Nanofabrication of plasmonic structures on insulating substrates by resist-on-metal bilayer lift-off.

In last few decades, micro- and nano-fabrication techniques based on photolithography and electron beam lithography have advanced greatly, mainly in the field of semiconductor fabrication. Such techniques are generally transferrable to the fabrication of plasmonic structures and metamaterials. However, plasmonic devices often require a transparent insulating substrate to be operational at visible or near-infrared wavelengths. Here we report a resist-on-metal bilayer lift-off technique enabling the fabrication of plasmonic structures on insulating substrates. The metal layer under the resist eliminates major difficulties in lithography, such as charging during electron beam exposure and uncontrolled diffuse optical scattering during photolithography. In addition, the resist-on-metal bilayer can be migrated to different substrates with minimal process alteration, because the material properties of the substrate, such as secondary electron emission or optical reflectance, become irrelevant due to the shielding provided by the metal layer. As demonstrations, we fabricate large-scale plasmonic waveguides and Bragg gratings, adiabatically-modulated plasmonic waveguide couplers, and plasmonic nanoantenna arrays using the resist-on-metal bilayer lift-off process. The process can also be used to define structures formed of other materials such as dielectrics.

Single-mode surface plasmon distributed feedback lasers.

Single-mode surface plasmon distributed feedback (DFB) lasers are realized in the near infrared using a two-dimensional non-uniform long-range surface plasmon polariton structure. The surface plasmon mode is excited onto a 20 nm-thick, 1 µm-wide metal stripe (Ag or Au) on a silica substrate, where the stripe is stepped in width periodically, forming a 1st order Bragg grating. Optical gain is provided by optically pumping a 450 nm-thick IR-140 doped PMMA layer as the top cladding, which covers the entire length of the Bragg grating, thus creating a DFB laser. Single-mode lasing peaks of very narrow linewidth were observed for Ag and Au DFBs near 882 nm at room temperature. The narrow linewidths are explained by the low spontaneous emission rate into the surface plasmon lasing mode as well as the high quality factor of the DFB structure. The lasing emission is exclusively TM polarized. Kinks in light-light curves accompanied by spectrum narrowing were observed, from which threshold pump power densities can be clearly identified (0.78 MW cm-2 and 1.04 MW cm-2 for Ag and Au DFB lasers, respectively). The Schawlow-Townes linewidth for our Ag and Au DFB lasers is estimated and very narrow linewidths are predicted for the lasers. The lasers are suitable as inexpensive, recyclable and highly coherent sources of surface plasmons, or for integration with other surface plasmon elements of similar structure.

Characterization of grating-coupled long range surface plasmon polariton membrane waveguides.

The first demonstration of grating-coupled long range surface plasmon polaritons in cladded free-standing membrane waveguides is presented. Two different waveguide structures are explored: the first is a gold (Au) stripe embedded in a thin Cytop free-standing membrane, the other being the same structure but with a thin palladium (Pd) over-layer. The waveguides are excited with integrated grating couplers designed for a working wavelength of 1550 nm. The waveguides are characterized by applying a cutback technique with the Au waveguide loss measured as 3.4 dB/mm and the Pd/Au waveguide loss as 57 dB/mm. The wavelength dependency of the weakly reflecting optical cavity is also observed with a free spectral range of ~3.6 nm and a finesse of 2.1.

Plasmonic nanostructured metal-oxide-semiconductor reflection modulators.

We propose a plasmonic surface that produces an electrically controlled reflectance as a high-speed intensity modulator. The device is conceived as a metal-oxide-semiconductor capacitor on silicon with its metal structured as a thin patch bearing a contiguous nanoscale grating. The metal structure serves multiple functions as a driving electrode and as a grating coupler for perpendicularly incident p-polarized light to surface plasmons supported by the patch. Modulation is produced by charging and discharging the capacitor and exploiting the carrier refraction effect in silicon along with the high sensitivity of strongly confined surface plasmons to index perturbations. The area of the modulator is set by the area of the incident beam, leading to a very compact device for a strongly focused beam (∼2.5 µm in diameter). Theoretically, the modulator can operate over a broad electrical bandwidth (tens of gigahertz) with a modulation depth of 3 to 6%, a loss of 3 to 4 dB, and an optical bandwidth of about 50 nm. About 1000 modulators can be integrated over a 50 mm(2) area producing an aggregate electro-optic modulation rate in excess of 1 Tb/s. We demonstrate experimentally modulators operating at telecommunications wavelengths, fabricated as nanostructured Au/HfO2/p-Si capacitors. The modulators break conceptually from waveguide-based devices and belong to the same class of devices as surface photodetectors and vertical cavity surface-emitting lasers.

Fabrication of a plasmonic modulator incorporating an overlaid grating coupler.

The fabrication of a novel plasmonic reflection modulator is presented and described. The modulator includes plasmon excitation using a diffraction grating coupler and is based on a metal-insulator-semiconductor structure on silicon. Fabrication includes a thin thermal oxide, a plasmonic metal surface defined by optical lithography, a metal grating coupler defined by overlaid e-beam lithography, a passivation layer with metalized vias, and electrical contacts. Physical characterization of intermediate structures is provided along with modulation measurements at λ0 ∼ 1550 nm which verify the concept.

Near infrared amplified spontaneous emission in a dye-doped polymeric waveguide for active plasmonic applications.

