Traceable localization enables accurate integration of quantum emitters and photonic structures with high yield.

In a popular integration process for quantum information technologies, localization microscopy of quantum emitters guides lithographic placement of photonic structures. However, a complex coupling of microscopy and lithography errors degrades registration accuracy, severely limiting device performance and process yield. We introduce a methodology to solve this widespread but poorly understood problem. A new foundation of traceable localization enables rapid characterization of lithographic standards and comprehensive calibration of cryogenic microscopes, revealing and correcting latent systematic effects. Of particular concern, we discover that scale factor deviation and complex optical distortion couple to dominate registration errors. These novel results parameterize a process model for integrating quantum dots and bullseye resonators, predicting higher yield by orders of magnitude, depending on the Purcell factor threshold as a quantum performance metric. Our foundational methodology is a key enabler of the lab-to-fab transition of quantum information technologies and has broader implications to cryogenic and correlative microscopy.

Unmasking the Resolution-Throughput Tradespace of Focused-Ion-Beam Machining.

Focused-ion-beam machining is a powerful process to fabricate complex nanostructures, often through a sacrificial mask that enables milling beyond the resolution limit of the ion beam. However, current understanding of this super-resolution effect is empirical in the spatial domain and nonexistent in the temporal domain. This article reports the primary study of this fundamental tradespace of resolution and throughput. Chromia functions well as a masking material due to its smooth, uniform, and amorphous structure. An efficient method of in-line metrology enables characterization of ion-beam focus by scanning electron microscopy. Fabrication and characterization of complex test structures through chromia and into silica probe the response of the bilayer to a focused beam of gallium cations, demonstrating super-resolution factors of up to 6 ± 2 and improvements to volume throughput of at least factors of 42 ± 2, with uncertainties denoting 95% coverage intervals. Tractable theory models the essential aspects of the super-resolution effect for various nanostructures. Application of the new tradespace increases the volume throughput of machining Fresnel lenses by a factor of 75, enabling the introduction of projection standards for optical microscopy. These results enable paradigm shifts of sacrificial masking from empirical to engineering design and from prototyping to manufacturing.

Sub-picoliter Traceability of Microdroplet Gravimetry and Microscopy.

Gravimetry typically lacks the resolution to measure single microdroplets, whereas microscopy is often inaccurate beyond the resolution limit. To address these issues, we advance and integrate these complementary methods, introducing simultaneous measurements of the same microdroplets, comprehensive calibrations that are independently traceable to the International System of Units (SI), and Monte-Carlo evaluations of volumetric uncertainty. We achieve sub-picoliter agreement of measurements of microdroplets in flight with volumes of approximately 70 pL, with ensemble gravimetry and optical microscopy both yielding 95% coverage intervals of ±0.6 pL, or relative uncertainties of ±0.9%, and root-mean-square deviations of mean values between the two methods of 0.2 pL or 0.3%. These uncertainties match previous gravimetry results and improve upon previous microscopy results by an order of magnitude. Gravimetry precision depends on the continuity of droplet formation, whereas microscopy accuracy requires that optical diffraction from an edge reference matches that from a microdroplet. Applying our microscopy method, we jet and image water microdroplets suspending fluorescent nanoplastics, count nanoplastic particles after deposition and evaporation, and transfer volumetric traceability to the number concentrations of single microdroplets. We expect that our methods will impact diverse fields involving dimensional metrology and volumetric analysis of microdroplets, including inkjet microfabrication, disease transmission, and industrial sprays.

Accurate localization microscopy by intrinsic aberration calibration.

A standard paradigm of localization microscopy involves extension from two to three dimensions by engineering information into emitter images, and approximation of errors resulting from the field dependence of optical aberrations. We invert this standard paradigm, introducing the concept of fully exploiting the latent information of intrinsic aberrations by comprehensive calibration of an ordinary microscope, enabling accurate localization of single emitters in three dimensions throughout an ultrawide and deep field. To complete the extraction of spatial information from microscale bodies ranging from imaging substrates to microsystem technologies, we introduce a synergistic concept of the rigid transformation of the positions of multiple emitters in three dimensions, improving precision, testing accuracy, and yielding measurements in six degrees of freedom. Our study illuminates the challenge of aberration effects in localization microscopy, redefines the challenge as an opportunity for accurate, precise, and complete localization, and elucidates the performance and reliability of a complex microelectromechanical system.

