ABSTRACT
Scan-free grazing-emission X-ray fluorescence spectroscopy (GEXRF) is an established technique for the investigation of the elemental depth-profiles of various samples. Recently it has been applied to investigating structured nanosamples in the tender X-ray range. However, lighter elements such as oxygen, nitrogen or carbon cannot be efficiently investigated in this energy range, because of the ineffective excitation. Moreover, common CCD detectors are not able to discriminate between fluorescence lines below 1 keV. Oxygen and nitrogen are important components of insulation and passivation layers, for example, in silicon oxide or silicon nitride. In this work, scan-free GEXRF is applied in proof-of-concept measurements for the investigation of lateral ordered 2D nanostructures in the soft X-ray range. The sample investigated is a Si3N4 lamellar grating, which represents 2D periodic nanostructures as used in the semiconductor industry. The emerging two-dimensional fluorescence patterns are recorded with a CMOS detector. To this end, energy-dispersive spectra are obtained via single-photon event evaluation. In this way, spatial and therefore angular information is obtained, while discrimination between different photon energies is enabled. The results are compared to calculations of the sample model performed by a Maxwell solver based on the finite-elements method. A first measurement is carried out at the UE56-2 PGM-2 beamline at the BESSY II synchrotron radiation facility to demonstrate the feasibility of the method in the soft X-ray range. Furthermore, a laser-produced plasma source (LPP) is utilized to investigate the feasibility of this technique in the laboratory. The results from the BESSY II measurements are in good agreement with the simulations and prove the applicability of scan-free GEXRF in the soft X-ray range for quality control and process engineering of 2D nanostructures. The LPP results illustrate the chances and challenges concerning a transfer of the methodology to the laboratory.
ABSTRACT
In laboratory based x-ray absorption fine structure (XAFS) spectroscopy, the slow readout speed of conventional CCD cameras can prolong the measuring times by multiple orders of magnitude. Using pulsed sources, e.g., laser-based x-ray sources, the pulse repetition rate often exceeds the frame rate of the CCD camera. We report the use of a scientific CMOS (sCMOS) camera for XAFS spectroscopy with a laser-produced plasma source facilitating measurements at 100 Hz. With this technological improvement, a new class of experiments becomes possible, starting from the time consuming analysis of samples with small absorption to pump-probe investigations. Furthermore, laboratory quick soft x-ray absorption fine structure (QXAFS) measurements with 10 ms time resolution are rendered feasible. We present the characterization of the sCMOS camera concerning noise characteristics and a comparison to conventional CCD camera performance. The feasibility of time resolved QXAFS measurements is shown by analyzing the statistical uncertainty of single shot spectra. Finally, XAFS spectroscopy on a complex sandwich structure with minute amounts of NiO exemplifies the additional merits of fast detectors.
ABSTRACT
A new device for polarization control at the free electron laser facility FLASH1 at DESY has been commissioned for user operation. The polarizer is based on phase retardation upon reflection off metallic mirrors. Its performance is characterized in three independent measurements and confirms the theoretical predictions of efficient and broadband generation of circularly polarized radiation in the extreme ultraviolet spectral range from 35 eV to 90 eV. The degree of circular polarization reaches up to 90% while maintaining high total transmission values exceeding 30%. The simple design of the device allows straightforward alignment for user operation and rapid switching between left and right circularly polarized radiation.
