Correction: A graphene/h-BN MEMS varactor for sub-THz and THz applications.

Correction for 'A graphene/h-BN MEMS varactor for sub-THz and THz applications' by Piotr A. Drózdz et al., Nanoscale, 2023, https://doi.org/10.1039/d2nr06863j.

A graphene/h-BN MEMS varactor for sub-THz and THz applications.

Recent development of terahertz systems has created the need for new elements operating in this frequency band, i.e., fast tunable devices such as varactors. Here, we present the process flow and characterization of a novel electronic variable capacitor device that is made with the use of 2D metamaterials such as graphene (GR) or hexagonal boron nitride (h-BN). Comb-like structures are etched into a silicon/silicon nitride substrate and a metal electrode is deposited at the bottom. Next, a PMMA/GR/h-BN layer is placed on top of the sample. As voltage is applied between GR and metal, the PMMA/GR/h-BN layer bends towards the bottom electrode thus decreasing the distance between electrodes and changing the capacitance. The high tunability and complementary metal oxide semiconductor (CMOS)-compatible process flow of the platform for our device and its millimeter size make it promising for applications in future electronics and terahertz technologies. The goal of our research is to integrate our device with dielectric rod waveguides, thus making THz phase shifters.

Piezoelectric Response and Substrate Effect of ZnO Nanowires for Mechanical Energy Harvesting in Internet-of-Things Applications.

Recently, an unprecedented growth in the internet of things (IoT) is being observed, which is becoming the main driver for the entire semiconductor industry. Reliable maintenance and servicing of the IoT is becoming challenging, knowing that the IoT nodes outnumber the human population by a factor of seven. Energy harvesting (EH) can overcome those difficulties, delivering the energyautonomous IoT nodes to the market. EH converts natural or waste energies (vibrations, heat losses, air flows, light, etc.) into useful energy. This article explores the performance of ZnO nanowires under mechanical actuation to characterize their piezoelectric performance. ZnO nanowires were fabricated using ALD and a subsequent chemical bath growth. AISI 301 steel was used as a substrate of the EH device to better fit the mechanical requirements for the piezoelectric generator. We determined that a thin layer of another oxide below ZnO provides outstanding adhesion. The samples were submitted under repetitive mechanical stress in order to characterize the output piezovoltage for different conditions. They exhibited a piezoelectric signal which was stable after hundreds of actuations. This shows good promise for the use of our device based on ZnO, an Earth-abundant and non-toxic material, as an alternative to the conventional and popular but harmful and toxic PZT. The designed measurement setup demonstrated that a AISI 301 steel substrate coated with ZnO deposited by ALD and grown in a chemical bath has promising performance as a piezoelectric material. Characterized ZnO samples generate up to 80 nJ of energy during 55 s runs under matched load conditions, which is sufficient to supply a modern IoT node.

A CMOS compatible thermoelectric device made of crystalline silicon membranes with nanopores.

Herein, we report the use of nanostructured crystalline silicon as a thermoelectric material and its integration into thermoelectric devices. The proof-of-concept relies on the partial suppression of lattice thermal conduction by introducing pores with dimensions scaling between the electron mean free path and the phonon mean free path. In other words, we artificially aimed at the well-known 'electron crystal and phonon glass' trade-off targeted in thermoelectricity. The devices were fabricated using CMOS-compatible processes and exhibited power generation up to 5.5 mW cm-2under a temperature difference of 280 K. These numbers demonstrate the capability to power autonomous devices with environmental heat sources using silicon chips of centimeter square dimensions. We also report the possibility of using the developed devices for integrated thermoelectric cooling.

Coupling of PZT Thin Films with Bimetallic Strip Heat Engines for Thermal Energy Harvesting.

A thermal energy harvester based on a double transduction mechanism and which converts thermal energy into electrical energy by means of piezoelectric membranes and bimetals, has previously been developed and widely presented in the literature In such a device, the thermo-mechanical conversion is ensured by a bimetal whereas the electro-mechanical conversion is generated by a piezoelectric ceramic. However, it has been shown that only 19% of the mechanical energy delivered by the bimetal during its snap is converted into electrical energy. To extract more energy from the bimetallic strip and to increase the transduction efficiency, a new way to couple piezoelectric materials with bimetals has thus been explored through direct deposition of piezoelectric layers on bimetals. This paper consequently presents an alternative way to harvest heat, based on piezoelectric bimetallic strip heat engines and presents a proof of concept of such a system. In this light, different PZT (Lead zirconate titanate) thin films were synthesized directly on aluminium foils and were attached to the bimetals using conductive epoxy. The fabrication process of each sample is presented herein as well as the experimental tests carried out on the devices. Throughout this study, different thicknesses of the piezoelectric layers and substrates were tested to determine the most powerful configuration. Finally, the study also gives some guidelines for future improvements of piezoelectric bimetals.

Broadband terahertz imaging with highly sensitive silicon CMOS detectors.

This paper investigates terahertz detectors fabricated in a low-cost 130 nm silicon CMOS technology. We show that the detectors consisting of a nMOS field effect transistor as rectifying element and an integrated bow-tie coupling antenna achieve a record responsivity above 5 kV/W and a noise equivalent power below 10 pW/Hz(0.5) in the important atmospheric window around 300 GHz and at room temperature. We demonstrate furthermore that the same detectors are efficient for imaging in a very wide frequency range from ~0.27 THz up to 1.05 THz. These results pave the way towards high sensitivity focal plane arrays in silicon for terahertz imaging.