Bubble Magnetometry of Nanoparticle Heterogeneity and Interaction.

Bubbles have a rich history as transducers in particle-physics experiments. In a solid-state analogue, we use bubble domains in nanomagnetic films to measure magnetic nanoparticles. This technique can determine the magnetic orientation of a single nanoparticle in a fraction of a second and generate a full hysteresis loop in a few seconds. We achieve this high throughput by tuning the nanomagnetic properties of the films, including the Dzyaloshinskii-Moriya interaction, in an application of topological protection from the skyrmion state to a nanoparticle sensor. We develop the technique on nickel-iron nanorods and iron-oxide nanoparticles, which delineate a wide range of properties and applications. Bubble magnetometry enables precise statistical analysis of the magnetic hysteresis of dispersed nanoparticles, and direct measurement of a transition from superparamagnetic behavior as single nanoparticles to collective behavior in nanoscale agglomerates. These results demonstrate a practical capability for measuring the heterogeneity and interaction of magnetic nanoparticles.

Rapid Synthesis and Correlative Measurements of Electrocatalytic Nickel/Iron Oxide Nanoparticles.

Electrocatalytic core-shell nanoparticles, such as nickel/iron oxides for the oxygen evolution reaction (OER) in alkaline electrolytes, require rapid synthesis and measurement for practical use. To meet this challenge, we investigated a novel process of adding Ni(II) species to Fe nanoparticles immediately after synthesis, which we expected to yield Ni-rich shells around Fe-rich cores. Cyclic voltammetry showed that the overpotential decreased as the molar ratio of Ni to Fe in the synthesis vessel increased from 0.2 mol Ni:1 mol Fe to 1.5 mol Ni:1 mol Fe, consistent with an increase of Ni composition. Unexpectedly, the overpotential increased abruptly at 2.0 mol Ni:1 mol Fe. X-ray photoelectron spectroscopy revealed that this synthesis ratio resulted in less Ni at the nanoparticle surfaces than lower synthesis ratios. These results demonstrate the sensitivity of rapid electrochemical measurements to surface composition, and the limits of Ni(II) adsorption and reduction to rapidly form Ni-rich shells around Fe-rich cores. Cyclic voltammetry also showed that the onset of the methanol oxidation reaction (MOR) correlates with the oxidation of Ni(OH)2 to NiOOH. Therefore, tuning materials to improve performance as OER catalysts also improves their performance as MOR catalysts.

Particle Tracking of Microelectromechanical System Performance and Reliability.

Microelectromechanical systems (MEMS) that require contact of moving parts to implement complex functions exhibit limits to their performance and reliability. Here, we advance our particle tracking method to measure MEMS motion in operando at nanometer, microradian, and millisecond scales. We test a torsional ratcheting actuator and observe dynamic behavior ranging from nearly perfect repeatability, to transient feedback and stiction, to terminal failure. This new measurement capability will help to understand and improve MEMS motion.

Subnanometer localization accuracy in widefield optical microscopy.

The common assumption that precision is the limit of accuracy in localization microscopy and the typical absence of comprehensive calibration of optical microscopes lead to a widespread issue-overconfidence in measurement results with nanoscale statistical uncertainties that can be invalid due to microscale systematic errors. In this article, we report a comprehensive solution to this underappreciated problem. We develop arrays of subresolution apertures into the first reference materials that enable localization errors approaching the atomic scale across a submillimeter field. We present novel methods for calibrating our microscope system using aperture arrays and develop aberration corrections that reach the precision limit of our reference materials. We correct and register localization data from multiple colors and test different sources of light emission with equal accuracy, indicating the general applicability of our reference materials and calibration methods. In a first application of our new measurement capability, we introduce the concept of critical-dimension localization microscopy, facilitating tests of nanofabrication processes and quality control of aperture arrays. In a second application, we apply these stable reference materials to answer open questions about the apparent instability of fluorescent nanoparticles that commonly serve as fiducial markers. Our study establishes a foundation for subnanometer localization accuracy in widefield optical microscopy.

