ABSTRACT
This study aims to substantiate the potential of using "classical" metallization systems as microelectronic thermal memory cells. An experimental simulation is used to demonstrate that thermal information can be stored in memory for a certain time and then read without distortion. The possibility of using thin metal films on single-crystal silicon wafers as thermal memory cells is discussed. An experimental parametric study of "recording" thermal pulses and the temperature dynamics after their interruption is performed. This study uses rectangular current pulses with an amplitude of (1 6) × 1010 A/m2 and a duration of up to 1 ms. The temperature dynamics of a "thermal cell" are oscillographically studied up to the critical conditions when the contact area and metal film start degrading. The conditions of interconnections overheating up to the circuit break are considered.
ABSTRACT
This paper presents a new development of small-diameter, high-spatial-resolution, semipassive bimorph deformable mirrors to be used in different imaging systems. To manufacture the small control elements, laser engraving technology is used. An ultrasonic welding technique to connect the wires to the electrodes (actuators) is applied for this kind of mirror. The initial flatness of the mirror surface equals 0.33 µm (P-V) due to the use of substrate polishing technology after gluing the glass substrate to a piezo disk. We present the main parameters of these wavefront correctors, such as the response functions of different electrodes, temporal behavior, and the ability to compensate for high-order aberrations.
