Physical forces exerted by microbubbles on a surface in a traveling wave field.

The effect of a wave with a varying traveling component on the bubble activity as well as the physical force generated by microbubbles on a surface has been studied. The acoustic emission from a collection of bubbles is measured in a 928 kHz sound field. Particle removal tests on a surface, which actually measures the applied physical force by the bubbles on that surface, indicate a very strong dependence on the angle of incidence. In other words, when the traveling wave component is maximized, the average physical force applied by microbubbles reaches a maximum. Almost complete particle removal for 78 nm silica particles was obtained for a traveling wave, while particle removal efficiency was reduced to only a few percent when a standing wave was applied. This increase in particle removal for a traveling wave is probably caused by a decrease in bubble trapping at nodes and antinodes in a standing wave field.

Enhancement of cavitation activity and particle removal with pulsed high frequency ultrasound and supersaturation.

Megasonic cleaning as applied in leading edge semiconductor device manufacturing strongly relies on the phenomenon of acoustic cavitation. As the occurrence of acoustic cavitation is incorporating a multitude of interdependent effects, the amount of cavitation activity in the cleaning liquid strongly depends on the sonication conditions. It is shown that cavitation activity as measured by means of ultraharmonic cavitation noise can be significantly enhanced when pulsed sonication is applied to a gas supersaturated liquid under traveling wave conditions. It is demonstrated that this enhancement coincides with a dramatic increase in particle removal and is therefore of great interest for megasonic cleaning applications. It is demonstrated that the optimal pulse parameters are determined by the dissolution time of the active bubbles, whereas the amount of cavitation activity depends on the ratio between pulse-off and pulse-on time as well as the applied acoustic power. The optimal pulse-off time is independent of the corresponding pulse-on time but increases significantly with increasing gas concentration. We show that on the other hand, supersaturation is needed to enable acoustic cavitation at aforementioned conditions, but has to be kept below values, for which active bubbles cannot dissolve anymore and are therefore lost during subsequent pulses. For the applicable range of gas contents between 100% and 130% saturation, the optimal pulse-off time reaches values between 150 and 340 ms, respectively. Full particle removal of 78 nm-diameter silica particles at a power density of 0.67 W/cm(2) is obtained for the optimal pulse-off times. The optimal pulse-off time values are derived from the dissolution time of bubbles with a radius of 3.3 µm and verified experimentally. The bubble radius used in the calculations corresponds to the linear resonance size in a 928 kHz sound field, which demonstrates that the recycling of active bubbles is the main enhancement mechanism. The optimal choice of the pulsing conditions however is constrained by the trade-off between the effective sonication time and the desire to have a sufficient amount of active bubbles at lower powers, which might be necessary if very delicate structures have to be cleaned.

Towards an understanding and control of cavitation activity in 1 MHz ultrasound fields.

Various industrial processes such as sonochemical processing and ultrasonic cleaning strongly rely on the phenomenon of acoustic cavitation. As the occurrence of acoustic cavitation is incorporating a multitude of interdependent effects, the amount of cavitation activity in a vessel is strongly depending on the ultrasonic process conditions. It is therefore crucial to quantify cavitation activity as a function of the process parameters. At 1 MHz, the active cavitation bubbles are so small that it is becoming difficult to observe them in a direct way. Hence, another metrology based on secondary effects of acoustic cavitation is more suitable to study cavitation activity. In this paper we present a detailed analysis of acoustic cavitation phenomena at 1 MHz ultrasound by means of time-resolved measurements of sonoluminescence, cavitation noise, and synchronized high-speed stroboscopic Schlieren imaging. It is shown that a correlation exists between sonoluminescence, and the ultraharmonic and broadband signals extracted from the cavitation noise spectra. The signals can be utilized to characterize different regimes of cavitation activity at different acoustic power densities. When cavitation activity sets on, the aforementioned signals correlate to fluctuations in the Schlieren contrast as well as the number of nucleated bubbles extracted from the Schlieren Images. This additionally proves that signals extracted from cavitation noise spectra truly represent a measure for cavitation activity. The cyclic behavior of cavitation activity is investigated and related to the evolution of the bubble populations in the ultrasonic tank. It is shown that cavitation activity is strongly linked to the occurrence of fast-moving bubbles. The origin of this "bubble streamers" is investigated and their role in the initialization and propagation of cavitation activity throughout the sonicated liquid is discussed. Finally, it is shown that bubble activity can be stabilized and enhanced by the use of pulsed ultrasound by conserving and recycling active bubbles between subsequent pulsing cycles.

Time-resolved monitoring of cavitation activity in megasonic cleaning systems.

The occurrence of acoustic cavitation in the cleaning liquid is a crucial precondition for the performance of megasonic cleaning systems. Hence, a fundamental understanding of the impact of different parameters of the megasonic process on cavitation activity is necessary. A setup capable of synchronously measuring sonoluminescence and acoustic emission originating from acoustically active bubbles is presented. The system also includes a high-speed-stroboscopic Schlieren imaging system to directly visualize the influence of cavitation activity on the Schlieren contrast and resolvable bubbles. This allows a thorough characterization of the mutual interaction of cavitation bubbles with the sound field and with each other. Results obtained during continuous sonication of argon-saturated water at various nominal power densities indicate that acoustic cavitation occurs in a cyclic manner, during which periods of stable and inertial cavitation activity alternate. The occurrence of higher and ultraharmonics in the acoustic emission spectra is characteristic for the stable cavitation state. The inertial cavitation state is characterized by a strong attenuation of the sound field, the explosive growth of bubbles and the occurrence of broadband components in the acoustic spectra. Both states can only be sustained at sufficiently high intensities of the sound field. At lower intensities, their occurrences are limited to short, random bursts. Cleaning activity can be linked to the cavitation activity through the measurement of particle removal on standard 200 mm silicon wafers. It is found that the particle removal efficiency is reduced, when a continuous state of cavitation activity ceases to exist.