Subnanometer structure and function from ion beams through complex fluidics to fluorescent particles.

The vertical dimensions of complex nanostructures determine the functions of diverse nanotechnologies. In this paper, we investigate the unknown limits of such structure-function relationships at subnanometer scales. We begin with a quantitative evaluation of measurement uncertainty from atomic force microscopy, which propagates through our investigation from ion beam fabrication to fluorescent particle characterization. We use a focused beam of gallium ions to subtractively pattern silicon surfaces, and silicon nitride and silicon dioxide films. Our study of material responses quantifies the atomic limits of forming complex topographies with subnanometer resolution of vertical features over a wide range of vertical and lateral dimensions. Our results demonstrate the underutilized capability of this standard system for rapid prototyping of subnanometer structures in hard materials. We directly apply this unprecedented dimensional control to fabricate nanofluidic devices for the analytical separation of colloidal nanoparticles by size exclusion. Optical microscopy of single nanoparticles within such reference materials establishes a subnanometer limit of the fluidic manipulation of particulate matter and enables critical-dimension particle tracking with subnanometer accuracy. After calibrating for optical interference within our multifunctional devices, which also enables device metrology and integrated spectroscopy, we reveal an unexpected relationship between nanoparticle size and emission intensity for common fluorescent probes. Emission intensity increases supervolumetrically with nanoparticle diameter and then decreases as nanoparticles with different diameters photobleach to similar values of terminal intensity. We propose a simple model to empirically interpret these surprising results. Our investigation enables new control and study of structure-function relationships at subnanometer scales.

Transfer of motion through a microelectromechanical linkage at nanometer and microradian scales.

Mechanical linkages are fundamentally important for the transfer of motion through assemblies of parts to perform work. Whereas their behavior in macroscale systems is well understood, there are open questions regarding the performance and reliability of linkages with moving parts in contact within microscale systems. Measurement challenges impede experimental studies to answer such questions. In this study, we develop a novel combination of optical microscopy methods that enable the first quantitative measurements at nanometer and microradian scales of the transfer of motion through a microelectromechanical linkage. We track surface features and fluorescent nanoparticles as optical indicators of the motion of the underlying parts of the microsystem. Empirical models allow precise characterization of the electrothermal actuation of the linkage. The transfer of motion between translating and rotating links can be nearly ideal, depending on the operating conditions. The coupling and decoupling of the links agree with an ideal kinematic model to within approximately 5%, and the rotational output is perfectly repeatable to within approximately 20 microradians. However, stiction can result in nonideal kinematics, and input noise on the scale of a few millivolts produces an asymmetric interaction of electrical noise and mechanical play that results in the nondeterministic transfer of motion. Our study establishes a new approach towards testing the performance and reliability of the transfer of motion through assemblies of microscale parts, opening the door to future studies of complex microsystems.

The Nanolithography Toolbox.

This article introduces in archival form the Nanolithography Toolbox, a platform-independent software package for scripted lithography pattern layout generation. The Center for Nanoscale Science and Technology (CNST) at the National Institute of Standards and Technology (NIST) developed the Nanolithography Toolbox to help users of the CNST NanoFab design devices with complex curves and aggressive critical dimensions. Using parameterized shapes as building blocks, the Nanolithography Toolbox allows users to rapidly design and layout nanoscale devices of arbitrary complexity through scripting and programming. The Toolbox offers many parameterized shapes, including structure libraries for micro- and nanoelectromechanical systems (MEMS and NEMS) and nanophotonic devices. Furthermore, the Toolbox allows users to precisely define the number of vertices for each shape or create vectorized shapes using Bezier curves. Parameterized control allows users to design smooth curves with complex shapes. The Toolbox is applicable to a broad range of design tasks in the fabrication of microscale and nanoscale devices.

Dimensional reduction of duplex DNA under confinement to nanofluidic slits.

