ABSTRACT
We have demonstrated the capability of scanning magnetoresistance microscope (SMRM) to be used for quantitative current measurements. The SMRM is a magnetic microscope that is based on an atomic force microscope (AFM) and simultaneously measures the localized surface magnetic field distribution and surface topography. The proposed SMRM employs an in-house built AFM cantilever equipped with a miniaturized magnetoresistive (MR) sensor as a magnetic field sensor. In this study, a spin-valve type MR sensor with a width of 1 microm was used to measure the magnetic field distribution induced by a current carrying wire with a width of 5 microm and a spacing of 1.6 microm at room temperature and under ambient conditions. Simultaneous imaging of the magnetic field distribution and the topography was successfully performed in the DC current ranging from 500 microA to 8 mA. The characterized SV sensor, which has a linear response to magnetic fields, offers the quantitative analysis of a magnetic field and current. The measured magnetic field strength was in good agreement with the result simulated using Biot-Savart's law.