Near-infrared amplified spontaneous emission (ASE) from an optically-pumped dye-doped polymeric slab waveguide, consisting of IR-140 in PMMA on a glass substrate, has been characterised. The ASE gain was measured using the variable stripe length method. Linewidth narrowing with increasing pump intensity was observed, indicating ASE gain in this material. The effects of the dye concentration and pump intensity on the gain were investigated under linear operation. The maximum achieved gain coefficient is γ ~68 cm(-1) for a film with 0.8 wt % of IR-140 to PMMA for a pump intensity of 43.4 mJ/cm(2). The polarisation dependence of the ASE gain was also investigated by measuring the gain coefficient of orthogonal TE and TM modes and varying the pump polarisation relative to the amplifier length. It was observed that there is some degree of gain anisotropy when the pump polarisation is aligned perpendicular to the length, but that the gain was isotropic when the pump polarisation is aligned parallel the length. The applicability of IR-140 doped PMMA for active plasmonic applications is discussed.

Atomically flat symmetric elliptical nanohole arrays in a gold film for ultrasensitive refractive index sensing.

Past works on refractive index sensing using nanohole arrays in metal films typically achieved a resolution of around 10(-4) to 10(-5) refractive index units (RIU), up to 10(-6) with complicated detection setups. This is an order of magnitude worse than commercial Kretschmann-based surface-plasmon resonance (SPR) sensors. Here, we demonstrate intensity-based bulk refractive index sensing in an aqueous environment with a resolution of 9.38 × 10(-8) refractive index units (RIU), showing for the first time comparable performance for nanohole SPR with Kretschmann-based SPR. This is achieved by the combination of three advances in the materials properties: (a) template stripping to achieve ultra-flat Au surfaces of ~0.2 nm roughness, (b) elliptical nanoholes to enhance transmission, and (c) a Cytop substrate to symmetrize the refractive index with the aqueous environment above the metal film. The simple optical microscope geometry and microfluidic integration used in this work is promising for multiplexed lab-on-chip analysis.

Biosensing using straight long-range surface plasmon waveguides.

Straight long-range surface plasmon waveguides are demonstrated as biosensors for the detection of cells, proteins and changes in the bulk refractive index of solutions. The sensors consist of 5 µm wide 22 nm thick Au stripes embedded in polymer (CYTOP™) with microfluidic channels etched into the top cladding. Bulk sensing is demonstrated by sequentially injecting six solutions of different refractive indices in 2 × 10(-3) RIU increments; such index steps were detected with a signal-to-noise ratio of ~1000. Selective capture of cells is demonstrated using Au waveguides functionalized with antibodies against blood group A, and red blood cells of group A and O in buffer as positive and negative analyte. Bovine serum albumin in buffer was used to demonstrate protein sensing. A monolayer of bovine serum albumin physisorbed on a carboxyl-terminated self-assembled monolayer on Au was detected with a signal-to-noise ratio of ~300. Overall, the biosensor demonstrated a good capability for detecting bulk changes in solution and for sensing analyte over a very wide range of mass (from cells to proteins). The biosensors are compact, inexpensive to fabricate, and may find use over a wide range of cost-sensitive sensing and detection applications.

Surface plasmon waveguide Schottky detector.

A surface plasmon polariton detector is demonstrated at infra-red wavelengths. The device consists of a metal stripe on silicon forming a Schottky contact thereon and supporting surface a plasmon polariton mode that is strongly confined and localised to the metal-semiconductor interface. Detection of optical radiation below the bandgap of silicon (at infrared wavelengths) occurs through internal photoemission. Responsivities of 0.38 and 1.04 mA/W were measured via end-fire coupling to a tapered optical fibre, at room temperature and at a wavelength of 1280 nm, for gold and aluminium stripes on n-type silicon, respectively. The device can be integrated with other structures used in nano-plasmonics, nano-photonics or silicon-based photonics, and it holds promise for short-reach optical interconnects and power monitoring applications.

Modeling electroosmotic and pressure-driven flows in porous microfluidic devices: zeta potential and porosity changes near the channel walls.

This work presents analytical solutions for both pressure-driven and electroosmotic flows in microchannels incorporating porous media. Solutions are based on a volume-averaged flow model using a scaling of the Navier-Stokes equations for fluid flow. The general model allows analysis of fluid flow in channels with porous regions bordering open regions and includes viscous forces, permitting consideration of porosity and zeta potential variations near channel walls. To obtain analytical solutions problems are constrained to the linearized Poisson-Boltzmann equation and a variation of Brinkman's equation [Appl. Sci. Res., Sect. A 1, 27 (1947); 1, 81 (1947)]. Cases include one continuous porous medium, two adjacent regions of different porosities, or one open channel adjacent to a porous region, and the porous material may have a different zeta potential than that of the channel walls. Solutions are described for two geometries, including flow between two parallel plates or in a cylinder. The model illustrates the relative importance of porosity and zeta potential in different regions of each channel.

Activation of microcomponents with light for micro-electro-mechanical systems and micro-optical-electro-mechanical systems applications.

We examine the light-activation properties of micrometer-sized gear structures fabricated with polysilicon surface micromachining techniques. The gears are held in place on a substrate through a capped anchor post and are free to rotate about the post. The light-activation technique is modeled on photon radiation pressure, and the equation of motion of the gear is solved for this activation technique. Experimental measurements of torque and damping are found to be consistent with expected results for micrometer-scale devices. Design optimization for optically actuated microstructures is discussed.