There has been much interest in the dimensional properties of double-stranded DNA (dsDNA) confined to nanoscale environments as a problem of fundamental importance in both biological and technological fields. This has led to a series of measurements by fluorescence microscopy of single dsDNA molecules under confinement to nanofluidic slits. Despite the efforts expended on such experiments and the corresponding theory and simulations of confined polymers, a consistent description of changes of the radius of gyration of dsDNA under strong confinement has not yet emerged. Here, we perform molecular dynamics (MD) simulations to identify relevant factors that might account for this inconsistency. Our simulations indicate a significant amplification of excluded volume interactions under confinement at the nanoscale due to the reduction of the effective dimensionality of the system. Thus, any factor influencing the excluded volume interaction of dsDNA, such as ionic strength, solution chemistry, and even fluorescent labels, can greatly influence the dsDNA size under strong confinement. These factors, which are normally less important in bulk solutions of dsDNA at moderate ionic strengths because of the relative weakness of the excluded volume interaction, must therefore be under tight control to achieve reproducible measurements of dsDNA under conditions of dimensional reduction. By simulating semi-flexible polymers over a range of parameter values relevant to the experimental systems and exploiting past theoretical treatments of the dimensional variation of swelling exponents and prefactors, we have developed a novel predictive relationship for the in-plane radius of gyration of long semi-flexible polymers under slit-like confinement. Importantly, these analytic expressions allow us to estimate the properties of dsDNA for the experimentally and biologically relevant range of contour lengths that is not currently accessible by state-of-the-art MD simulations.

Rapid Prototyping of Nanofluidic Slits in a Silicone Bilayer.

This article reports a process for rapidly prototyping nanofluidic devices, particularly those comprising slits with microscale widths and nanoscale depths, in silicone. This process consists of designing a nanofluidic device, fabricating a photomask, fabricating a device mold in epoxy photoresist, molding a device in silicone, cutting and punching a molded silicone device, bonding a silicone device to a glass substrate, and filling the device with aqueous solution. By using a bilayer of hard and soft silicone, we have formed and filled nanofluidic slits with depths of less than 400 nm and aspect ratios of width to depth exceeding 250 without collapse of the slits. An important attribute of this article is that the description of this rapid prototyping process is very comprehensive, presenting context and details which are highly relevant to the rational implementation and reliable repetition of the process. Moreover, this process makes use of equipment commonly found in nanofabrication facilities and research laboratories, facilitating the broad adaptation and application of the process. Therefore, while this article specifically informs users of the Center for Nanoscale Science and Technology (CNST) at the National Institute of Standards and Technology (NIST), we anticipate that this information will be generally useful for the nanofabrication and nanofluidics research communities at large, and particularly useful for neophyte nanofabricators and nanofluidicists.

High-speed, high-purity separation of gold nanoparticle-DNA origami constructs using centrifugation.

DNA origami is a powerful platform for assembling gold nanoparticle constructs, an important class of nanostructure with numerous applications. Such constructs are assembled by the association of complementary DNA oligomers. These association reactions have yields of <100%, requiring the development of methods to purify the desired product. We study the performance of centrifugation as a separation approach by combining optical and hydrodynamic measurements and computations. We demonstrate that bench-top microcentrifugation is a simple and efficient method of separating the reaction products, readily achieving purities of >90%. The gold nanoparticles play a number of critical roles in our system, functioning not only as integral components of the purified products, but also as hydrodynamic separators and optical indicators of the reaction products during the purification process. We find that separation resolution is ultimately limited by the polydispersity in the mass of the gold nanoparticles and by structural distortions of DNA origami induced by the gold nanoparticles. Our study establishes a methodology for determining the design rules for nanomanufacturing DNA origami-nanoparticle constructs.

Kilohertz rotation of nanorods propelled by ultrasound, traced by microvortex advection of nanoparticles.

We measure the microvortical flows around gold nanorods propelled by ultrasound in water using polystyrene nanoparticles as optical tracers. We infer the rotational frequencies of such nanomotors assuming a hydrodynamic model of this interaction. In this way, we find that nanomotors rotate around their longitudinal axes at frequencies of up to ≈ 2.5 kHz, or ≈ 150 000 rpm, in the planar pressure node of a half-wavelength layered acoustic resonator driven at ≈ 3 MHz with an acoustic energy density of <10 J·m(-3). The corresponding tangential speeds of up to ≈ 2.5 mm·s(-1) at a nanomotor radius of ≈ 160 nm are 2 orders of magnitude faster than the translational speeds of up to ≈ 20 µm·s(-1). We also find that rotation and translation are independent modes of motion within experimental uncertainty. Our study is an important step toward understanding the behavior and fulfilling the potential of this dynamic nanotechnology for hydrodynamically interacting with biological media, as well as other applications involving nanoscale transport, mixing, drilling, assembly, and rheology. Our results also establish the fastest reported rotation of a nanomotor in aqueous solution.

