ABSTRACT
The reflective and structural parameters of Be/Si/Al multilayer mirrors have been studied. The extent of stability of their X-ray optical characteristics has been demonstrated during storage in air for 4 years and during vacuum annealing at temperatures up to 100°C. A high reflectance of 62.5% was obtained, together with a spectral selectivity of λ/Δλ≈59 at a wavelength of 17.14â nm and 34%, with λ/Δλ ≈ 31 at a wavelength of 31.3â nm. It was shown that Si interlayers reduce the interlayer roughness from 0.45 to 0.20â nm.
ABSTRACT
The influence of Mo interlayers on the microstructure of films and boundaries, and the reflective characteristics of Ru/Be multilayer mirrors (MLM) were studied by X-ray reflectometry and diffractometry, and secondary ion mass spectrometry (SIMS). An increase in the reflection coefficients of MLM at a wavelength of 11.4 nm to record values of R = 72.2% and FWHM to Δλ1/2 = 0.38 nm is shown. The effect of interlayers on the structural and reflective characteristics of MLM is explained by the barrier properties of the Mo layers, which prevent the mutual mixing of the Ru and Be layers, which leads to the formation of beryllides and a decrease in the X-ray optical contrast at the boundaries.
ABSTRACT
The article is devoted to the development of an EUV microscope using a wavelength of 13.84â nm. Due to the use of a mirror lens with a large numerical aperture, NA = 0.27, and a short depth of focus, it has been possible to carry out z-tomography of bio-samples for the first time with this type of microscope. A 3D image was reconstructed, and a pixel resolution of 140â nm was obtained. A new simple algorithm for the 3D reconstruction of absorption images from z-tomography data has been proposed that takes into account lens aberrations and a point spread function. The algorithm reduces the inverse absorption task to the corresponding well-studied task of fluorescence microscopy, with an error of 10% for cells up to 10 µm thick.
