Highly mass-sensitive thin film plate acoustic resonators (FPAR).

The mass sensitivity of thin aluminum nitride (AlN) film S0 Lamb wave resonators is theoretically and experimentally studied. Theoretical predictions based on modal and finite elements method analysis are experimentally verified. Here, two-port 888 MHz synchronous FPARs are micromachined and subsequently coated with hexamethyl-disiloxane(HMDSO)-plasma-polymerized thin films of various thicknesses. Systematic data on frequency shift and insertion loss versus film thickness are presented. FPARs demonstrate high mass-loading sensitivity as well as good tolerance towards the HMDSO viscous losses. Initial measurements in gas phase environment are further presented.

STW resonator with organo-functionalized metallic nanoparticle film for vapor sensing.

A 1 GHz surface transverse wave resonator on 36 degrees Y-cut quartz plate coated with organothiol-functionalized gold nanoparticle film has been studied as a chemical gas sensor. Considerable sensitivity of the resonant frequency to vapors of ethanol, methanol, chloroform, and acetic acid has been found. Owing to the high short-term stability of the oscillator built, the detection limit is in the low ppm range. The results qualitatively confirm previous results on the same film type obtained by conductivity measurements. In the present case, the conductivity effect resulting from variable separation of nanoparticles is accompanied with surface-attached mass of the absorbed gas. The film matrix exhibits considerable capacity to absorb large amounts of molecules at high gas concentrations.

Surface transverse waves: properties, devices, and analysis.

Surface transverse waves represent a new generation of the surface acoustic wave (SAW) family that offers advantageous properties without further demand for new materials or improved design and technology. The most effective activity in the surface transverse wave (STW) area has been realized during the last decade with high-performance devices achieved and analytical methods developed. The present paper reviews the basic achievements in historical and factual order. A state-of-the-art introduction is combined with discussion on the development tendencies with specific emphasis on sensor technology.

Coupling-of-modes analysis of STW resonators including loss mechanism.

Surface transverse wave (STW) resonators exhibit substantial advantages over conventional surface acoustic wave (SAW) resonators. However, their analysis is more involved because of the complicated nature of STW. Many parameters have been studied, but the one that has been difficult to analyze accurately is the quality factor Q, which is of great importance for characterizing the devices. At present, none of the available analytical models is concerned with quantitative loss consideration, and the establishment of reliable design rules is difficult. We present a theoretical study that allows one to conduct coupling-of-modes (COM) STW loss analysis and estimate the resonator Q from material and layout parameters. The COM transmission coefficient chi11 is derived by Floquet analysis. Its imaginary part is obtained by numerically fitting available experimental data for the Q-factor of particular resonators. It is a measure of STW propagation loss that adds to the electrode reflection loss. As the overall loss is extremely sensitive to the choice of parameter values, the full numerical search for optimum design presently discussed can save considerable experimental effort.