A glowing future for lab on a chip testing standards.

Testing standards are more fundamental from a metrological perspective and less controversial from an industrial perspective than product standards, representing a path of less resistance towards the standardization and commercialization of lab on a chip technology. In this Focus article, the development of a lab on a chip testing standard is considered in the context of autofluorescence. This material property of microfluidic and nanofluidic devices is of increasing importance due to the growing interest in sensitive fluorescence measurements performed in chips fabricated from plastics.

DNA molecules descending a nanofluidic staircase by entropophoresis.

A complex entropy gradient for confined DNA molecules was engineered for the first time. Following the second law of thermodynamics, this enabled the directed self-transport and self-concentration of DNA molecules. This new nanofluidic method is termed entropophoresis. As implemented in experiments, long DNA molecules were dyed with cyanine dimers, dispersed in a high ionic strength buffer, and confined by a nanofluidic channel with a depth profile approximated by a staircase function. The staircase step depths spanned the transition from strong to moderate confinement. The diffusion of DNA molecules across slitlike steps was ratcheted by entropic forces applied at step edges, so that DNA molecules descended and collected at the bottom of the staircase, as observed by fluorescence microscopy. Different DNA morphologies, lengths, and stoichiometric base pair to dye molecule ratios were tested and determined to influence the rate of transport by entropophoresis. A model of ratcheted diffusion was used to interpret a shifting balance of forces applied to linear DNA molecules of standard length in a complex free energy landscape. Related metrics for the overall and optimum performance of entropophoresis were developed. The device and method reported here transcend current limitations in nanofluidics and present new possibilities in polymer physics, biophysics, separation science, and lab-on-a-chip technology.

Separation and metrology of nanoparticles by nanofluidic size exclusion.

A nanofluidic technology for the on-chip size separation and metrology of nanoparticles is demonstrated. A nanofluidic channel was engineered with a depth profile approximated by a staircase function. Numerous stepped reductions in channel depth were used to separate a bimodal mixture of nanoparticles by nanofluidic size exclusion. Epifluorescence microscopy was used to map the size exclusion positions of individual nanoparticles to corresponding channel depths, enabling measurement of the nanoparticle size distributions and validation of the size separation mechanism.

Microfluidic directed self-assembly of liposome-hydrogel hybrid nanoparticles.

We present a microfluidic method to direct the self-assembly of temperature-sensitive liposome-hydrogel hybrid nanoparticles. Our approach yields nanoparticles with structural properties and highly monodisperse size distributions precisely controlled across a broad range relevant to the targeted delivery and controlled release of encapsulated therapeutic agents. We used microfluidic hydrodynamic focusing to control the convective-diffusive mixing of two miscible nanoparticle precursor solutions (a DPPC:cholesterol:DCP phospholipid formulation in isopropanol and a photopolymerizable N-isopropylacrylamide mixture in aqueous buffer) to form nanoscale lipid vesicles with encapsulated hydrogel precursors. These precursor nanoparticles were collected off-chip and were irradiated with ultraviolet (UV) light in bulk to polymerize the nanoparticle interiors into hydrogel cores. Multiangle laser light scattering in conjunction with asymmetric flow field-flow fractionation was used to characterize nanoparticle size distributions, which spanned the approximately 150 to approximately 300 nm diameter range as controlled by microfluidic mixing conditions, with a polydispersity of approximately 3% to approximately 5% (relative standard deviation). Transmission electron microscopy was then used to confirm the spherical shape and core-shell composition of the hybrid nanoparticles. This method may be extended to the directed self-assembly of other similar cross-linked hybrid nanoparticle systems with engineered size/structure-function relationships for practical use in healthcare and life science applications.