ABSTRACT
Actuators play a crucial role in microelectromechanical systems (MEMS) and hold substantial potential for applications in various domains, including reconfigurable metamaterials. This research aims to design, fabricate, and characterize structures for the actuation of the EMA. The electromagnetic actuator overcomes the lack of high drive voltage required by other actuators. The proposed actuator configuration comprises supporting cantilever beams with fixed ends, an integrated coil positioned above the cantilever's movable plate, and a permanent magnet located beneath the cantilever's movable plate to generate a static magnetic field. Utilizing flexible polyimide, the fabrication process of the EMA is simplified, overcoming limitations associated with silicon-based micromachining techniques. Furthermore, this approach potentially enables large-scale production of EMA, with displacement reaching up to 250 µm under a 100 mA current, thereby expanding their scope of applications in manufacturing. To demonstrate the function of the EMA, we integrated it with a metamaterial structure to form a compact, tunable terahertz absorber, demonstrating a potential for reconfigurable electromagnetic space.
ABSTRACT
Terahertz (THz) wave manipulation, especially the beam deflection, plays an essential role in various applications, such as next-generation communication, space exploration, and high-resolution imaging. Current THz optical components and devices are hampered by their large bulk sizes and passive responses, limiting the development of high-performance, miniaturized THz microsystems. Tunable metasurfaces offer a powerful dynamic optical platform for controlling the propagation of electromagnetic waves. In this article, we presented a mechanically tunable metasurface (MTM), which can achieve terahertz beam deflection and vary the intensity of the anomalous reflected terahertz wave by changing the air gap between the metallic resonator (MR) array with phase discontinuities and Au ground plane. The absence of lossy spacer materials substantially enhances deflection efficiency. The device was fabricated by a combination of the surface and bulk-micromachining processes. The THz beam steering capability was characterized using terahertz time domain spectroscopy. When the air gap is 50 µm, the maximum deflection coefficient reaches 0.60 at 0.61 THz with a deflection angle of ~44.5°, consistent with theoretical predictions. We further established an electrically tunable miniaturized THz device for dynamic beam steering by introducing a micro voice coil motor to control the air gap continuously. It is shown that our designed MTM demonstrates a high modulation depth of deflection coefficient (~ 62.5%) in the target steered angle at the operating frequency. Our results showcase the potential of the proposed MTM as a platform for high-efficiency THz beam manipulation.
ABSTRACT
WiFi energy harvesting is a promising solution for powering microsensors and microsystems through collecting electromagnetic (EM) energies that exist everywhere in modern daily lives. In order to harvest EM energy, we proposed a metamaterial-inspired antenna (MIA) based on the resonant magnetic dipole operating in the WiFi bands. The MIA consists of two metallic split-ring resonators (SRRs), separated by an FR4 dielectric layer, in the broadside coupled configuration. The incident EM waves excite surface currents in the coupled SRRs, and the energy is oscillating between them due to near-field coupling. By varying the vertical distance of the two SRRs, we may achieve impedance matching without complicated matching networks. Collected EM energy can be converted to DC voltages via a rectifier circuit at the output of the coupling coil. Measured results demonstrate that the designed MIA may resonate at 2.4 GHz with a deep-subwavelength form factor (14 mm×14 mm×1.6 mm). The WiFi energy-harvesting capability of the proposed MIA with an embedded one-stage Dickson voltage multiplier has also been evaluated. A rectified DC voltage is approximately 500 mV when the MIA is placed at a distance of 2 cm from the WiFi transmit antenna with a 9 dBm transmitting power. The proposed compact MIA in this paper is of great importance for powering future distributed microsystems.
