the ring-opening reaction between the epoxy groups and the carboxyl groups. The morphologies, chemical structures, and compositions of the surface of PPTA fibers were characterized by scanning electron microscope, Fourier transform infrared spectroscopy, and X-ray photoelectron spectroscopy. The results showed that MWCNTs were uniformly deposited onto the surface of PPTA fibers with the covalent bonds. The measurement of contact angles of the fibers with polar solvent and non-polar solvent indicated that the surface energy of deposited fibers significantly increased by 41.9% compared with the untreated fibers. An electronic tensile tester of single-filament and a universal testing machine were utilized to measure the strength change of the fibers after modification and the interfacial adhesion between the fibers and the rubber matrix, respectively. The results showed that the tensile strength had not been obviously reduced, and the pull-out force and peeling strength of the fibers to the rubber increased by 46.3% and 56.5%, respectively.

20.
Opt Express ; 21(22): 26123-35, 2013 Nov 04.
Article in English | MEDLINE | ID: mdl-24216836

ABSTRACT

Combination of the oxidation of reaction-sintered silicon carbide (RS-SiC) and the polishing of the oxide is an effective way of machining RS-SiC. In this study, anodic oxidation, thermal oxidation, and plasma oxidation were respectively conducted to obtain oxides on RS-SiC surfaces. By performing scanning electron microscopy/energy dispersive X-ray spectroscopy (SEM-EDX) analysis and scanning white light interferometry (SWLI) measurement, the oxidation behavior of these oxidation methods was compared. Through ceria slurry polishing, the polishing properties of the oxides were evaluated. Analysis of the oxygen element on polished surfaces by SEM-EDX was conducted to evaluate the remaining oxide. By analyzing the three oxidation methods with corresponding polishing process on the basis of schematic diagrams, suitable application conditions for these methods were clarified. Anodic oxidation with simultaneous polishing is suitable for the rapid figuring of RS-SiC with a high material removal rate; polishing of a thermally oxidized surface is suitable for machining RS-SiC mirrors with complex shapes; combination of plasma oxidation and polishing is suitable for the fine finishing of RS-SiC with excellent surface roughness. These oxidation methods are expected to improve the machining of RS-SiC substrates and promote the application of RS-SiC products in the fields of optics, molds, and ceramics.

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